JPH03287222A - Tracking mirror actuator device - Google Patents

Tracking mirror actuator device

Info

Publication number
JPH03287222A
JPH03287222A JP8890390A JP8890390A JPH03287222A JP H03287222 A JPH03287222 A JP H03287222A JP 8890390 A JP8890390 A JP 8890390A JP 8890390 A JP8890390 A JP 8890390A JP H03287222 A JPH03287222 A JP H03287222A
Authority
JP
Japan
Prior art keywords
movable part
support
mirror
tracking
support spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8890390A
Other languages
Japanese (ja)
Inventor
Hideaki Kibune
英明 木船
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP8890390A priority Critical patent/JPH03287222A/en
Publication of JPH03287222A publication Critical patent/JPH03287222A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To make the primary resonance frequency of support spring members low and to reduce variance in the primary resonance frequency due to variance in plate thickness by providing support spring members, which support a movable part, with a torsional spring part which twists around a center line of rotation and a bending part which bends in the direction of the center line of rotation. CONSTITUTION:This device is equipped with the right-left symmetric movable part 1 which has a mirror 2, a mirror support 3, and a driving part 4 and a couple of support spring members 15 which support the movable part 1 freely rotatably. Then the support spring parts 15 are provided with the torsion spring part 20 which can twist to deform around the center axis of rotation of the movable part 1 and the bending part 21 which can bends in the direction of the center axis of rotation, and the torsion spring part 20 is supported by the bending part 21 movably in the direction of the center axis of rotation. Consequently, even when the plate thickness of the torsion spring part 20 is made large, the primary resonance frequency becomes sufficiently low and the variance in primary resonance frequency due to the variance in plate thickness becomes small.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、光デイスクドライブ装置等の光ピツクアップ
に装備されるトラッキングミラーアクチュエータ装置に
関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a tracking mirror actuator device installed in an optical pickup such as an optical disk drive device.

〔従来の技術〕[Conventional technology]

光デイスクドライブ装置や光磁気ディスクドライブ装置
等の光情報記録再生装置において、光情報記録媒体上に
集光された光スポットの精密位置制御を行うために、光
ピツクアップには光スポットのトラッキング動作を行う
ためのトラッキングミラーアクチュエータ装置が設けら
れているが、このトラッキングミラーアクチュエータ装
置とし3− 9図を参照して説明する。
In optical information recording and reproducing devices such as optical disk drives and magneto-optical disk drives, the optical pickup has a tracking operation for the optical spot in order to precisely control the position of the optical spot focused on the optical information recording medium. A tracking mirror actuator device is provided for carrying out this operation, and this tracking mirror actuator device will be described with reference to FIGS. 3-9.

第8図及び第9図において、可動部1は、ミラー2とミ
ラー支持体3と2つの駆動コイル4とから構成されてい
る。この可動部lを支持する2つの支持ばね5は、夫々
一端をミラー支持体3に、他端を基台10側の固定部支
持体6・に固定されている。可動部1のミラー支持体3
の両側に固定された乱動コイル4の中には、基台1o側
に固定された磁気回路のヨーク7の一端が挿入され、磁
石8とヨーク7の形成する磁気ギャップ9の中に乱動コ
イル4の一辺が位置している。
In FIGS. 8 and 9, the movable part 1 is composed of a mirror 2, a mirror support 3, and two drive coils 4. The two support springs 5 that support the movable part 1 have one end fixed to the mirror support 3 and the other end fixed to the fixed part support 6 on the base 10 side. Mirror support 3 of movable part 1
One end of the yoke 7 of the magnetic circuit fixed on the base 1o side is inserted into the turbulence coil 4 fixed on both sides of the turbulence coil 4, and the turbulence coil 4 is inserted into the magnetic gap 9 formed by the magnet 8 and the yoke 7. One side of the coil 4 is located there.

また、上記支持ばね5は、可動部1の両側に対称に設け
られており、可動部IWJ側の支持ばね5の中心線は同
一直線Cの上にあり、この直線Cは、可動部工の回転中
心となっている。また、可動部1の重心は直線Cの近傍
に位置している。
Further, the support springs 5 are provided symmetrically on both sides of the movable part 1, and the center lines of the support springs 5 on the movable part IWJ side are on the same straight line C. It is the center of rotation. Further, the center of gravity of the movable part 1 is located near the straight line C.

さて、以上のような構成からなるトラッキングミラーア
クチュエータ装置において、磁気ギャップ9の中の駆動
コイル4に発生するミラー法線方向(図中2方向)の力
の向きが、夫々のコイルでては、例えば、特開昭62−
210418号公報記載のものなどが知られている。
Now, in the tracking mirror actuator device having the above configuration, the direction of the force generated in the drive coil 4 in the magnetic gap 9 in the mirror normal direction (two directions in the figure) is as follows for each coil: For example, JP-A-62-
The one described in Japanese Patent No. 210418 is known.

上記公報記載のトラッキングミラーアクチュエータ装置
では、ミラーとミラー支持体とを含む可動部を左右2つ
の薄板状のばね部材で支持し、この支持ばね部材のねじ
り中心線上近傍に可動部の重心を設けると共に、支持系
の低剛性の方向がミラー面内方向となり、高剛性の方向
がミラー法線方向となるように、上記支持ばね部材の厚
み方向をミラー面内方向に合わせて固定している。
In the tracking mirror actuator device described in the above publication, a movable part including a mirror and a mirror support is supported by two thin plate-shaped spring members on the left and right, and the center of gravity of the movable part is located near the torsion center line of the support spring members. The thickness direction of the support spring member is fixed to match the in-plane direction of the mirror so that the direction of low rigidity of the support system is the in-plane direction of the mirror, and the direction of high rigidity is the normal direction of the mirror.

したがって、このトラッキングミラーアクチュエータ装
置では、ミラー面内でミラーが微小量移動しても光ビー
ムの位置には全く影響しないため。
Therefore, in this tracking mirror actuator device, even if the mirror moves by a minute amount within the mirror plane, the position of the light beam is not affected at all.

支持系が低剛性であっても問題はなく、光ビームの位置
に関係するミラー法線方向の支持系剛性は高剛性とする
ことができるため、光スポットの位置決め精度を低下さ
せる振動を抑制することができる。
There is no problem even if the support system has low rigidity, and the support system rigidity in the normal direction of the mirror, which is related to the position of the light beam, can be made high, suppressing vibrations that reduce the positioning accuracy of the light spot. be able to.

