JPH0323927U - - Google Patents
Info
- Publication number
- JPH0323927U JPH0323927U JP8548289U JP8548289U JPH0323927U JP H0323927 U JPH0323927 U JP H0323927U JP 8548289 U JP8548289 U JP 8548289U JP 8548289 U JP8548289 U JP 8548289U JP H0323927 U JPH0323927 U JP H0323927U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- treatment mechanism
- type
- vapor deposition
- chemical vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8548289U JPH0323927U (cs) | 1989-07-19 | 1989-07-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8548289U JPH0323927U (cs) | 1989-07-19 | 1989-07-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0323927U true JPH0323927U (cs) | 1991-03-12 |
Family
ID=31634643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8548289U Pending JPH0323927U (cs) | 1989-07-19 | 1989-07-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0323927U (cs) |
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1989
- 1989-07-19 JP JP8548289U patent/JPH0323927U/ja active Pending