JPH03267720A - Optical encoder - Google Patents

Optical encoder

Info

Publication number
JPH03267720A
JPH03267720A JP6429190A JP6429190A JPH03267720A JP H03267720 A JPH03267720 A JP H03267720A JP 6429190 A JP6429190 A JP 6429190A JP 6429190 A JP6429190 A JP 6429190A JP H03267720 A JPH03267720 A JP H03267720A
Authority
JP
Japan
Prior art keywords
light
reflected light
lens
diffraction
photodetector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6429190A
Inventor
Kazuhiro Hane
Shuzo Hattori
Yasuharu Jin
Kohei Nishikawa
Yoshiro Nishimoto
Akio Suzuki
Hiroyuki Takamatsu
Yasushi Yoneda
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Priority to JP6429190A priority Critical patent/JPH03267720A/en
Publication of JPH03267720A publication Critical patent/JPH03267720A/en
Application status is Pending legal-status Critical

Links

Abstract

PURPOSE: To realize the miniaturization of this encoder and the reduction in cost and high detection accuracy by providing a mobile object for forming a position information pattern of plural diffraction grating elements, a light beam projection system which projects a light on the mobile object and plural light receiving systems for its reflected light, and further providing a lens which image diffracting grating element reflected light on a corresponding photodetector.
CONSTITUTION: The image forming lens 18 which image-forms reflected light from a diffraction grating element G at every track TR1 of a rotary disk on a corresponding sensor S1 of the photodetector 17 is provided between a beam splitter 15 and the array type photodetector 17. Then even when the intervals of the elements G are narrowed down to diverge reflected light by diffraction, that is absorbed by the lens 18 and the light is made incident on the element 17. Consequently, inter-track interference is precluded, and even when the track intervals are narrowed down, no misdetection is caused by the diffraction, so that the small-sized, inexpensive encoder with the high detection accuracy can be realized.
COPYRIGHT: (C)1991,JPO&Japio
JP6429190A 1990-03-16 1990-03-16 Optical encoder Pending JPH03267720A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6429190A JPH03267720A (en) 1990-03-16 1990-03-16 Optical encoder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6429190A JPH03267720A (en) 1990-03-16 1990-03-16 Optical encoder

Publications (1)

Publication Number Publication Date
JPH03267720A true JPH03267720A (en) 1991-11-28

Family

ID=13253987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6429190A Pending JPH03267720A (en) 1990-03-16 1990-03-16 Optical encoder

Country Status (1)

Country Link
JP (1) JPH03267720A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6232593B1 (en) 1998-04-01 2001-05-15 Fanuc Ltd. Optical encoder
JP2015532726A (en) * 2012-08-23 2015-11-12 エーエスエムエル ネザーランズ ビー.ブイ. Lithographic apparatus, device manufacturing method, and displacement measurement system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6232593B1 (en) 1998-04-01 2001-05-15 Fanuc Ltd. Optical encoder
JP2015532726A (en) * 2012-08-23 2015-11-12 エーエスエムエル ネザーランズ ビー.ブイ. Lithographic apparatus, device manufacturing method, and displacement measurement system
US9575416B2 (en) 2012-08-23 2017-02-21 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and displacement measurement system

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