JPH0376144U - - Google Patents

Info

Publication number
JPH0376144U
JPH0376144U JP13688389U JP13688389U JPH0376144U JP H0376144 U JPH0376144 U JP H0376144U JP 13688389 U JP13688389 U JP 13688389U JP 13688389 U JP13688389 U JP 13688389U JP H0376144 U JPH0376144 U JP H0376144U
Authority
JP
Japan
Prior art keywords
laser beam
polygon mirror
laser
reflects
position sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13688389U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13688389U priority Critical patent/JPH0376144U/ja
Publication of JPH0376144U publication Critical patent/JPH0376144U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP13688389U 1989-11-28 1989-11-28 Pending JPH0376144U (US07179912-20070220-C00144.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13688389U JPH0376144U (US07179912-20070220-C00144.png) 1989-11-28 1989-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13688389U JPH0376144U (US07179912-20070220-C00144.png) 1989-11-28 1989-11-28

Publications (1)

Publication Number Publication Date
JPH0376144U true JPH0376144U (US07179912-20070220-C00144.png) 1991-07-30

Family

ID=31684068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13688389U Pending JPH0376144U (US07179912-20070220-C00144.png) 1989-11-28 1989-11-28

Country Status (1)

Country Link
JP (1) JPH0376144U (US07179912-20070220-C00144.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014077676A (ja) * 2012-10-10 2014-05-01 Harmonic Drive Syst Ind Co Ltd 有限角センサ
JP2017102272A (ja) * 2015-12-02 2017-06-08 株式会社ニコン ビーム走査装置、ビーム走査方法、およびパターン描画装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014077676A (ja) * 2012-10-10 2014-05-01 Harmonic Drive Syst Ind Co Ltd 有限角センサ
JP2017102272A (ja) * 2015-12-02 2017-06-08 株式会社ニコン ビーム走査装置、ビーム走査方法、およびパターン描画装置

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