JPH0361662U - - Google Patents

Info

Publication number

JPH0361662U

JPH0361662U JP12179389U JP12179389U JPH0361662U JP H0361662 U JPH0361662 U JP H0361662U JP 12179389 U JP12179389 U JP 12179389U JP 12179389 U JP12179389 U JP 12179389U JP H0361662 U JPH0361662 U JP H0361662U

Authority

JP

Japan

Prior art keywords

head

slider

thin film

piezoelectric element

view

Prior art date

1989-10-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010409 thin film Substances 0.000 claims description 3
• 238000000206 photolithography Methods 0.000 claims 1
• 239000000758 substrate Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 230000005284 excitation Effects 0.000 description 1
• 239000010408 film Substances 0.000 description 1
• 230000001681 protective effect Effects 0.000 description 1
• 239000000725 suspension Substances 0.000 description 1