JPH035090U - - Google Patents

Info

Publication number

JPH035090U

JPH035090U JP5910389U JP5910389U JPH035090U JP H035090 U JPH035090 U JP H035090U JP 5910389 U JP5910389 U JP 5910389U JP 5910389 U JP5910389 U JP 5910389U JP H035090 U JPH035090 U JP H035090U

Authority

JP

Japan

Prior art keywords

nitrogen gas

heat exchanger

region

vacuum pump

cassette

Prior art date

1989-05-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 5
• 229910001873 dinitrogen Inorganic materials 0.000 claims description 5
• 238000010438 heat treatment Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2

Cited By (1)