JPH0361939B2 - - Google Patents
Info
- Publication number
- JPH0361939B2 JPH0361939B2 JP8660683A JP8660683A JPH0361939B2 JP H0361939 B2 JPH0361939 B2 JP H0361939B2 JP 8660683 A JP8660683 A JP 8660683A JP 8660683 A JP8660683 A JP 8660683A JP H0361939 B2 JPH0361939 B2 JP H0361939B2
- Authority
- JP
- Japan
- Prior art keywords
- polyvinyl alcohol
- general formula
- unit
- group
- photosensitive resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 33
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 33
- 239000011347 resin Substances 0.000 claims description 27
- 229920005989 resin Polymers 0.000 claims description 27
- 229920001577 copolymer Polymers 0.000 claims description 24
- 230000002378 acidificating effect Effects 0.000 claims description 14
- IMROMDMJAWUWLK-UHFFFAOYSA-N Ethenol Chemical compound OC=C IMROMDMJAWUWLK-UHFFFAOYSA-N 0.000 claims description 7
- 238000006116 polymerization reaction Methods 0.000 claims description 7
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 claims description 4
- 125000000217 alkyl group Chemical group 0.000 claims description 4
- 125000001453 quaternary ammonium group Chemical group 0.000 claims description 4
- 150000001450 anions Chemical class 0.000 claims description 3
- 239000007864 aqueous solution Substances 0.000 description 24
- -1 quaternary ammonium salt compound Chemical class 0.000 description 18
- 230000000052 comparative effect Effects 0.000 description 13
- 238000006482 condensation reaction Methods 0.000 description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 12
- QLAJNZSPVITUCQ-UHFFFAOYSA-N 1,3,2-dioxathietane 2,2-dioxide Chemical compound O=S1(=O)OCO1 QLAJNZSPVITUCQ-UHFFFAOYSA-N 0.000 description 8
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 8
- 239000000243 solution Substances 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 6
- 238000003756 stirring Methods 0.000 description 6
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 5
- 239000002253 acid Substances 0.000 description 5
- 239000002585 base Substances 0.000 description 5
- 238000007127 saponification reaction Methods 0.000 description 5
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 4
- 238000000746 purification Methods 0.000 description 4
- 239000011541 reaction mixture Substances 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- 125000000542 sulfonic acid group Chemical group 0.000 description 4
- RYLOLRAYISQACV-UHFFFAOYSA-N 4-[2-(1-methylpyridin-1-ium-4-yl)ethenyl]benzaldehyde Chemical compound C1=C[N+](C)=CC=C1C=CC1=CC=C(C=O)C=C1 RYLOLRAYISQACV-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- QJNKRLXEVGOXGC-UHFFFAOYSA-N 4-[2-(1-methylquinolin-1-ium-4-yl)ethenyl]benzaldehyde Chemical compound C12=CC=CC=C2[N+](C)=CC=C1C=CC1=CC=C(C=O)C=C1 QJNKRLXEVGOXGC-UHFFFAOYSA-N 0.000 description 2
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonium chloride Substances [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 235000011114 ammonium hydroxide Nutrition 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- SMWDFEZZVXVKRB-UHFFFAOYSA-O hydron;quinoline Chemical compound [NH+]1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-O 0.000 description 2
- 238000005342 ion exchange Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical group C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 1
- SMWDFEZZVXVKRB-UHFFFAOYSA-N Quinoline Chemical group N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 239000012736 aqueous medium Substances 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000007334 copolymerization reaction Methods 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- JOXIMZWYDAKGHI-UHFFFAOYSA-N p-toluenesulfonic acid Substances CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 1
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 1
- VLTRZXGMWDSKGL-UHFFFAOYSA-M perchlorate Inorganic materials [O-]Cl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-M 0.000 description 1
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 239000011118 polyvinyl acetate Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- JUJWROOIHBZHMG-UHFFFAOYSA-O pyridinium Chemical compound C1=CC=[NH+]C=C1 JUJWROOIHBZHMG-UHFFFAOYSA-O 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical group 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 125000001174 sulfone group Chemical group 0.000 description 1
Landscapes
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8660683A JPS59213705A (ja) | 1983-05-19 | 1983-05-19 | 変性ポリビニルアルコ−ル感光性樹脂 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8660683A JPS59213705A (ja) | 1983-05-19 | 1983-05-19 | 変性ポリビニルアルコ−ル感光性樹脂 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59213705A JPS59213705A (ja) | 1984-12-03 |
| JPH0361939B2 true JPH0361939B2 (cs) | 1991-09-24 |
Family
ID=13891667
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8660683A Granted JPS59213705A (ja) | 1983-05-19 | 1983-05-19 | 変性ポリビニルアルコ−ル感光性樹脂 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59213705A (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3561061B2 (ja) * | 1995-12-11 | 2004-09-02 | 東洋合成工業株式会社 | ポリビニルアルコール系感光性樹脂および感光性樹脂組成物並びにそれを用いたパターン形成方法 |
-
1983
- 1983-05-19 JP JP8660683A patent/JPS59213705A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59213705A (ja) | 1984-12-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI241462B (en) | Process for producing film forming resins for photoresist compositions | |
| CA1334059C (en) | Radiation sensitive mixture and production of relief patterns | |
| US4891300A (en) | Saponified polyvinyl acetate derivatives which are photosensitive resin compositions | |
| US3533796A (en) | Light-sensitive materials containing a photo-crosslinkable composition | |
| US5863701A (en) | Polymers containing protected styrene and unprotected hydroxbenzyl (meth) acrylamides | |
| JPH0743537B2 (ja) | 感光性樹脂組成物 | |
| JPH0431381B2 (cs) | ||
| JPS6254802B2 (cs) | ||
| JPS6117141A (ja) | スクリーン製版用感光性樹脂組成物 | |
| US6020436A (en) | Photosensitive resin composition | |
| JPH0216909B2 (cs) | ||
| US4209581A (en) | Soluble photosensitive resin composition | |
| US5334485A (en) | Acid soluble photo-resist comprising a photosensitive polymer | |
| JPH0336215B2 (cs) | ||
| US5330877A (en) | Photosensitive compositions containing stilbazolium groups | |
| JPH0361939B2 (cs) | ||
| JPH0468622B2 (cs) | ||
| EP0035917B1 (en) | A photosensitive composition, an article comprising the composition and the use of the composition as a photoresist | |
| US3696072A (en) | Light-sensitive polymers | |
| GB1584009A (en) | Radiation-sensitive copolymer | |
| JPS6341923B2 (cs) | ||
| US4152159A (en) | Acid-resistant copolymer and photographic element incorporating same | |
| JP2599099B2 (ja) | 感光性ポリマー組成物 | |
| JPS647649B2 (cs) | ||
| JPS622250A (ja) | 感光性樹脂 |