JPH0343718Y2 - - Google Patents

Info

Publication number
JPH0343718Y2
JPH0343718Y2 JP1982137318U JP13731882U JPH0343718Y2 JP H0343718 Y2 JPH0343718 Y2 JP H0343718Y2 JP 1982137318 U JP1982137318 U JP 1982137318U JP 13731882 U JP13731882 U JP 13731882U JP H0343718 Y2 JPH0343718 Y2 JP H0343718Y2
Authority
JP
Japan
Prior art keywords
pellet
pellets
mounting
semiconductor
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982137318U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5942039U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13731882U priority Critical patent/JPS5942039U/ja
Publication of JPS5942039U publication Critical patent/JPS5942039U/ja
Application granted granted Critical
Publication of JPH0343718Y2 publication Critical patent/JPH0343718Y2/ja
Granted legal-status Critical Current

Links

JP13731882U 1982-09-10 1982-09-10 半導体部品の組立装置 Granted JPS5942039U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13731882U JPS5942039U (ja) 1982-09-10 1982-09-10 半導体部品の組立装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13731882U JPS5942039U (ja) 1982-09-10 1982-09-10 半導体部品の組立装置

Publications (2)

Publication Number Publication Date
JPS5942039U JPS5942039U (ja) 1984-03-17
JPH0343718Y2 true JPH0343718Y2 (cs) 1991-09-12

Family

ID=30308474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13731882U Granted JPS5942039U (ja) 1982-09-10 1982-09-10 半導体部品の組立装置

Country Status (1)

Country Link
JP (1) JPS5942039U (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0630374B2 (ja) * 1986-09-29 1994-04-20 東京エレクトロン株式会社 プロ−バにおけるウエハのθ調整方法
JPH052179Y2 (cs) * 1988-05-14 1993-01-20

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51131274A (en) * 1975-05-10 1976-11-15 Fujitsu Ltd Tip bonding method
US4167174A (en) * 1977-12-08 1979-09-11 General Signal Corporation Method and apparatus for aligning the streets of a semiconductor wafer

Also Published As

Publication number Publication date
JPS5942039U (ja) 1984-03-17

Similar Documents

Publication Publication Date Title
EP0457843B1 (en) Method and apparatus for measuring registration between layers of a semiconductor wafer
US4328553A (en) Method and apparatus for targetless wafer alignment
US4654706A (en) Automatic front of screen adjustment, testing system and method
JP2865723B2 (ja) 再現可能な位置決めの誤差を修正する方法及び装置
JPH07231018A (ja) プローブ装置
JP3523480B2 (ja) カメラ位置の補正装置
JPH0343718Y2 (cs)
US4441808A (en) Focusing device for photo-exposure system
JP3644846B2 (ja) 描画装置の移動誤差検出装置及びその方法
GB2111695A (en) Parallel alignment of surfaces
JP3017640B2 (ja) 半導体チップの外観検査方法
JPH07121466B2 (ja) レーザトリミング装置
JPH0569301B2 (cs)
JPH10332764A (ja) Bga、csp等におけるicチップ実装基板の導通検査システム
JPH04312939A (ja) プローブ装置
JP3341855B2 (ja) ワーク位置決めステージ装置及びそれにおける制御パラメータの補正更新方法並びにチップボンディング装置
US20020171832A1 (en) Method and apparatus for ensuring precise angular orientation of an optical sensing unit on a housing of an optical imaging device
JPH10141350A (ja) 水平面度調整機構
JP3959323B2 (ja) ペレットボンデイング装置
JPS58156937A (ja) 露光装置
JP3603554B2 (ja) 電子部品実装装置における移載ヘッドの回転角度自動ティーチ方法
JPH04345445A (ja) プリント基板作業装置およびそれの送り装置誤差検出装置
JP4815630B2 (ja) チップ検査方法及び装置
KR20210003438A (ko) 다이 픽업 방법 및 이를 수행하기 위한 다이 픽업 장치
JPH0951023A (ja) 半導体試験装置