JPH0334104U - - Google Patents

Info

Publication number

JPH0334104U

JPH0334104U JP9040989U JP9040989U JPH0334104U JP H0334104 U JPH0334104 U JP H0334104U JP 9040989 U JP9040989 U JP 9040989U JP 9040989 U JP9040989 U JP 9040989U JP H0334104 U JPH0334104 U JP H0334104U

Authority

JP

Japan

Prior art keywords

movement amount

amount error

control device

movable part

error

Prior art date

1989-08-02

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001514 detection method Methods 0.000 claims description 2
• 238000010586 diagram Methods 0.000 description 5
• 238000005259 measurement Methods 0.000 description 2