JPH03243776A - Graphite member for cvd - Google Patents

Graphite member for cvd

Info

Publication number
JPH03243776A
JPH03243776A JP4161990A JP4161990A JPH03243776A JP H03243776 A JPH03243776 A JP H03243776A JP 4161990 A JP4161990 A JP 4161990A JP 4161990 A JP4161990 A JP 4161990A JP H03243776 A JPH03243776 A JP H03243776A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
cvd
graphite
member
releasing
graphite member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4161990A
Other versions
JP2684106B2 (en )
Inventor
Masaki Okada
Original Assignee
Toyo Tanso Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Abstract

PURPOSE: To enhance the uniformity and denseness of ceramics deposited by chemical vapor deposition (CVD) by using a graphite member releasing gas at a specified releasing rate.
CONSTITUTION: This graphite member for CVD is made of graphite releasing gas at ≤2×10-2 pam2/sec.kg releasing speed (expressed in terms of N2) in the temp. range of 673-1,473K when sample of 10×10×1 mm size is heated at 1 K/sec heating rate. This graphite member is a graphite substrate for CVD or an internal member for a CVD furnace used at the time of depositing ceramics such as BN, SiC and C.
COPYRIGHT: (C)1991,JPO&Japio
JP4161990A 1990-02-22 1990-02-22 Ceramic coating graphite substrate and the internal component cvd furnace Expired - Lifetime JP2684106B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4161990A JP2684106B2 (en) 1990-02-22 1990-02-22 Ceramic coating graphite substrate and the internal component cvd furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4161990A JP2684106B2 (en) 1990-02-22 1990-02-22 Ceramic coating graphite substrate and the internal component cvd furnace

Publications (2)

Publication Number Publication Date
JPH03243776A true true JPH03243776A (en) 1991-10-30
JP2684106B2 JP2684106B2 (en) 1997-12-03

Family

ID=12613357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4161990A Expired - Lifetime JP2684106B2 (en) 1990-02-22 1990-02-22 Ceramic coating graphite substrate and the internal component cvd furnace

Country Status (1)

Country Link
JP (1) JP2684106B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007308370A (en) * 2007-07-27 2007-11-29 Toyo Tanso Kk Carbon composite material for reducing atmosphere furnace and production method therefor
JP2007308369A (en) * 2007-07-27 2007-11-29 Toyo Tanso Kk Carbon composite material for reducing atmosphere furnace and production method therefor
WO2008078503A1 (en) * 2006-12-25 2008-07-03 Tokyo Electron Limited Film forming apparatus and method of forming film
JP2010248072A (en) * 2000-12-18 2010-11-04 Toyo Tanso Kk Low nitrogen concentration graphite material and storage method of the same
JP2012178613A (en) * 2012-06-08 2012-09-13 Tokyo Electron Ltd Film-forming apparatus and film-forming method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102770582B (en) 2009-12-28 2015-06-17 东洋炭素株式会社 Tantalum carbide-coated carbon material and manufacturing method for same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5884181A (en) * 1981-11-11 1983-05-20 Matsushita Electric Ind Co Ltd Carbon member purifying treatment
JPS6378759A (en) * 1986-09-22 1988-04-08 Nec Corp Thermal head

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5884181A (en) * 1981-11-11 1983-05-20 Matsushita Electric Ind Co Ltd Carbon member purifying treatment
JPS6378759A (en) * 1986-09-22 1988-04-08 Nec Corp Thermal head

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010248072A (en) * 2000-12-18 2010-11-04 Toyo Tanso Kk Low nitrogen concentration graphite material and storage method of the same
WO2008078503A1 (en) * 2006-12-25 2008-07-03 Tokyo Electron Limited Film forming apparatus and method of forming film
JP2008159947A (en) * 2006-12-25 2008-07-10 Kyoto Univ Apparatus and method for forming film
US8696814B2 (en) 2006-12-25 2014-04-15 Tokyo Electron Limited Film deposition apparatus and film deposition method
JP2007308370A (en) * 2007-07-27 2007-11-29 Toyo Tanso Kk Carbon composite material for reducing atmosphere furnace and production method therefor
JP2007308369A (en) * 2007-07-27 2007-11-29 Toyo Tanso Kk Carbon composite material for reducing atmosphere furnace and production method therefor
JP4641536B2 (en) * 2007-07-27 2011-03-02 東洋炭素株式会社 Carbon composite and method for producing the same reducing atmosphere furnace
JP4641535B2 (en) * 2007-07-27 2011-03-02 東洋炭素株式会社 Carbon composite and method for producing the same reducing atmosphere furnace
JP2012178613A (en) * 2012-06-08 2012-09-13 Tokyo Electron Ltd Film-forming apparatus and film-forming method

Also Published As

Publication number Publication date Type
JP2684106B2 (en) 1997-12-03 grant

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