JPH0326334U - - Google Patents

Info

Publication number
JPH0326334U
JPH0326334U JP8669689U JP8669689U JPH0326334U JP H0326334 U JPH0326334 U JP H0326334U JP 8669689 U JP8669689 U JP 8669689U JP 8669689 U JP8669689 U JP 8669689U JP H0326334 U JPH0326334 U JP H0326334U
Authority
JP
Japan
Prior art keywords
filament
chamber
vacuum
applying
creating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8669689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8669689U priority Critical patent/JPH0326334U/ja
Publication of JPH0326334U publication Critical patent/JPH0326334U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
JP8669689U 1989-07-24 1989-07-24 Pending JPH0326334U (US06272168-20010807-M00014.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8669689U JPH0326334U (US06272168-20010807-M00014.png) 1989-07-24 1989-07-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8669689U JPH0326334U (US06272168-20010807-M00014.png) 1989-07-24 1989-07-24

Publications (1)

Publication Number Publication Date
JPH0326334U true JPH0326334U (US06272168-20010807-M00014.png) 1991-03-18

Family

ID=31636313

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8669689U Pending JPH0326334U (US06272168-20010807-M00014.png) 1989-07-24 1989-07-24

Country Status (1)

Country Link
JP (1) JPH0326334U (US06272168-20010807-M00014.png)

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