JPH0373434U - - Google Patents

Info

Publication number
JPH0373434U
JPH0373434U JP13577489U JP13577489U JPH0373434U JP H0373434 U JPH0373434 U JP H0373434U JP 13577489 U JP13577489 U JP 13577489U JP 13577489 U JP13577489 U JP 13577489U JP H0373434 U JPH0373434 U JP H0373434U
Authority
JP
Japan
Prior art keywords
wafer
etching
lower electrode
processing chamber
loaded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13577489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13577489U priority Critical patent/JPH0373434U/ja
Publication of JPH0373434U publication Critical patent/JPH0373434U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP13577489U 1989-11-21 1989-11-21 Pending JPH0373434U (US07655688-20100202-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13577489U JPH0373434U (US07655688-20100202-C00086.png) 1989-11-21 1989-11-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13577489U JPH0373434U (US07655688-20100202-C00086.png) 1989-11-21 1989-11-21

Publications (1)

Publication Number Publication Date
JPH0373434U true JPH0373434U (US07655688-20100202-C00086.png) 1991-07-24

Family

ID=31683019

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13577489U Pending JPH0373434U (US07655688-20100202-C00086.png) 1989-11-21 1989-11-21

Country Status (1)

Country Link
JP (1) JPH0373434U (US07655688-20100202-C00086.png)

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