JPH0367441U - - Google Patents

Info

Publication number
JPH0367441U
JPH0367441U JP12930089U JP12930089U JPH0367441U JP H0367441 U JPH0367441 U JP H0367441U JP 12930089 U JP12930089 U JP 12930089U JP 12930089 U JP12930089 U JP 12930089U JP H0367441 U JPH0367441 U JP H0367441U
Authority
JP
Japan
Prior art keywords
wafer
storage grooves
transfer device
large number
storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12930089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12930089U priority Critical patent/JPH0367441U/ja
Publication of JPH0367441U publication Critical patent/JPH0367441U/ja
Pending legal-status Critical Current

Links

JP12930089U 1989-11-07 1989-11-07 Pending JPH0367441U (US07655688-20100202-C00548.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12930089U JPH0367441U (US07655688-20100202-C00548.png) 1989-11-07 1989-11-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12930089U JPH0367441U (US07655688-20100202-C00548.png) 1989-11-07 1989-11-07

Publications (1)

Publication Number Publication Date
JPH0367441U true JPH0367441U (US07655688-20100202-C00548.png) 1991-07-01

Family

ID=31676939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12930089U Pending JPH0367441U (US07655688-20100202-C00548.png) 1989-11-07 1989-11-07

Country Status (1)

Country Link
JP (1) JPH0367441U (US07655688-20100202-C00548.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014222700A (ja) * 2013-05-13 2014-11-27 三菱電機株式会社 ウエハの移し換え治具及びウエハの移し換え方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014222700A (ja) * 2013-05-13 2014-11-27 三菱電機株式会社 ウエハの移し換え治具及びウエハの移し換え方法

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