JPH0365906U - - Google Patents

Info

Publication number

JPH0365906U

JPH0365906U JP12801889U JP12801889U JPH0365906U JP H0365906 U JPH0365906 U JP H0365906U JP 12801889 U JP12801889 U JP 12801889U JP 12801889 U JP12801889 U JP 12801889U JP H0365906 U JPH0365906 U JP H0365906U

Authority

JP

Japan

Prior art keywords

laser light

detection element

warpage

instrument

measuring

Prior art date

1989-11-01

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001514 detection method Methods 0.000 claims description 3
• 238000006073 displacement reaction Methods 0.000 claims description 3
• 229910000831 Steel Inorganic materials 0.000 claims 1
• 239000010959 steel Substances 0.000 claims 1
• 230000008878 coupling Effects 0.000 description 1
• 238000010168 coupling process Methods 0.000 description 1
• 238000005859 coupling reaction Methods 0.000 description 1