JPH0366069B2 - - Google Patents
Info
- Publication number
- JPH0366069B2 JPH0366069B2 JP12696287A JP12696287A JPH0366069B2 JP H0366069 B2 JPH0366069 B2 JP H0366069B2 JP 12696287 A JP12696287 A JP 12696287A JP 12696287 A JP12696287 A JP 12696287A JP H0366069 B2 JPH0366069 B2 JP H0366069B2
- Authority
- JP
- Japan
- Prior art keywords
- torch
- plasma
- power source
- torches
- plasma processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 18
- 239000004020 conductor Substances 0.000 description 6
- 238000010891 electric arc Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000003466 welding Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Arc Welding Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12696287A JPS63295065A (ja) | 1987-05-26 | 1987-05-26 | プラズマ加工装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12696287A JPS63295065A (ja) | 1987-05-26 | 1987-05-26 | プラズマ加工装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63295065A JPS63295065A (ja) | 1988-12-01 |
| JPH0366069B2 true JPH0366069B2 (enrdf_load_html_response) | 1991-10-16 |
Family
ID=14948207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12696287A Granted JPS63295065A (ja) | 1987-05-26 | 1987-05-26 | プラズマ加工装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63295065A (enrdf_load_html_response) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100355938B1 (ko) | 1993-05-26 | 2002-12-16 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체장치제작방법 |
| US6090646A (en) | 1993-05-26 | 2000-07-18 | Semiconductor Energy Laboratory Co., Ltd. | Method for producing semiconductor device |
| KR100186886B1 (ko) * | 1993-05-26 | 1999-04-15 | 야마자끼 승페이 | 반도체장치 제작방법 |
| US6501094B1 (en) | 1997-06-11 | 2002-12-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising a bottom gate type thin film transistor |
| US6566681B2 (en) | 2001-07-19 | 2003-05-20 | International Business Machines Corporation | Apparatus for assisting backside focused ion beam device modification |
-
1987
- 1987-05-26 JP JP12696287A patent/JPS63295065A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63295065A (ja) | 1988-12-01 |
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