ここで、上記従来のトラッキングミラーアクチュエータ
装置の具体的な例について第8図及び第4− 反対となるように電流の向きを決定することにより、可
動部1を直線Cを中心として回転させる磁気的偶力が発
生する。
Here, regarding a specific example of the above-mentioned conventional tracking mirror actuator device, FIG. 8 and FIG. A couple occurs.

ここで、支持ばね5の回転中心Cと可動部工の重心とが
一致し、両端の駆動コイル4で発生する正、負の力の大
きさが一致している場合、可動部1には直線Cを中心と
する回転運動しか発生しない。
Here, if the center of rotation C of the support spring 5 and the center of gravity of the movable part coincide, and the magnitudes of the positive and negative forces generated in the drive coils 4 at both ends are the same, the movable part 1 will have a straight line. Only rotational motion around C occurs.

しかしながら、一般に、回転中心Cと可動部1の重心に
はずれが生じ、2つの駆動コイル4で発生する力も同じ
大きさではない。また、可動部1両側の支持ばね5も、
形状、材料特性に生じるずれが避けられない。したがっ
て、これらの影響により、可動部1には、直線0回りの
回転の他に、x、y、z方向の直進運動及びx、z軸回
りの回転運動が発生する。
However, in general, the center of rotation C and the center of gravity of the movable part 1 are misaligned, and the forces generated by the two drive coils 4 are not of the same magnitude. In addition, the support springs 5 on both sides of the movable part 1 are also
Discrepancies in shape and material properties are inevitable. Therefore, due to these influences, in addition to the rotation about the straight line 0, the movable part 1 undergoes linear movement in the x, y, and z directions and rotational movement about the x and z axes.

そこで、上記従来技術では、支持ばね5の厚み方向が、
ミラー2の面内方向となるように固定している。すなわ
、支持ばね5は、長手方向(y方向)と巾方向(2方向
)の剛性は十分大きいため、2方向、y方向の直進運動
、及びX軸回りの回転運動の変位は、十分小さくなる。
Therefore, in the above conventional technology, the thickness direction of the support spring 5 is
It is fixed so as to be in the in-plane direction of the mirror 2. In other words, the support spring 5 has sufficiently large rigidity in the longitudinal direction (y direction) and the width direction (two directions), so that the displacement in the two directions, the linear movement in the y direction, and the rotational movement around the X axis is sufficiently small. Become.

また、支持ばね5の厚み方向(X方向)の剛性は小さい
ため、X方向の直進運動、及びZ軸回りの回転運動の変
位は大きくなるが、ミラー2がミラー面内で移動2回転
しても、ミラー2で反射された光束の位置及び角度は変
化しないため、無視することができる。
In addition, since the rigidity of the support spring 5 in the thickness direction (X direction) is small, the displacement in the linear movement in the However, since the position and angle of the light beam reflected by the mirror 2 do not change, it can be ignored.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

ところで、上記従来のトラッキングミラーアクチュエー
タ装置においては、可動部lの一次共振周波数は通常5
0 Hz前後に設定する必要があるため、例えば支持ば
ね5の材質にステンレスを使用した場合、板厚を20μ
m前後と大変薄くする必要がある。これは、支持ばね5
が可動部1の回転によりねじれた場合、長手方向(図中
y方向)に若干縮まってしまうのに対し、支持ばね5は
一端をミラー支持体3に、他端を固定部支持体6に固定
されているため、大変縮まりにくい構造となっているた
めである。このため、一般的な片持ち=7− ことができれば、板厚のバラツキの影響は小さくなり、
−次共振周波数のバラツキを低減することができるが、
第8図、第9図に示す従来装置の構成のままで支持ばね
部材5の板厚を厚くした場合、−次共振周波数を50H
z前後にするためには、支持ばね部材5の長手方向(y
方向)の長さを極端に長くするか、あるいは、支持ばね
部材5の巾方向(X方向)の長さを極端に短くせざるお
えない。
By the way, in the above-mentioned conventional tracking mirror actuator device, the primary resonance frequency of the movable part l is usually 5.
Since it is necessary to set the frequency around 0 Hz, for example, if stainless steel is used as the material for the support spring 5, the plate thickness should be set to 20 μm.
It is necessary to make it very thin, around m. This is support spring 5
When twisted due to the rotation of the movable part 1, it contracts slightly in the longitudinal direction (y direction in the figure), whereas the support spring 5 has one end fixed to the mirror support 3 and the other end fixed to the fixed part support 6. This is because it has a structure that is very difficult to shrink. Therefore, if a general cantilever = 7- can be achieved, the influence of variations in plate thickness will be reduced,
Although it is possible to reduce the variation in the -order resonance frequency,
If the thickness of the support spring member 5 is increased while maintaining the configuration of the conventional device shown in FIGS. 8 and 9, the -th resonance frequency will be increased to 50H.
In order to make it around z, the longitudinal direction of the support spring member 5 (y
Either the length of the support spring member 5 in the width direction (X direction) must be made extremely long, or the length of the support spring member 5 in the width direction (X direction) must be made extremely short.

しかしながら、支持ばね部材5の長手方向(y方向)の
長さを極端に長くした場合、装置が大型化してしまうと
いう問題が生じ、また、支持ばね部材5の巾方向(2方
向)の長さを極端に短くした場合、可動部lの回転によ
り支持ばね部材5に作用する剪断応力(kgf/a?)
が過大になり、支持ばね部材の許容応力を越えてしまう
という問題がある。
However, if the length of the support spring member 5 in the longitudinal direction (y direction) is made extremely long, a problem arises in that the device becomes larger. When is made extremely short, the shear stress (kgf/a?) that acts on the support spring member 5 due to the rotation of the movable part l
There is a problem in that the stress becomes excessive and exceeds the allowable stress of the support spring member.

本発明は上記事情に鑑みてなされたものであって、−次
共振周波数を良好に低減することができ、且つ一次共振
周波数のバラツキをも低減しうるよのねじりばねに比べ
て大変ばね定数が高くなってしまう。
The present invention has been made in view of the above circumstances, and has a spring constant that is significantly lower than that of a torsion spring that can reduce the -order resonance frequency well and also reduce the variation in the primary resonance frequency. It gets expensive.

ところで、ステンレス鋼板は、製造上その厚さに対して
±2μm程度の誤差が避けられないため、ステンレス鋼
板を支持ばねに使用した場合、支持ばね5の板厚は土工
○%径程度バラツキを持つことになる。
By the way, stainless steel plates inevitably have an error of about ±2 μm in their thickness due to manufacturing reasons, so when stainless steel plates are used as support springs, the thickness of the support springs 5 will vary by about ○% of the diameter of the earthworks. It turns out.

ここで第8図に示す構成のトラッキングミラーアクチュ
エータ装置の場合、支持ばね5のねじりばね定数は板厚
の3乗に比例し、−次共振周波数はばね定数の1/2乗
に比例するため、例えば、板厚が±10%のバラツキを
持つと、−次共振周波数は±15%程度のバラツキを持
つことになる。
In the case of the tracking mirror actuator device having the configuration shown in FIG. 8, the torsional spring constant of the support spring 5 is proportional to the cube of the plate thickness, and the -th order resonance frequency is proportional to the 1/2 power of the spring constant. For example, if the plate thickness has a variation of ±10%, the -th order resonance frequency will have a variation of about ±15%.

一般に、トラッキングミラーアクチュエータ装置の制御
系の仕様を考慮すると、可動部1の一次共振周波数は±
10%の範囲にある必要があり、したがって、上述の従
来装置の構成では一次共振周波数のバラツキが大きくな
りすぎており、制御系の仕様を満足することはできない
Generally, considering the specifications of the control system of the tracking mirror actuator device, the primary resonance frequency of the movable part 1 is ±
Therefore, in the configuration of the conventional device described above, the variation in the primary resonance frequency becomes too large and the specification of the control system cannot be satisfied.

ところで、支持ばね部材5の板厚を大きくする8− うにしたトラッキングミラーアクチュエータ装置を提供
することを目的とする。
By the way, it is an object of the present invention to provide a tracking mirror actuator device in which the plate thickness of the support spring member 5 is increased.

〔課題を解決するための手段〕[Means to solve the problem]

上記目的を達成するため、本発明の第1の構成では、ミ
ラーとミラー支持体と駆動部とを有するほぼ左右対称な
可動部と、該可動部の左右両側から可動部の回転中心軸
に沿って延出するように設けられ可動部を回動自在に支
持する一対の支持ばね部材とを備え、上記可動部を上記
駆動部により回動させることによって上記光情報記録媒
体上の光スポットにトラッキング動作を行わせるように
したトラッキングミラーアクチュエータ装置において、
上記支持ばね部材は、上記可動部の回転中心軸を中心に
ねじり変形可能なねじりばね部と、回転中心軸方向に屈
曲可能な屈曲部を有し、上記ねじりばね部の一端は上記
屈曲部により回転中心軸方向に移動可能に支持されると
ともに、上記ねじりばね部の厚み方向を上記ミラーの反
射面内方向に合わせて設けたことを特徴とする。
In order to achieve the above object, a first configuration of the present invention includes a substantially bilaterally symmetrical movable part having a mirror, a mirror support, and a drive part, and a movable part that is parallel to the center of rotation of the movable part from both left and right sides of the movable part. and a pair of support spring members extending from and rotatably supporting the movable part, and tracking the light spot on the optical information recording medium by rotating the movable part by the drive part. In a tracking mirror actuator device configured to perform an operation,
The support spring member has a torsion spring part that can be torsionally deformed around the rotation center axis of the movable part and a bending part that can be bent in the direction of the rotation center axis, and one end of the torsion spring part is bent by the bending part. It is characterized in that it is supported so as to be movable in the direction of the rotational center axis, and that the thickness direction of the torsion spring portion is aligned with the inward direction of the reflective surface of the mirror.

また、上記目的を達成するため、本発明の第2の構成で
は、ミラーとミラー支持体と駆動部とを有するほぼ左右
対称な可動部と、該可動部の左右両側から可動部の回転
中心軸に沿って延出するように設けられ可動部を回動自
在に支持する一対の支持ばね部材とを備え、上記可動部
を上記駆動部により回動させることによって上記光情報
記録媒体上の光スポットにトラッキング動作を行わせる
ようにしたトラッキングミラーアクチュエータ装置にお
いて、上記一対の支持ばね部材は、夫々上記可動部の回
転中心軸と同一直線上に中心線を有する薄板状のばね部
材からなり、この可動部左右の一対の支持ばね部材は回
転中心軸を中心に微小角度だけ同方向にねじりを加えら
れた状態で両端を夫々固定されていると共に、上記一対
の支持ばね部材の厚み方向は上記ミラーの反射面内方向
に合わせて設けられていることを特徴とする。
In addition, in order to achieve the above object, the second configuration of the present invention includes a substantially bilaterally symmetrical movable part having a mirror, a mirror support, and a drive part, and a rotation center axis of the movable part from both left and right sides of the movable part. and a pair of support spring members extending along the movable section and rotatably supporting the movable section, the light spot on the optical information recording medium being rotated by the movable section by the driving section. In the tracking mirror actuator device, each of the pair of support spring members is a thin plate-like spring member having a center line colinear with the rotational center axis of the movable portion. The pair of support spring members on the left and right sides of the mirror are fixed at both ends in a state where they are twisted in the same direction by a small angle around the central axis of rotation, and the thickness direction of the pair of support spring members is the same as that of the mirror. It is characterized by being provided in accordance with the direction within the reflective surface.

〔作  用〕[For production]

本発明の第1の構成によるトラッキングミラーアクチュ
エータ装置においては、可動部を支持する支持ばね部材
に1回転中心線を中心にねじれる11− 一夕装置の良好な制御が可能となる。
In the tracking mirror actuator device according to the first configuration of the present invention, it is possible to excellently control the 11-turn device that twists the support spring member supporting the movable portion around the center line of one rotation.

〔実 施 例〕〔Example〕

以下、本発明の実施例について図面を参照して詳細に説
明する。
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

第1図は本発明の第1の構成の一実施例を示すトラッキ
ングミラーアクチュエータ装置の斜視構成図、第2図(
、)は同上トラッキングミラーアクチュエータ装置の支
持ばね部材を図中2方向より見た状態を模式的に示す平
面図、第2図(b)は第2図(a)の■−■線断面図で
ある。
FIG. 1 is a perspective configuration diagram of a tracking mirror actuator device showing an embodiment of the first configuration of the present invention, and FIG.
, ) is a plan view schematically showing the support spring member of the tracking mirror actuator device as seen from two directions in the figure, and FIG. 2(b) is a sectional view taken along the line ■-■ in FIG. 2(a). be.

第1図及び第2図において、このトラッキングミラーア
クチュエータ装置の可動部1は、ミラー2とミラー支持
体3と2つの乱動コイル4とから構成されている。この
可動部1の左右両側を夫々支持する2つの支持ばね部材
15は、夫々一端をミラー支持体3に、他端を基台上○
側の固定部支持体6に固定されている。可動部lのミラ
ー支持体3の両側に固定された方形状の乱動コイル4の
中には、基台10側に固定された磁気回路のコ字型形状
をしたヨーク7の一端側が挿入されており、ねじりばね
部と、回転中心線の方向に曲がる屈曲部とを設けること
により、上記ねじりばね部の一端側は上記屈曲部の作用
により回転中心線方向に移動可能となり、上記支持ばね
部材のねじりばね部の板厚を厚くしても一次共振周波数
を低くでき、板厚のバラツキによる一次共振周波数のバ
ラツキも少なくすることができ、トラッキングミラーア
クチュエータ装置の良好な制御が可能となる。
In FIGS. 1 and 2, a movable part 1 of this tracking mirror actuator device is composed of a mirror 2, a mirror support 3, and two turbulence coils 4. The two support spring members 15 that respectively support the left and right sides of the movable part 1 have one end on the mirror support 3 and the other end on the base.
It is fixed to the fixed part support body 6 on the side. One end of a U-shaped yoke 7 of a magnetic circuit fixed to the base 10 is inserted into a rectangular turbulence coil 4 fixed to both sides of the mirror support 3 of the movable part l. By providing a torsion spring portion and a bending portion that bends in the direction of the rotation center line, one end side of the torsion spring portion can be moved in the rotation center line direction by the action of the bend portion, and the support spring member Even if the plate thickness of the torsion spring portion is increased, the primary resonance frequency can be lowered, and variations in the primary resonance frequency due to variations in plate thickness can also be reduced, making it possible to better control the tracking mirror actuator device.

また、本発明の第2の構成によるトラッキングミラーア
クチュエータ装置においては、可動部左右の一対の支持
ばね部材は回転中心軸を中心に微小角度だけ同方向にね
じりを加えられた状態で両端を可動部と固定部とに夫々
固定されているため、可動部の回転によりねじれが生じ
たときにも、各支持ばね部材の回転中心軸方向の長さが
、一方の支持ばね部材は縮み、他方の支持ばね部材は延
びるように作用するため、支持ばね部材の板厚を厚くし
ても一次共振周波数を低くでき、板厚のバラツキによる
一次共振周波数のバラツキをも少なくすることができ、
トラッキングミラーアクチュエ12− このヨーク端と、ヨーク7の他端側に固定された磁石8
とによって形成される磁気ギャップ9の中に上記乱動コ
イル4の一辺が位置していることになる。
Further, in the tracking mirror actuator device according to the second configuration of the present invention, the pair of support spring members on the left and right sides of the movable part are twisted in the same direction by a small angle around the rotation center axis, and both ends of the support spring members are twisted in the same direction by a small angle around the rotation center axis. and the fixed part, so even when torsion occurs due to rotation of the movable part, the length of each support spring member in the direction of the rotation center axis will be reduced, with one support spring member contracting and the other supporting spring member contracting. Since the spring member acts to extend, the primary resonance frequency can be lowered even if the plate thickness of the support spring member is increased, and variations in the primary resonance frequency due to variations in plate thickness can also be reduced.
Tracking mirror actuator 12 - A magnet 8 fixed to this yoke end and the other end of the yoke 7
One side of the turbulent coil 4 is located in the magnetic gap 9 formed by the above.

上記支持ばね部材15は、可動部1の両側に左右対称に
設けられており、この可動部1両側の支持ばね部材15
は、夫々同一直線Cを中心にねじれるねじりばね部20
と、直vACの方向に屈曲する屈曲部21とを有する構
造となっている。
The support spring members 15 are provided symmetrically on both sides of the movable part 1, and the support spring members 15 on both sides of the movable part 1
are torsion spring parts 20 that twist around the same straight line C, respectively.
and a bent portion 21 bent in the direction of the vertical vAC.

ここで、ねじりばね部20は、直、tlC上に中心線を
有する薄板状のばねよりなり、一端を可動部1のミラー
支持部材3に、他端を、支持ばね部材15の屈曲部21
側に固定されている。また、屈曲部21は、直線Cに垂
直な面と、直IsCに平行な面とを有し、直線Cの方向
に屈曲可能に形成されており、ねじりばね部20の一端
を、固定部支持体6に対して直線Cの方向に移動可能に
支持している。
Here, the torsion spring part 20 is made of a thin plate-shaped spring having a center line directly on tlc, and has one end connected to the mirror support member 3 of the movable part 1 and the other end connected to the bent part 21 of the support spring member 15.
Fixed on the side. The bent portion 21 has a surface perpendicular to the straight line C and a surface parallel to the straight line IsC, and is formed so as to be bendable in the direction of the straight line C. It supports the body 6 so as to be movable in the direction of a straight line C.

尚、可動部1の重心は、直線Cの近傍に位置し、この直
線Cは可動部1の回転中心となる。
Note that the center of gravity of the movable part 1 is located near the straight line C, and this straight line C becomes the center of rotation of the movable part 1.

さて、第1図、第2図に示す構成のトラッキングミラー
アクチュエータ装置において、磁気ギャップ9の中の駆
動コイル4に発生するミラー法線方向(図中2方向)の
力の向きが、夫々のコイルで反対となるように各駆動コ
イル4に流れる電流の向きを決定することにより、可動
部1には磁気的に偶力が発生し、可動部1は直線Cを中
心に回動される。したがって、可動部上の回動方向をト
ラッキングエラーは号によって制御することにより所定
のトラッキング動作が行われる。
Now, in the tracking mirror actuator device having the configuration shown in FIGS. 1 and 2, the direction of the force generated in the drive coil 4 in the magnetic gap 9 in the mirror normal direction (two directions in the figure) is different from that of each coil. By determining the direction of the current flowing through each drive coil 4 so as to be opposite to each other, a magnetic force couple is generated in the movable part 1, and the movable part 1 is rotated about the straight line C. Therefore, a predetermined tracking operation is performed by controlling the direction of rotation on the movable part according to the tracking error signal.

ところで、この1〜ラッキング動作時に、支持ばね部材
工5のねじりばね部20にはねじり変形が生じ、ねじり
ばね部20は長手方向(図中y方向)に若干縮まるが、
ねじりばね部20は、上述したように、屈曲部21によ
り一端側が直線C(回転中心軸)方向に移動可能に支持
されているため、このときのばね定数は、一般的な片持
ちのねじりばねとほぼ同等となる。このため、支持ばね
部材15のねじりばね部20の板厚は、従来の両端固定
の時に比べて十分厚くすることができ、板厚の15− ばね部材15の屈曲部21はy方向の剛性が小さくなっ
ているため、可動部1にはy方向の直進運動及びZ軸回
りの回転運動が発生しやすいが、何れもミラー2の反射
面内の運動であるので、ミラー2で反射された光束の装
置及び角度への影響はない。
By the way, during this racking operation, torsional deformation occurs in the torsion spring part 20 of the support spring member work 5, and the torsion spring part 20 contracts slightly in the longitudinal direction (y direction in the figure).
As described above, one end of the torsion spring portion 20 is supported movably in the direction of the straight line C (rotation center axis) by the bent portion 21, so the spring constant at this time is equal to that of a typical cantilevered torsion spring. It is almost equivalent to . Therefore, the plate thickness of the torsion spring part 20 of the support spring member 15 can be made sufficiently thicker than in the conventional case where both ends are fixed, and the bending part 21 of the spring member 15 has a rigidity in the y direction of 15 - Because of its small size, the movable part 1 tends to undergo linear movement in the y direction and rotational movement around the Z axis, but since both movements occur within the reflective surface of the mirror 2, the light flux reflected by the mirror 2 There is no effect on the equipment or angle.

次に、第5図は本発明の第2の構成の一実施例を示すト
ラッキングミラーアクチュエータ装置の斜視構成図であ
る。
Next, FIG. 5 is a perspective configuration diagram of a tracking mirror actuator device showing an embodiment of the second configuration of the present invention.

第5図において、このトラッキングミラーアクチュエー
タ装置の可動部1は、ミラー2とミラー支持体3と2つ
の駆動コイル4とから構成されており、この可動部上の
構造は第1図乃至第4図で説明した第1の構成のものと
同一である。
In FIG. 5, a movable part 1 of this tracking mirror actuator device is composed of a mirror 2, a mirror support 3, and two drive coils 4, and the structure on this movable part is shown in FIGS. 1 to 4. This is the same as the first configuration described in .

上記可動部lの左右両側を夫々支持する2つの支持ばね
部材25は、夫々の中心線が同一直線C上にある薄板よ
りなり、直線Cを中心に微小角ねじれた形で、一端側を
可動部1のミラー支持体3に、他端側を基台10側の固
定部支持体6に固定されている。ここで、第6図は上記
支持ばね部材バラツキによる一次共振周波数のバラツキ
は十分小さくなる。
The two support spring members 25 that respectively support the left and right sides of the movable part 1 are made of thin plates whose center lines lie on the same straight line C, and are twisted at a slight angle about the straight line C, with one end movable. The other end is fixed to the mirror support 3 of the part 1, and the other end is fixed to the fixed part support 6 on the base 10 side. Here, in FIG. 6, the variation in the primary resonance frequency due to the variation in the support spring member is sufficiently small.

次に、第3図及び第4図に本発明の第1の構成のトラッ
キングミラーアクチュエータ装置の第2の実施例を示す
。ここで、第3図はトラッキングミラーアクチュエータ
装置の斜視構成図、第4図(a)は同上1−ラッキング
ミラーアクチュエータ装置の支持ばね部材を図中2方向
より見た状態を模式的に示す平面視図、第4図(b)は
第4図(a)のmV−IV線断線断面同図る。
Next, FIGS. 3 and 4 show a second embodiment of the tracking mirror actuator device having the first configuration of the present invention. Here, FIG. 3 is a perspective configuration diagram of the tracking mirror actuator device, and FIG. 4(a) is a plan view schematically showing the support spring member of the tracking mirror actuator device as seen from two directions in the figure. 4(b) is a cross-sectional view taken along the mV-IV line of FIG. 4(a).

第3図、第4図において、この実施例におけるトラッキ
ングミラーアクチュエータ装置の構造は第1の実施例と
略同−であるが、本実施例では、支持ばね部材工5とし
てL字状の薄板を用い、ねじりばね部20と屈曲部21
とを単一の板ばねにより形成した例である。このように
ねじりばね部20と屈曲部21とを単一の板ばねにより
形成した場合には、部品点数の削減、組立作業の簡単化
が図れる。
3 and 4, the structure of the tracking mirror actuator device in this embodiment is approximately the same as that in the first embodiment, but in this embodiment, an L-shaped thin plate is used as the support spring member 5. The torsion spring part 20 and the bending part 21
This is an example in which both are formed by a single leaf spring. When the torsion spring portion 20 and the bent portion 21 are formed by a single leaf spring in this manner, the number of parts can be reduced and the assembly work can be simplified.

尚、上述の第I、第2の実施例において、支持=16− 25の固定前の状態を示す図、第7図は上記支持ばね部
材25の固定後の状態を夫々模式的に示す図であり、可
動部1両側の夫々の支持ばね部材25は同一方向にねじ
れた状態で固定されている。
In addition, in the above-mentioned Embodiments I and 2, FIG. 7 is a diagram schematically showing the state before the support 16-25 is fixed, and FIG. 7 is a diagram schematically showing the state after the support spring member 25 is fixed. The support spring members 25 on both sides of the movable part 1 are fixed in a twisted state in the same direction.

尚、可動部1の重心は直gACの近傍に位置し、この直
線Cが可動部上の回転中心となる。
The center of gravity of the movable part 1 is located near the straight line gAC, and this straight line C becomes the center of rotation on the movable part.

さて、第5図に示す構成のトラッキングミラーアクチュ
エータ装置において、磁気ギャップ9の中の駆動コイル
4に発生するミラー法線方向(図中2方向)の力の向き
が、夫々のコイルで反対となるように駆動コイル4に流
す電流の向きを決定することにより、可動部上には磁気
的に偶力が発生し、可動部1は直線Cを中心に回動され
る。したがって、トラッキングエラー信号に応じて駆動
コイル4に流す電流の向き大きさを制御し、可動部1の
回動を制御することにより所定のトラッキング動作が行
われる。
Now, in the tracking mirror actuator device having the configuration shown in FIG. 5, the direction of the force generated in the drive coil 4 in the magnetic gap 9 in the mirror normal direction (two directions in the figure) is opposite for each coil. By determining the direction of the current flowing through the drive coil 4, a magnetic force couple is generated on the movable part, and the movable part 1 is rotated about the straight line C. Therefore, a predetermined tracking operation is performed by controlling the direction and magnitude of the current flowing through the drive coil 4 according to the tracking error signal and controlling the rotation of the movable part 1.

ところで、このトラッキング動作時には、支持ばね部材
25には可動部1の回動に応じてねじれが生じ、一方の
支持ばね部材25は予め与えられているねじれが増す方
向にねじれ、他方側の支持ばね部材25は予め与えられ
ているねじれが減る方向にねじれる。このため、一方の
支持ばね部材25は長手方向(図中y方向)に若干縮ま
り、他方の支持ばね部材25は長手方向(y方向)に若
干延びた状ahなる。このため、支持ばね部材25のば
ね定数は、夫々の支持ばね部材25の一端が移動可能な
状態のときと同等となる。したがって、支持ばね部材2
5の板厚は従来装置に比べて十分厚くすることが可能と
なり、板厚のバラツキによる一次共振周波数のバラツキ
を十分小さくすることが可能となる。
By the way, during this tracking operation, the support spring member 25 is twisted in accordance with the rotation of the movable part 1, and one support spring member 25 is twisted in a direction that increases the predetermined twist, and the support spring member 25 on the other side The member 25 twists in a direction that reduces the pre-given twist. Therefore, one support spring member 25 is slightly compressed in the longitudinal direction (y direction in the figure), and the other support spring member 25 is slightly extended in the longitudinal direction (y direction). Therefore, the spring constant of the support spring members 25 is the same as when one end of each support spring member 25 is in a movable state. Therefore, the support spring member 2
The thickness of the plate No. 5 can be made sufficiently thicker than that of the conventional device, and the variation in the primary resonance frequency due to the variation in the plate thickness can be made sufficiently small.

ところで、以上のような構成で問題となるのは、支持ば
ね部材25は予めねじられた状態から、さらにトラッキ
ングに必要な角度だけねじられた状態となるため、支持
ばね部材25に働く剪断応力(kgf/af)が大きく
なるということである。
By the way, the problem with the above configuration is that the support spring member 25 goes from a pre-twisted state to a state where it is further twisted by an angle necessary for tracking, so the shear stress acting on the support spring member 25 ( kgf/af) becomes larger.

そこで、支持ばね部材25の剪断応力(kgf/d)が
許容応力を越える危険がある場合は、支持ばね部材25
は平坦な薄板にねじりを加えた状態19− ばね部の一端を上記回転中心軸方向に移動可能に支持す
る屈曲部とで構成したので、上記ねじりばね部の板厚を
厚くしても一次共振周波数を十分低くすることができ、
且つ、板厚のバラツキによる一次共振周波数のバラツキ
をも小さくすることができる。
Therefore, if there is a risk that the shear stress (kgf/d) of the support spring member 25 exceeds the allowable stress, the support spring member 25
is a state in which a flat thin plate is torsioned 19- Since the spring part is configured with a bent part that supports one end of the spring part so as to be movable in the direction of the rotation center axis, primary resonance will not occur even if the plate thickness of the torsion spring part is increased. The frequency can be lowered sufficiently,
In addition, variations in the primary resonance frequency due to variations in plate thickness can also be reduced.

また、上記第1の構成のトラッキングミラーアクチュエ
ータ装置において、支持ばね部材のねじりばね部と屈曲
部を単一の板ばねにより形成した場合には、部品点数の
削減及び組立て作業の簡単化が図れる。
Further, in the tracking mirror actuator device having the first configuration, when the torsion spring portion and the bending portion of the support spring member are formed by a single leaf spring, the number of parts can be reduced and the assembly work can be simplified.

次に、本発明による第2の構成のトラッキングミラーア
クチュエータ装置においては、可動部の両側部を支持す
る支持ばね部材を、可動部の回転中心軸を中心に夫々同
方向に微小角ねじりを加えた状態で固定したため、支持
ばね部材のばね定数は、支持ばね部材の一端が回転中心
軸方向に移動可能な場合と同等となり、支持ばね部材の
板厚を厚くしても一次共振周波数を十分低くすることが
でき、且つ、板厚のバラツキによる一次共振周波で固定
するのではなく、予め、微小量ねじれた状態に形成して
おけばよい。すなわち、ねじり力が働かない状態におい
て、微小量のねじれを持つ薄板を製作し、支持ばね部材
25として使用すればよく、この場合には、トラッキン
グ動作により支持ばね部材25に働く剪断応力は第8図
に示した従来装置の支持ばね部材の場合とほぼ等しくな
る。
Next, in the tracking mirror actuator device having the second configuration according to the present invention, the support spring members that support both sides of the movable part are twisted by a small angle in the same direction around the central axis of rotation of the movable part. Since the spring constant of the support spring member is fixed in the fixed state, the spring constant of the support spring member is the same as when one end of the support spring member is movable in the direction of the rotation center axis, and even if the plate thickness of the support spring member is increased, the primary resonance frequency is sufficiently low. In addition, instead of being fixed at the primary resonance frequency due to variations in plate thickness, it is sufficient to form the plate in a slightly twisted state in advance. That is, in a state where no torsional force is applied, a thin plate with a minute amount of twist may be manufactured and used as the support spring member 25. In this case, the shear stress acting on the support spring member 25 due to the tracking operation is This is approximately the same as in the case of the support spring member of the conventional device shown in the figure.

尚、以上の実施例において、支持ばね部材25に与えら
れるねじれ角は、トラッキングに必要な回転角以上であ
れば本発明の効果は得られ、この角度は大変微小な角度
である。したがって、本実施例の場合も、支持ばね部材
25のZ方向及びy方向の剛性は従来装置の場合と同等
と考えられ、2方向及びy方向への無用の振動が防止で
きる。
In the embodiments described above, the effect of the present invention can be obtained as long as the torsion angle given to the support spring member 25 is equal to or larger than the rotation angle required for tracking, and this angle is a very small angle. Therefore, also in the case of this embodiment, the rigidity of the support spring member 25 in the Z direction and the y direction is considered to be equivalent to that of the conventional device, and unnecessary vibrations in the two directions and the y direction can be prevented.

〔発明の効果〕〔Effect of the invention〕

以上、実施例に基づいて説明したように、本発明による
第1の構成のトラッキングミラーアクチュエータ装置に
おいては、可動部の両側部を支持する一対の支持ばね部
材を、可動部の回転中心軸を中心にねじれ変形するねじ
りばね部と、ねじり20− 数のバラツキをも小さくすることができる。
As described above based on the embodiments, in the tracking mirror actuator device of the first configuration according to the present invention, the pair of support spring members that support both sides of the movable part are arranged around the central rotation axis of the movable part. It is also possible to reduce the variation in the number of torsion springs and the number of twists.

また、第2の構成のトラッキングミラーアクチュエータ
装置において、可動部の両側部を支持する支持ばね部材
として、可動部の回転中心軸を中心に夫々同方向に微小
角ねじれた状態に予め整形された薄板を用いた場合には
、ばね定数は、支持ばね部材の一端が回転中心軸方向に
移動可能な場合と同等となり、支持ばね部材の板厚を厚
くしても一次共振周波数を十分低くすることができ、且
つ、支持ばねに働く剪断応力を増加させることなく板厚
のバラツキによる一次共振周波数のバラツキを小さくす
ることができる。
Further, in the tracking mirror actuator device having the second configuration, thin plates shaped in advance so as to be twisted at a slight angle in the same direction around the rotation center axis of the movable part are used as support spring members that support both sides of the movable part. When using , the spring constant is the same as when one end of the support spring member is movable in the direction of the rotation center axis, and even if the plate thickness of the support spring member is increased, the primary resonance frequency cannot be made sufficiently low. Moreover, it is possible to reduce the variation in the primary resonance frequency due to the variation in plate thickness without increasing the shear stress acting on the support spring.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の第1の構成の一実施例を示すトラッキ
ングミラーアクチュエータ装置の斜視構成図、第2図(
a)は同上トラッキングミラーアクチュエータ装置の支
持ばね部材を図中2方向より見た状態を模式的に示す平
面図、第2図(b)は第2図(a)の■−■線断面図、
第3図は本発明の第1の構成の別の実施例を示すトラッ
キングミラーアクチュエータ装置の斜視構成図、第4図
(a)は同上トラッキングミラーアクチュエータ装置の
支持ばね部材を図中Z方向より見た状態を模式的に示す
平面図、第4図(b)は第4図(a)のIV−IV線断
面図、第5図本発明の第2の構成の一実施例を示すI−
ラッキングミラーアクチュエータ装置の斜視構成図、第
6図は同上トラッキングミラーアクチュエータ装置の支
持ばね部材の固定前の状態を示す説明図であって、同図
(a)は支持ばね部材を第5図y方向から見たときの図
、同図(b)は支持ばね部材を第5図X方向から見たと
きの図、第7図は第5図に示す1〜ラツキングミラーア
クチユエータ装置の支持ばね部材の固定後の状態を示す
説明図であって、同図(a)は支持ばね部材を第5図y
方向から見たときの図、同図(b)は支持ばね部材を第
5図X方向から見たときの図、第8図は従来技術の一例
を示すトラッキングミラーアクチュエータ装置の斜視構
成図、第9図(a)は同上従来のトラッキングミラーア
クチュエータ装置の支持ばね部材を図中X方向より23
− 見た状態を模式的に示す平面図、第9図(b)は第9図
(、)のIX−IX線断面図である。 ■・・・・可動部、2・・・・ミラー、3・・・・ミラ
ー支持体、4・・・・駆動コイル、15.25・・・・
支持ばね部材、6・・・・固定部支持体、7・・・・ヨ
ーク、8・・・・・磁石、9・・・・磁気ギャップ、1
0・・・・基台、20・・・・ねじりばね部、21・・
・・屈曲部、C・・・・回転中心線。 24−
FIG. 1 is a perspective configuration diagram of a tracking mirror actuator device showing an embodiment of the first configuration of the present invention, and FIG.
a) is a plan view schematically showing the support spring member of the tracking mirror actuator device as seen from two directions in the figure; FIG. 2(b) is a sectional view taken along the line ■-■ of FIG. 2(a);
FIG. 3 is a perspective configuration diagram of a tracking mirror actuator device showing another embodiment of the first configuration of the present invention, and FIG. 4(a) is a support spring member of the same tracking mirror actuator device as seen from the Z direction in the figure. FIG. 4(b) is a sectional view taken along the line IV--IV of FIG. 4(a), and FIG.
FIG. 6 is a perspective view of the racking mirror actuator device, and FIG. 6 is an explanatory diagram showing the state before the support spring member of the tracking mirror actuator device is fixed, and FIG. Fig. 7 is a view of the support spring member as seen from the X direction in Fig. 5, and Fig. 7 is a view of the support spring member of the racking mirror actuator device shown in Fig. FIG. 5(a) is an explanatory diagram showing the state after the member is fixed, and FIG.
FIG. 5B is a view of the support spring member as seen from the X direction in FIG. 5. FIG. Figure 9(a) shows the support spring member of the conventional tracking mirror actuator device as shown above when viewed from the X direction in the figure.
- A plan view schematically showing the viewed state, and FIG. 9(b) is a sectional view taken along the line IX-IX of FIG. 9(,). ■...Movable part, 2...Mirror, 3...Mirror support, 4...Drive coil, 15.25...
Support spring member, 6... fixed part supporter, 7... yoke, 8... magnet, 9... magnetic gap, 1
0...Base, 20...Torsion spring part, 21...
...Bending part, C...Rotation center line. 24-

Claims (1)

【特許請求の範囲】 1、光情報記録媒体上に微小な光スポットを形成して情
報の記録・再生を行う光情報記録再生装置において上記
光スポットのトラッキング動作を行うために用いられる
トラッキングミラーアクチュエータ装置であって、ミラ
ーとミラー支持体と駆動部とを有するほぼ左右対称な可
動部と、該可動部の左右両側から可動部の回転中心軸に
沿って延出するように設けられ可動部を回動自在に支持
する一対の支持ばね部材とを備え、上記可動部を上記駆
動部により回動させることによって上記光情報記録媒体
上の光スポットにトラッキング動作を行わせるようにし
たトラッキングミラーアクチュエータ装置において、上
記支持バネ部材は、上記可動部の回転中心軸を中心にね
じり変形可能なねじりばね部と、回転中心軸方向に屈曲
可能な屈曲部を有し、上記ねじりばね部の一端は上記屈
曲部により回転中心軸方向に移動可能に支持されるとと
もに、上記ねじりばね部の厚み方向を上記ミラーの反射
面内方向に合わせて設けたことを特徴とするトラッキン
グミラーアクチュエータ装置。 2、光情報記録媒体上に微小な光スポットを形成して情
報の記録・再生を行う光情報記録再生装置において上記
光スポットのトラッキング動作を行うために用いられる
トラッキングミラーアクチュエータ装置であって、ミラ
ーとミラー支持体と駆動部とを有するほぼ左右対称な可
動部と、該可動部の左右両側から可動部の回転中心軸に
沿って延出するように設けられ可動部を回動自在に支持
する一対の支持ばね部材とを備え、上記可動部を上記駆
動部により回動させることによって上記光情報記録媒体
上の光スポットにトラッキング動作を行わせるようにし
たトラッキングミラーアクチュエータ装置において、上
記一対の支持ばね部材は、夫々上記可動部の回転中心軸
と同一直線上に中心線を有する薄板状のばね部材からな
り、この可動部左右の一対の支持ばね部材は回転中心軸
を中心に微小角度だけ同方向にねじりを加えられた状態
で両端を夫々固定されていると共に、上記一対の支持ば
ね部材の厚み方向は上記ミラーの反射面内方向に合わせ
て設けられていることを特徴とするトラッキングミラー
アクチュエータ装置。
[Claims] 1. A tracking mirror actuator used to perform a tracking operation of the optical spot in an optical information recording and reproducing device that records and reproduces information by forming a minute optical spot on an optical information recording medium. The apparatus includes a substantially bilaterally symmetrical movable part having a mirror, a mirror support, and a drive part, and a movable part extending from both left and right sides of the movable part along a rotation center axis of the movable part. A tracking mirror actuator device comprising: a pair of support spring members rotatably supported; and the movable portion is rotated by the drive portion to perform a tracking operation on the optical spot on the optical information recording medium. In the above, the support spring member has a torsion spring part that is torsionally deformable about the rotation center axis of the movable part and a bending part that is bendable in the direction of the rotation center axis, and one end of the torsion spring part is arranged in the bending part. A tracking mirror actuator device, characterized in that the tracking mirror actuator device is supported movably in the direction of the rotation center axis by the torsion spring portion, and the thickness direction of the torsion spring portion is aligned with the inward direction of the reflective surface of the mirror. 2. A tracking mirror actuator device used to perform a tracking operation of the optical spot in an optical information recording and reproducing device that records and reproduces information by forming a minute optical spot on an optical information recording medium, the mirror a substantially bilaterally symmetrical movable part having a mirror support and a drive part; and a movable part extending from both left and right sides of the movable part along the rotation center axis of the movable part and rotatably supporting the movable part. A tracking mirror actuator device comprising: a pair of support spring members, the tracking mirror actuator device configured to perform a tracking operation on a light spot on the optical information recording medium by rotating the movable section by the drive section; The spring members are thin plate-like spring members each having a center line on the same straight line as the rotation center axis of the movable part, and the pair of supporting spring members on the left and right of the movable part are aligned at a small angle around the rotation center axis. A tracking mirror actuator characterized in that both ends of the actuator are fixed in a twisted state, and the thickness direction of the pair of support spring members is aligned with the inward direction of the reflective surface of the mirror. Device.
JP8890390A 1990-04-03 1990-04-03 Tracking mirror actuator device Pending JPH03287222A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8890390A JPH03287222A (en) 1990-04-03 1990-04-03 Tracking mirror actuator device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8890390A JPH03287222A (en) 1990-04-03 1990-04-03 Tracking mirror actuator device

Publications (1)

Publication Number Publication Date
JPH03287222A true JPH03287222A (en) 1991-12-17

Family

ID=13955913

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8890390A Pending JPH03287222A (en) 1990-04-03 1990-04-03 Tracking mirror actuator device

Country Status (1)

Country Link
JP (1) JPH03287222A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002008818A1 (en) * 2000-07-24 2002-01-31 Nhk Spring Co., Ltd. Probe light scanning actuator
JP2003527621A (en) * 1999-07-13 2003-09-16 インプット/アウトプット,インコーポレーテッド Micromachined mirror device
JP2013518297A (en) * 2010-01-22 2013-05-20 ケンブリッジ テクノロジー インコーポレイテッド Low wobble and large scan angle tote-band resonant scanner with tunable thermal expansion coefficients and interchangeable mirrors

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003527621A (en) * 1999-07-13 2003-09-16 インプット/アウトプット,インコーポレーテッド Micromachined mirror device
WO2002008818A1 (en) * 2000-07-24 2002-01-31 Nhk Spring Co., Ltd. Probe light scanning actuator
EP1233295A1 (en) * 2000-07-24 2002-08-21 NHK Spring Co., Ltd. Probe light scanning actuator
EP1233295A4 (en) * 2000-07-24 2011-12-28 Nhk Spring Co Ltd Probe light scanning actuator
JP2013518297A (en) * 2010-01-22 2013-05-20 ケンブリッジ テクノロジー インコーポレイテッド Low wobble and large scan angle tote-band resonant scanner with tunable thermal expansion coefficients and interchangeable mirrors

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