JPH03238863A - Solid state image sensing element and manufacture thereof - Google Patents
Solid state image sensing element and manufacture thereofInfo
- Publication number
- JPH03238863A JPH03238863A JP3467690A JP3467690A JPH03238863A JP H03238863 A JPH03238863 A JP H03238863A JP 3467690 A JP3467690 A JP 3467690A JP 3467690 A JP3467690 A JP 3467690A JP H03238863 A JPH03238863 A JP H03238863A
- Authority
- JP
- Grant status
- Application
- Patent type
- Prior art keywords
- lens
- solid state
- sensing element
- sensitivity
- image sensing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent deterioration of sensitivity and development of irregularities in sensitivity due to deformation of a lens and to improve reliability by forming the lens of organic silane.
CONSTITUTION: A transparent oxide film 12 is formed on a base film 9 above an n+ type photoelectric layer 4, and tetraethoxysilane which is organic silane is deposited on the oxide film 12 to form a convex lens-like converging lens 13. Thereby, even if the lens is heated about 80°C under varying conditions, it is possible to prevent the lens from softening and deforming, to prevent deterioration of sensitivity of a solid state image sensing element and development of irregularities in sensitivity and to acquire a solid state image sensing element of good reliability.
COPYRIGHT: (C)1991,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3467690A JPH03238863A (en) | 1990-02-15 | 1990-02-15 | Solid state image sensing element and manufacture thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3467690A JPH03238863A (en) | 1990-02-15 | 1990-02-15 | Solid state image sensing element and manufacture thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03238863A true true JPH03238863A (en) | 1991-10-24 |
Family
ID=12421029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3467690A Pending JPH03238863A (en) | 1990-02-15 | 1990-02-15 | Solid state image sensing element and manufacture thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03238863A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001060679A (en) * | 1999-06-28 | 2001-03-06 | Hyundai Electronics Ind Co Ltd | Semiconductor image sensor containing optical layer |
| GB2387967A (en) * | 2002-02-05 | 2003-10-29 | Sharp Kk | Semiconductor device intralayer lens |
| US7476833B2 (en) | 2004-02-03 | 2009-01-13 | Panasonic Corporation | Solid-state imaging device, method for manufacturing the same, and camera using the same |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001060679A (en) * | 1999-06-28 | 2001-03-06 | Hyundai Electronics Ind Co Ltd | Semiconductor image sensor containing optical layer |
| GB2387967A (en) * | 2002-02-05 | 2003-10-29 | Sharp Kk | Semiconductor device intralayer lens |
| GB2387967B (en) * | 2002-02-05 | 2004-07-07 | Sharp Kk | Semiconductor device and method of manufacturing the same |
| US6903395B2 (en) | 2002-02-05 | 2005-06-07 | Sharp Kabushiki Kaisha | Semiconductor device including interlayer lens |
| US7476833B2 (en) | 2004-02-03 | 2009-01-13 | Panasonic Corporation | Solid-state imaging device, method for manufacturing the same, and camera using the same |
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