JPH0365260U - - Google Patents

Info

Publication number

JPH0365260U

JPH0365260U JP12587189U JP12587189U JPH0365260U JP H0365260 U JPH0365260 U JP H0365260U JP 12587189 U JP12587189 U JP 12587189U JP 12587189 U JP12587189 U JP 12587189U JP H0365260 U JPH0365260 U JP H0365260U

Authority

JP

Japan

Prior art keywords

integrated circuit

semiconductor integrated

insulating film

interlayer insulating

utility

Prior art date

1989-10-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010410 layer Substances 0.000 claims description 5
• 239000004065 semiconductor Substances 0.000 claims description 5
• 239000011229 interlayer Substances 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 2
• 239000011248 coating agent Substances 0.000 description 1
• 238000000576 coating method Methods 0.000 description 1
• 230000001681 protective effect Effects 0.000 description 1