JPH03291379A - Laminated structure of carbon hard film - Google Patents

Laminated structure of carbon hard film

Info

Publication number
JPH03291379A
JPH03291379A JP9300690A JP9300690A JPH03291379A JP H03291379 A JPH03291379 A JP H03291379A JP 9300690 A JP9300690 A JP 9300690A JP 9300690 A JP9300690 A JP 9300690A JP H03291379 A JPH03291379 A JP H03291379A
Authority
JP
Japan
Prior art keywords
carbon hard
hard films
hard film
intermediate layers
titanium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9300690A
Inventor
Yuji Fukazawa
Yukio Miya
Koichi Naoi
Hiroshi Tagawa
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP9300690A priority Critical patent/JPH03291379A/en
Publication of JPH03291379A publication Critical patent/JPH03291379A/en
Application status is Granted legal-status Critical

Links

Abstract

PURPOSE: To allow the coating of a substrate surface with carbon hard films subjected to the prevention of peeling by stresses by alternately forming intermediate layers and the carbon hard films to multiple layers at the time of coating the substrate surface with the carbon hard films.
CONSTITUTION: After the intermediate layer 2 is formed by a reactive ion plating method on the substrate 1 (stainless steel, etc.), the carbon hard film 3 is formed by a plasma CVD method thereon. Further, the intermediate layers 4, 6 and the carbon hard films 5, 7 are alternately laminated thereon. The intermediate layers 2, 4, 6 are constituted of at least one kind of silicon, germanium, titanium, titanium nitride, titanium carbide, zirconium, zirconium nitride, etc. The carbon hard film which is subjected to the prevention of the peeling by the stresses and is improved in the resistance to wear, impact and corrosion is obtd. in this way.
COPYRIGHT: (C)1991,JPO&Japio
JP9300690A 1990-04-10 1990-04-10 Laminated structure of carbon hard film Granted JPH03291379A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9300690A JPH03291379A (en) 1990-04-10 1990-04-10 Laminated structure of carbon hard film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9300690A JPH03291379A (en) 1990-04-10 1990-04-10 Laminated structure of carbon hard film

Publications (1)

Publication Number Publication Date
JPH03291379A true JPH03291379A (en) 1991-12-20

Family

ID=14070306

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9300690A Granted JPH03291379A (en) 1990-04-10 1990-04-10 Laminated structure of carbon hard film

Country Status (1)

Country Link
JP (1) JPH03291379A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0651069A1 (en) * 1993-10-29 1995-05-03 VLAAMSE INSTELLING VOOR TECHNOLOGISCH ONDERZOEK, afgekort V.I.T.O., onderneming van openbaar nut onder de vorm van een n.v. Method for applying a friction-reducing coating
EP0705915A1 (en) * 1994-10-03 1996-04-10 Motorola, Inc. Electron emissive film
US5786129A (en) * 1997-01-13 1998-07-28 Presstek, Inc. Laser-imageable recording constructions utilizing controlled, self-propagating exothermic chemical reaction mechanisms
JP2010229552A (en) * 2010-05-27 2010-10-14 Sumitomo Electric Ind Ltd Method for manufacturing amorphous carbon-coated member
JP2013521413A (en) * 2010-03-09 2013-06-10 フェデラル−モーグル ブルシャイト ゲゼルシャフト ミット ベシュレンクテル ハフツング The method for coating slide element, especially piston rings, and the slide element
JP2015083875A (en) * 2014-11-25 2015-04-30 Tpr株式会社 Piston ring
JP2016145406A (en) * 2015-02-06 2016-08-12 ナコ テクノロジーズ,エスアイエー Nano composite solid lubricating film

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0651069A1 (en) * 1993-10-29 1995-05-03 VLAAMSE INSTELLING VOOR TECHNOLOGISCH ONDERZOEK, afgekort V.I.T.O., onderneming van openbaar nut onder de vorm van een n.v. Method for applying a friction-reducing coating
BE1008229A3 (en) * 1993-10-29 1996-02-20 Vito A method for applying a protective layer against wear on a substrate.
EP0705915A1 (en) * 1994-10-03 1996-04-10 Motorola, Inc. Electron emissive film
US5786129A (en) * 1997-01-13 1998-07-28 Presstek, Inc. Laser-imageable recording constructions utilizing controlled, self-propagating exothermic chemical reaction mechanisms
JP2013521413A (en) * 2010-03-09 2013-06-10 フェデラル−モーグル ブルシャイト ゲゼルシャフト ミット ベシュレンクテル ハフツング The method for coating slide element, especially piston rings, and the slide element
JP2010229552A (en) * 2010-05-27 2010-10-14 Sumitomo Electric Ind Ltd Method for manufacturing amorphous carbon-coated member
JP2015083875A (en) * 2014-11-25 2015-04-30 Tpr株式会社 Piston ring
JP2016145406A (en) * 2015-02-06 2016-08-12 ナコ テクノロジーズ,エスアイエー Nano composite solid lubricating film

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