JPH0361862B2 - - Google Patents
Info
- Publication number
- JPH0361862B2 JPH0361862B2 JP60158240A JP15824085A JPH0361862B2 JP H0361862 B2 JPH0361862 B2 JP H0361862B2 JP 60158240 A JP60158240 A JP 60158240A JP 15824085 A JP15824085 A JP 15824085A JP H0361862 B2 JPH0361862 B2 JP H0361862B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- valve plate
- vacuum valve
- shield
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 description 5
- NMFHJNAPXOMSRX-PUPDPRJKSA-N [(1r)-3-(3,4-dimethoxyphenyl)-1-[3-(2-morpholin-4-ylethoxy)phenyl]propyl] (2s)-1-[(2s)-2-(3,4,5-trimethoxyphenyl)butanoyl]piperidine-2-carboxylate Chemical compound C([C@@H](OC(=O)[C@@H]1CCCCN1C(=O)[C@@H](CC)C=1C=C(OC)C(OC)=C(OC)C=1)C=1C=C(OCCN2CCOCC2)C=CC=1)CC1=CC=C(OC)C(OC)=C1 NMFHJNAPXOMSRX-PUPDPRJKSA-N 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 238000010304 firing Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
Landscapes
- Plasma Technology (AREA)
- Sliding Valves (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60158240A JPS6220973A (ja) | 1985-07-19 | 1985-07-19 | 真空バルブ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60158240A JPS6220973A (ja) | 1985-07-19 | 1985-07-19 | 真空バルブ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6220973A JPS6220973A (ja) | 1987-01-29 |
JPH0361862B2 true JPH0361862B2 (it) | 1991-09-24 |
Family
ID=15667326
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60158240A Granted JPS6220973A (ja) | 1985-07-19 | 1985-07-19 | 真空バルブ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6220973A (it) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4980794B2 (ja) * | 2007-05-24 | 2012-07-18 | 日本電子株式会社 | 荷電粒子ビーム装置 |
JP4561814B2 (ja) * | 2007-11-21 | 2010-10-13 | Tdk株式会社 | ミリング装置 |
DE102008049353A1 (de) | 2008-09-29 | 2010-04-08 | Vat Holding Ag | Vakuumventil |
JP4997361B2 (ja) * | 2009-03-05 | 2012-08-08 | Smc株式会社 | 真空バルブ |
CN114657538B (zh) * | 2022-03-25 | 2024-02-02 | 厦门韫茂科技有限公司 | 一种连续式ald镀膜设备的腔体结构 |
-
1985
- 1985-07-19 JP JP60158240A patent/JPS6220973A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6220973A (ja) | 1987-01-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |