JPH03279819A - Vibration sensor with machine resonance system - Google Patents

Vibration sensor with machine resonance system

Info

Publication number
JPH03279819A
JPH03279819A JP7896690A JP7896690A JPH03279819A JP H03279819 A JPH03279819 A JP H03279819A JP 7896690 A JP7896690 A JP 7896690A JP 7896690 A JP7896690 A JP 7896690A JP H03279819 A JPH03279819 A JP H03279819A
Authority
JP
Japan
Prior art keywords
elastic body
weight
frequency
resonance
vibration sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7896690A
Other languages
Japanese (ja)
Inventor
Kenzo Nakamura
賢蔵 中村
Hideo Ito
伊藤 英夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP7896690A priority Critical patent/JPH03279819A/en
Publication of JPH03279819A publication Critical patent/JPH03279819A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To detect variation in abnormal oscillation frequency by using an elastic body which varies in elasticity constant with a strain quantity and providing a mechanism which applies weight mass in its strain direction, and an external adjusting screw for a resonance frequency. CONSTITUTION:A weight A3 is placed on a piezoelectric element 2 in a sensor case 1 and an elastic body 4 with an elasticity coefficient K and a weight B3 of mass (m) are placed thereupon and clamped with the screw 6. Then the machine resonance frequency f1 between the elastic body 4 and weight 5 is shown by an equation and while resonance increases at the oscillation frequency f1, the output of the element 2 increases. Therefore, the resonance frequency f1 is varied by varying the elasticity constant K and weight mass (m). Consequently, a specific frequency is selected optionally and various usages are made possible.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、圧電型振動センサに関する。特に、機械共振
振動系を設けて、検査周波数帯域を調整できる、圧電圧
縮型振動センサに関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a piezoelectric vibration sensor. In particular, the present invention relates to a piezoelectric compression type vibration sensor that is equipped with a mechanical resonance vibration system and whose test frequency band can be adjusted.

[従来の技術及び発明が解決しようとする問題点]圧電
素子を用いた圧電圧縮型振動センサの上部及び/或いは
下部に、特定の機械共振特性を有する機械共振振動系を
設けて、検査周波数特性に選択性を持たせた構造の振動
センサが従来ある。
[Prior art and problems to be solved by the invention] A mechanical resonance vibration system having specific mechanical resonance characteristics is provided at the upper and/or lower part of a piezoelectric compression type vibration sensor using a piezoelectric element, and the test frequency characteristic is Conventionally, there are vibration sensors with a structure that provides selectivity.

即ち、弾性体とオモリの組合わせによる特定の機械共振
特性を有する機械共振系を付加して、検査周波数に選択
性を持たゼる。そして、その周波数rは、r−1/2π
・J k / mによって決められる。但し、kは、用
いた弾性体の弾性係数であり、mは、オモリの質量であ
る。
That is, by adding a mechanical resonance system having specific mechanical resonance characteristics by a combination of an elastic body and a weight, selectivity can be achieved in the test frequency. And the frequency r is r-1/2π
・Determined by J k / m. However, k is the elastic modulus of the elastic body used, and m is the mass of the weight.

新たに付加した弾性体−質量系の弾性定数、質量を適切
に選択することにより、共振閘波数、共振帯域幅及び共
振時の感度を調整することができる。
By appropriately selecting the elastic constant and mass of the newly added elastic body-mass system, the resonance wave number, resonance bandwidth, and sensitivity during resonance can be adjusted.

従来のセンサは、共振周波数を調整する機構が内部にあ
り、ケース密封後の共振周波数は固定きれる。このこと
から、設計の際に決定きれた周波数に固定され、多様な
場合に使用できなく、また、設定後、回転機構のある歯
車装置等に用いる場合、回転数の変化により、振動周波
数がズレる場合があり、検出周波数にズし等が生じるが
、それに対応できない、また、共振系の疲労等による経
時的な共振周波数のズレを補正できない。
Conventional sensors have an internal mechanism to adjust the resonant frequency, and the resonant frequency can be fixed after the case is sealed. For this reason, the frequency is fixed at a predetermined frequency during design, making it unusable in a variety of situations.Furthermore, once set, when used in a gear device with a rotating mechanism, the vibration frequency may deviate due to changes in rotational speed. In some cases, the detection frequency may shift, but it cannot be dealt with, and it cannot correct the shift in the resonant frequency over time due to fatigue of the resonance system or the like.

従来の構造の圧電型振動センサでは、加工上共振ピーク
の設定の困難な周波数領域に、共振を持たせることが、
本発明により、付加した弾性体−質量系の弾性係数、質
量を適切に調整選択するこ−とにより可能となる。
With piezoelectric vibration sensors of conventional structure, it is possible to create resonance in a frequency range where it is difficult to set the resonance peak due to processing.
According to the present invention, this becomes possible by appropriately adjusting and selecting the elastic coefficient and mass of the added elastic body-mass system.

即ち、本発明は、圧電体の構造、弾性体の構造、加工が
吉易になる圧電圧縮型振動センサを提供することを目的
とする。また、本発明は、−F:、記のセンサの調整作
業が複雑になるという問題点を除去し、センサ出力外側
から検査周波数特性を調整できる振動センサ構造を提供
することを目的とする0本発明は、共振周波数を外部操
作で調整することが可能な機械共振系を有する振動セン
サを提供することを目的とする。
That is, an object of the present invention is to provide a piezoelectric compression type vibration sensor in which the structure of the piezoelectric body and the structure of the elastic body are easy to process. Further, the present invention aims to eliminate the problem of complicating the sensor adjustment work described in -F:, and to provide a vibration sensor structure that can adjust the test frequency characteristics from outside the sensor output. An object of the invention is to provide a vibration sensor having a mechanical resonance system whose resonance frequency can be adjusted by external operation.

[問題点を解決するための手段] 本発明は、該圧電体素子の上部及び/或いは下部に、弾
性体とオモリの組合わせによる特定の機械共振特性を有
する機械共振振動系を設けて、検査周波数特性に選択性
を持たせた構造の圧電体素子を用いた圧電圧縮型振動セ
ンサにおいて、前記弾性体の弾性定数を、その歪量によ
って変化側る弾性体を使用し、センサケース内のオモリ
質量を、弾性体を歪ませる方向に加圧する機構を設け、
共振周波数を外部操作で調整する調整ネジを該センサケ
ースに設けたことを特徴とする前記圧電圧縮型振動セン
サである。
[Means for Solving the Problems] The present invention provides a mechanical resonance vibration system having specific mechanical resonance characteristics by a combination of an elastic body and a weight on the upper and/or lower part of the piezoelectric element, and performs inspection. In a piezoelectric compression type vibration sensor using a piezoelectric element having a structure with selectivity in frequency characteristics, an elastic body whose elastic constant changes depending on the amount of strain is used, and a weight inside the sensor case is used. A mechanism is provided to apply pressure to the elastic body in a direction that distorts it.
The piezoelectric compression type vibration sensor is characterized in that the sensor case is provided with an adjustment screw for adjusting the resonance frequency by external operation.

[作用コ 本発明によると、圧電型振動センサの構造の中に、弾性
体とオモリの組合わせによる特定の機械共振特性を有す
る機械共振系を付加し、検査周波数特性に選択性を持た
せたものである。
[Operations] According to the present invention, a mechanical resonance system having a specific mechanical resonance characteristic by a combination of an elastic body and a weight is added to the structure of a piezoelectric vibration sensor to give selectivity to the test frequency characteristic. It is something.

即ち、共振周波数fは、r=1/2π−、/に/mによ
って決められる。(lj、 t、、kは、用いt−弾性
体の弾性係数で夛)す、mは、1七りの質量である。
That is, the resonant frequency f is determined by r=1/2π-, /to/m. (lj, t, , k are the elastic modulus of the t-elastic body used), m is the mass of 17.

本発明の振動センサにおいて、その弾性定数kが、歪量
によって変化するものを使用し、センサケースに、その
質量を弾性体を歪ませる方向に加圧する機構を設けたも
のである。
In the vibration sensor of the present invention, the elastic constant k changes depending on the amount of strain, and the sensor case is provided with a mechanism that presses the mass in a direction that distorts the elastic body.

従って、質量を加圧し、バネの歪量を変化きせることが
できる。
Therefore, it is possible to pressurize the mass and change the amount of strain in the spring.

従って、質量を加圧し、バネの歪量を変えることにより
、バネ定数を変化し、共振周波数を調整できる。
Therefore, by pressurizing the mass and changing the amount of strain in the spring, the spring constant can be changed and the resonant frequency can be adjusted.

次に、本発明の振動センサを、具体的な実施例により、
説明するが、本発明は、その説明により限定されるもの
ではない。
Next, the vibration sensor of the present invention will be explained according to a specific example.
However, the present invention is not limited by the description.

[実施例1] 本実施例を第1図に示す。[Example 1] This embodiment is shown in FIG.

第1図に示した振動センサは、従来の振動センサに、郭
性体(4)とオモリ(5)による機械共振系を取り付け
た構造のものである。
The vibration sensor shown in FIG. 1 has a structure in which a mechanical resonance system consisting of a hollow body (4) and a weight (5) is attached to a conventional vibration sensor.

センサケ゛−ス(1)内に、圧電体素子(2)を取り(
jけ、その」−にオモリA(3)、弾性体(4)及びオ
モリB(5)を図示のように、その順に取り付けた構造
である。
Place the piezoelectric element (2) inside the sensor case (1) (
It has a structure in which a weight A (3), an elastic body (4), and a weight B (5) are attached in that order as shown in the figure.

弾性体(4)は、第2図に示すような特性を持つバネで
あり、センサケース(1)につけた調整ネジ(6)を回
すことにより、バネの歪量を調整することにより、第3
図に示すような共振周波数特性を有する振動センサが得
られる。
The elastic body (4) is a spring with the characteristics shown in Fig. 2, and the amount of strain of the spring can be adjusted by turning the adjustment screw (6) attached to the sensor case (1).
A vibration sensor having resonance frequency characteristics as shown in the figure is obtained.

忰性係数kを有峻−る弾性体(4)と、質量mのオモリ
(5)を、オモリA(3)の上に置き、不ン(6)で締
め付けた。そこで、弾性体(4)とオモリ(5)の機械
共振周波数f、は、f、=1/2π・Jk/m″c′与
えられる。
An elastic body (4) having a steep stiffness coefficient k and a weight (5) having a mass m were placed on weight A (3) and tightened with a bolt (6). Therefore, the mechanical resonance frequency f of the elastic body (4) and the weight (5) is given by f,=1/2π·Jk/m″c′.

振動周波数f、で共振が起こり、オモリA(3)・オモ
リB〈5)の振動が増大するため、圧電体素子(2)の
出力が増大する。
Resonance occurs at the vibration frequency f, and the vibrations of the weights A (3) and B (5) increase, so that the output of the piezoelectric element (2) increases.

、二のような点から、弾性定数k及び才←りの質1mを
変λる、二とにより、共振周波数f、を変化させること
ができる。
, 2, the resonance frequency f can be changed by changing the elastic constant k and the deflection quality 1m.

弾性体(4)は、所定の弾性定数を有する構造とし、具
体的には、板バネの他に、コイルバネ、物質の体積弾性
変形を利用したバルク状バネ、板バネが利用できる。
The elastic body (4) has a structure having a predetermined elastic constant, and specifically, in addition to a plate spring, a coil spring, a bulk spring using bulk elastic deformation of a substance, or a plate spring can be used.

これらの弾性体の材質は、金属材料、高分子材料等の種
々の材料が利用できる。その中から所望のパターンで弾
性定数が得られるように選定すべきである。
Various materials such as metal materials and polymer materials can be used for these elastic bodies. It should be selected from among them so that the desired pattern of elastic constants can be obtained.

[発明の効果] 本発明の振動センサにおいては、 第1に、検出する特定周波数を任意に選択できるため、
多様な使用が可能となる0例えば、回転数や歯数によっ
て、異常振動周波数が変化する歯車装置の設備診断に用
いる場合、従来のセンサでは、その変化に対応した検出
は、不可能であったが、本発明により、それが可能とな
る。
[Effects of the Invention] First, in the vibration sensor of the present invention, the specific frequency to be detected can be arbitrarily selected;
Can be used in a variety of ways. For example, when used for equipment diagnosis of gear systems where abnormal vibration frequency changes depending on the rotation speed and number of teeth, it was impossible to detect such changes with conventional sensors. However, the present invention makes it possible.

第2に、従来のセンサでは、特定周波数に合わせて、設
計するのに対して、本発明のセンサでは、ある範囲に共
振を持たせれば良く、また、微調整かり能となるため、
検出精度も向上する構造になっている。
Second, while conventional sensors are designed to match a specific frequency, the sensor of the present invention only needs to have resonance within a certain range, and can be finely adjusted.
The structure also improves detection accuracy.

第3に、従来のセンサでは、疲労による経時的なズレを
補正できないが、本発明のセンサでは、それが可能にな
る。
Thirdly, conventional sensors cannot correct temporal deviations due to fatigue, but the sensor of the present invention makes it possible.

第4に、たわみ量に対して、共振周波数が変化するので
、たわみ量から共振周波数が分かる、即ち、周波数解析
をするまでもなく、その周波数での振動量が分かる。
Fourth, since the resonant frequency changes with respect to the amount of deflection, the resonant frequency can be determined from the amount of deflection, that is, the amount of vibration at that frequency can be determined without the need for frequency analysis.

以上のごとき顕著な技術的な効果が得られた。The remarkable technical effects described above were obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本発明の圧電圧縮型振動センサを示す断面説
明図である。 第2図は、本発明の圧電圧縮型振動センサに利用する弾
性体の歪量と弾性定数の関係を示すグラフである。 第3図は、本発明の圧電圧縮型振動センサに利用(る弾
性体を用いたときのバネの歪量と共振周波数との関係を
示すグラフである。 [主要部分の符号の説明] 1 、、、、、、、、センサケース 2 、、、、、、、、圧電体素子 3 、、、、、、、、才;すA(質量)4 、、、、、
、、弾性体 5 、、、、、、、、オモリB(質量)6 、、、、、
、、、調整ネジ
FIG. 1 is an explanatory cross-sectional view showing a piezoelectric compression type vibration sensor of the present invention. FIG. 2 is a graph showing the relationship between the amount of strain and the elastic constant of the elastic body used in the piezoelectric compression type vibration sensor of the present invention. FIG. 3 is a graph showing the relationship between the amount of strain of a spring and the resonance frequency when an elastic body is used in the piezoelectric compression type vibration sensor of the present invention. [Explanation of symbols of main parts] 1. , , , , , , Sensor case 2 , , , , , , Piezoelectric element 3 , , Weight A (mass) 4 , , , ,
, , Elastic body 5 , , Weight B (mass) 6 , , , ,
,,,Adjustment screw

Claims (1)

【特許請求の範囲】 該圧電体素子の上部及び/或いは下部に、弾性体とオモ
リの組合わせによる特定の機械共振特性を有する機械共
振振動系を設けて、検査周波数特性に選択性を持たせた
構造の圧電体素子を用いた圧電圧縮型振動センサにおい
て、 前記弾性体の弾性定数を、その歪量によって変化する弾
性体を使用し、 センサケース内のオモリ質量を、弾性体を歪ませる方向
に加圧する機構を設け、共振周波数を外部操作で調整す
る調整ネジを該センサケースに設けたことを特徴とする
前記圧電圧縮型振動センサ。
[Claims] A mechanical resonance vibration system having a specific mechanical resonance characteristic by a combination of an elastic body and a weight is provided above and/or below the piezoelectric element to impart selectivity to the inspection frequency characteristics. In a piezoelectric compression type vibration sensor using a piezoelectric element having a structure, an elastic body whose elastic constant changes depending on the amount of strain is used, and the weight mass inside the sensor case is set in a direction in which the elastic body is distorted. The piezoelectric compression type vibration sensor is characterized in that the sensor case is provided with a mechanism for applying pressure to the sensor case, and an adjustment screw for adjusting the resonance frequency by external operation.
JP7896690A 1990-03-29 1990-03-29 Vibration sensor with machine resonance system Pending JPH03279819A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7896690A JPH03279819A (en) 1990-03-29 1990-03-29 Vibration sensor with machine resonance system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7896690A JPH03279819A (en) 1990-03-29 1990-03-29 Vibration sensor with machine resonance system

Publications (1)

Publication Number Publication Date
JPH03279819A true JPH03279819A (en) 1991-12-11

Family

ID=13676645

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7896690A Pending JPH03279819A (en) 1990-03-29 1990-03-29 Vibration sensor with machine resonance system

Country Status (1)

Country Link
JP (1) JPH03279819A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2643685C1 (en) * 2016-09-07 2018-02-05 Владимир Яковлевич Бараш Piezoelectric vibration-measuring transducer with internal excitation of deformation and methods of its calibration

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2643685C1 (en) * 2016-09-07 2018-02-05 Владимир Яковлевич Бараш Piezoelectric vibration-measuring transducer with internal excitation of deformation and methods of its calibration

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