JPH0343185A - Transfer device - Google Patents

Transfer device

Info

Publication number
JPH0343185A
JPH0343185A JP17808289A JP17808289A JPH0343185A JP H0343185 A JPH0343185 A JP H0343185A JP 17808289 A JP17808289 A JP 17808289A JP 17808289 A JP17808289 A JP 17808289A JP H0343185 A JPH0343185 A JP H0343185A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
table
moving mechanism
holder
fitted
whole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17808289A
Inventor
Toshimasa Furuya
Takehiko Nomura
Ryoichi Suzuki
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Exposure apparatus for microlithography
    • G03F7/70691Handling of masks or wafers
    • G03F7/70733Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/70741Handling masks outside exposure position, e.g. reticle libraries

Abstract

PURPOSE: To simplify the structure of a moving mechanism whole body and to improve the positioning accuracy at transfer work time of a retained body by taking an actuator for driving a holder as an air cylinder, providing a stopper to stop movement of the holder and also providing a dumper to control speed of the holder.
CONSTITUTION: A Z table 2 is fitted movably in about vertical direction along a Z table guide 3 extended on a foundation bed 1 and a Z table moving mechanism 4 to drive and operate the Z table 2 is fitted to the bed 1. A jig cylinder 5 formed by an air cylinder as an actuator for driving is fitted to the Z table moving mechanism 4, a stopper 6 is interposed between the movable parts of linear dumpers 7, 8 at the side part of the Z table 2, dumping is acted over the whole range of the stroke of the movable part of the jig cylinder 5 and the moving speed is held in about constant state. The structure of the whole moving mechanism is thus simplified and the positioning accuracy at the transfer work time of the retained body can be improved.
COPYRIGHT: (C)1991,JPO&Japio
JP17808289A 1989-07-12 1989-07-12 Transfer device Pending JPH0343185A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17808289A JPH0343185A (en) 1989-07-12 1989-07-12 Transfer device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17808289A JPH0343185A (en) 1989-07-12 1989-07-12 Transfer device

Publications (1)

Publication Number Publication Date
JPH0343185A true true JPH0343185A (en) 1991-02-25

Family

ID=16042312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17808289A Pending JPH0343185A (en) 1989-07-12 1989-07-12 Transfer device

Country Status (1)

Country Link
JP (1) JPH0343185A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005241012A (en) * 2004-02-27 2005-09-08 Robert Bosch Gmbh Valve
KR100603651B1 (en) * 2004-07-12 2006-07-28 양준모 Discrete typed fishing weight
JP2011135077A (en) * 2009-12-23 2011-07-07 Asml Netherlands Bv Imprint lithographic apparatus, and imprint lithographic method
US8192920B2 (en) 2008-04-26 2012-06-05 Rolith Inc. Lithography method
US8425789B2 (en) 2007-06-09 2013-04-23 Rolith, Inc. Method and apparatus for anisotropic etching
US9069244B2 (en) 2010-08-23 2015-06-30 Rolith, Inc. Mask for near-field lithography and fabrication the same
US9645504B2 (en) 2008-01-22 2017-05-09 Metamaterial Technologies Usa, Inc. Large area nanopatterning method and apparatus

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005241012A (en) * 2004-02-27 2005-09-08 Robert Bosch Gmbh Valve
KR100603651B1 (en) * 2004-07-12 2006-07-28 양준모 Discrete typed fishing weight
US8425789B2 (en) 2007-06-09 2013-04-23 Rolith, Inc. Method and apparatus for anisotropic etching
US9645504B2 (en) 2008-01-22 2017-05-09 Metamaterial Technologies Usa, Inc. Large area nanopatterning method and apparatus
US8192920B2 (en) 2008-04-26 2012-06-05 Rolith Inc. Lithography method
JP2011135077A (en) * 2009-12-23 2011-07-07 Asml Netherlands Bv Imprint lithographic apparatus, and imprint lithographic method
US9715171B2 (en) 2009-12-23 2017-07-25 Asml Netherlands B.V. Imprint lithographic apparatus and imprint lithographic method
US9069244B2 (en) 2010-08-23 2015-06-30 Rolith, Inc. Mask for near-field lithography and fabrication the same

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