JPH033429U - - Google Patents

Info

Publication number

JPH033429U

JPH033429U JP869789U JP869789U JPH033429U JP H033429 U JPH033429 U JP H033429U JP 869789 U JP869789 U JP 869789U JP 869789 U JP869789 U JP 869789U JP H033429 U JPH033429 U JP H033429U

Authority

JP

Japan

Prior art keywords

purge gas

processing chamber

absorption tower

absorption

tower

Prior art date

1989-01-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010521 absorption reaction Methods 0.000 claims description 12
• 238000010926 purge Methods 0.000 claims description 8
• 239000007788 liquid Substances 0.000 claims 2
• 238000010586 diagram Methods 0.000 description 3
• ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 2
• 239000006185 dispersion Substances 0.000 description 2
• 229910052740 iodine Inorganic materials 0.000 description 2
• 239000011630 iodine Substances 0.000 description 2

Cited By (1)