JPH03238863A - Solid state image sensing element and manufacture thereof - Google Patents

Solid state image sensing element and manufacture thereof

Info

Publication number
JPH03238863A
JPH03238863A JP3467690A JP3467690A JPH03238863A JP H03238863 A JPH03238863 A JP H03238863A JP 3467690 A JP3467690 A JP 3467690A JP 3467690 A JP3467690 A JP 3467690A JP H03238863 A JPH03238863 A JP H03238863A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
lens
sensitivity
state
image
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3467690A
Inventor
Masao Yamawaki
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Abstract

PURPOSE: To prevent deterioration of sensitivity and development of irregularities in sensitivity due to deformation of a lens and to improve reliability by forming the lens of organic silane.
CONSTITUTION: A transparent oxide film 12 is formed on a base film 9 above an n+ type photoelectric layer 4, and tetraethoxysilane which is organic silane is deposited on the oxide film 12 to form a convex lens-like converging lens 13. Thereby, even if the lens is heated about 80°C under varying conditions, it is possible to prevent the lens from softening and deforming, to prevent deterioration of sensitivity of a solid state image sensing element and development of irregularities in sensitivity and to acquire a solid state image sensing element of good reliability.
COPYRIGHT: (C)1991,JPO&Japio
JP3467690A 1990-02-15 1990-02-15 Solid state image sensing element and manufacture thereof Pending JPH03238863A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3467690A JPH03238863A (en) 1990-02-15 1990-02-15 Solid state image sensing element and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3467690A JPH03238863A (en) 1990-02-15 1990-02-15 Solid state image sensing element and manufacture thereof

Publications (1)

Publication Number Publication Date
JPH03238863A true true JPH03238863A (en) 1991-10-24

Family

ID=12421029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3467690A Pending JPH03238863A (en) 1990-02-15 1990-02-15 Solid state image sensing element and manufacture thereof

Country Status (1)

Country Link
JP (1) JPH03238863A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001060679A (en) * 1999-06-28 2001-03-06 Hyundai Electronics Ind Co Ltd Semiconductor image sensor containing optical layer
GB2387967A (en) * 2002-02-05 2003-10-29 Sharp Kk Semiconductor device intralayer lens
US7476833B2 (en) 2004-02-03 2009-01-13 Panasonic Corporation Solid-state imaging device, method for manufacturing the same, and camera using the same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001060679A (en) * 1999-06-28 2001-03-06 Hyundai Electronics Ind Co Ltd Semiconductor image sensor containing optical layer
GB2387967A (en) * 2002-02-05 2003-10-29 Sharp Kk Semiconductor device intralayer lens
GB2387967B (en) * 2002-02-05 2004-07-07 Sharp Kk Semiconductor device and method of manufacturing the same
US6903395B2 (en) 2002-02-05 2005-06-07 Sharp Kabushiki Kaisha Semiconductor device including interlayer lens
US7476833B2 (en) 2004-02-03 2009-01-13 Panasonic Corporation Solid-state imaging device, method for manufacturing the same, and camera using the same

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