JPH03237619A - Production of magnetic disk medium - Google Patents
Production of magnetic disk mediumInfo
- Publication number
- JPH03237619A JPH03237619A JP3414390A JP3414390A JPH03237619A JP H03237619 A JPH03237619 A JP H03237619A JP 3414390 A JP3414390 A JP 3414390A JP 3414390 A JP3414390 A JP 3414390A JP H03237619 A JPH03237619 A JP H03237619A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic disk
- disk medium
- polishing
- protective film
- projections
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 238000005498 polishing Methods 0.000 claims abstract description 19
- 230000001681 protective effect Effects 0.000 claims abstract description 16
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 8
- 239000011737 fluorine Substances 0.000 claims abstract description 8
- 239000000314 lubricant Substances 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims abstract description 5
- 239000006061 abrasive grain Substances 0.000 abstract description 3
- 229920003002 synthetic resin Polymers 0.000 abstract description 3
- 239000000057 synthetic resin Substances 0.000 abstract description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 6
- 229910052681 coesite Inorganic materials 0.000 abstract 3
- 229910052906 cristobalite Inorganic materials 0.000 abstract 3
- 239000000377 silicon dioxide Substances 0.000 abstract 3
- 235000012239 silicon dioxide Nutrition 0.000 abstract 3
- 229910052682 stishovite Inorganic materials 0.000 abstract 3
- 229910052905 tridymite Inorganic materials 0.000 abstract 3
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 239000010702 perfluoropolyether Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気ディスク装置に用いられる磁気ディスク媒
体の製造方法に関し、特に５ｉ０２保護膜を有する磁気
ディスク媒体の表面仕上加工に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing a magnetic disk medium used in a magnetic disk device, and particularly to surface finishing of a magnetic disk medium having a 5i02 protective film.
従来、この種の磁気ディスク媒体の表面仕上加工法は、
磁気ディスク媒体を回転させながらその表面を特殊な磁
気ヘッド（通常、バーニッシュヘッド等と呼ぶ〉を用い
て摺動させ、Ｓ ｉ ０２保護膜の突起を切削除去させ
るか、若しくは、研磨テープを媒体表面に押し当て摺動
させることにより、突起を摩滅除去する方法が行われて
いた。Conventionally, the surface finishing method for this type of magnetic disk medium was
While rotating the magnetic disk medium, a special magnetic head (usually called a burnish head etc.) is used to slide the surface of the magnetic disk medium to cut and remove the protrusions on the S i 02 protective film, or a polishing tape is used to remove the protrusions on the S i 02 protective film. A method has been used in which the protrusions are abraded and removed by pressing the protrusions against the surface and sliding them.
上述した従来の磁気ディスク媒体表面の突起除去方法で
は、５ｉ０２保護膜を成膜後、スクラッチ等の損傷が発
生し易いという欠点がある。これは突起に磁気ヘッドあ
るいは研磨テープが接触して削り取られた切削粉の一部
が磁気ディスク媒体の表面を引きずられることにより損
傷を与えるものである。The above-described conventional method for removing protrusions on the surface of a magnetic disk medium has the disadvantage that damage such as scratches is likely to occur after the 5i02 protective film is formed. This occurs when the magnetic head or abrasive tape comes into contact with the protrusions, and some of the cutting powder scraped off is dragged along the surface of the magnetic disk medium, causing damage.
本発明の磁気ディスク媒体の製造方法は、基板上の磁性
膜表面に５ｉ０２からなる保護膜を成膜後、この保護膜
表面の突起を研磨手段を用いて仕上加工を行う。In the method of manufacturing a magnetic disk medium of the present invention, a protective film made of 5i02 is formed on the surface of a magnetic film on a substrate, and then the protrusions on the surface of the protective film are finished using a polishing means.
また、この研磨手段としてふっ素系潤滑剤を塗布、ある
いは含浸させた研磨テープを用いる。Further, as this polishing means, a polishing tape coated with or impregnated with a fluorine-based lubricant is used.
次に、本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.
第１図（ａ）は本発明の一実施例を示す部分断面図であ
る。FIG. 1(a) is a partial sectional view showing one embodiment of the present invention.
第１図（ｂ）は同図（ａ）のＡ部拡大図である。第１図
（ａ）及び同図（ｂ）において、磁気ディスク媒体１は
基板上にデータを記録する磁性膜（図示せず〉が成膜さ
れており、更に、その表面上には５ｉ０２からなる保護
膜３が成膜されている。そして、５ｉ０２からなる保護
膜３が成膜されている。そして、５ｉ０２保護膜３表面
の突起４を除去する際は、磁気ディスク媒体１を矢印の
方向に回転させながら、その表面に所定の時間研磨テー
プ２を押し付けて摩滅させる。この研磨テープ２の研磨
面は合成樹脂５中に研磨砥粒（例えば、Ａｌ２Ｏ３等〉
６を有し、且つ、表面にはふっ素系潤滑剤（例えば、パ
ーフルオロポリエーテル：ＰＦＰＥ等）７を塗布しであ
る。FIG. 1(b) is an enlarged view of section A in FIG. 1(a). In FIGS. 1(a) and 1(b), a magnetic disk medium 1 has a magnetic film (not shown) for recording data formed on a substrate, and furthermore, a magnetic film (not shown) made of 5i02 is formed on the surface of the magnetic disk medium 1. A protective film 3 is formed.A protective film 3 made of 5i02 is formed.When removing the projections 4 on the surface of the 5i02 protective film 3, move the magnetic disk medium 1 in the direction of the arrow. While rotating, the polishing tape 2 is pressed against the surface for a predetermined period of time to abrade it.The polishing surface of the polishing tape 2 has abrasive grains (for example, Al2O3, etc.) in the synthetic resin 5.
6, and a fluorine-based lubricant (for example, perfluoropolyether: PFPE, etc.) 7 is applied to the surface.
なお、このふっ素系潤滑剤７は予め研磨テープ２に含浸
させておいてもよい。Note that the polishing tape 2 may be impregnated with the fluorine-based lubricant 7 in advance.
以上説明したように本発明は、磁気ディスク媒体の表面
上の突起を研磨テープにより除去する際に、テープ表面
にふっ素系潤滑剤を塗布、あるいは、含浸した研磨テー
プを用いることにより、その潤滑効果で磁気ディスク媒
体表面にスクラッチ等の研磨損傷を与えることなく突起
を除去できる効果がある。As explained above, when removing protrusions on the surface of a magnetic disk medium with an abrasive tape, the lubrication effect can be improved by using an abrasive tape coated with or impregnated with a fluorine-based lubricant on the tape surface. This has the effect of removing protrusions without causing scratches or other abrasive damage to the surface of the magnetic disk medium.
第１図（ａ）は本発明の一実施例を示す部分断面図、第
１図（ｂ）は同図（、ａ）のＡ部拡大図である。
ｌ・・・磁気ディスク媒体、２・・・研磨テープ、３・
・・５ｉ０２保護膜、４・・・突起、５・・・合成樹脂
、６・・・研磨砥粒、７・・・ふっ素系潤滑剤。FIG. 1(a) is a partial sectional view showing one embodiment of the present invention, and FIG. 1(b) is an enlarged view of section A in FIG. 1(a). l...magnetic disk medium, 2...abrasive tape, 3.
...5i02 protective film, 4... protrusion, 5... synthetic resin, 6... abrasive grain, 7... fluorine-based lubricant.
Claims (1)
成膜後、前記保護膜表面の突起を研磨手段を用いて仕上
加工を行うことを特徴とする磁気ディスク媒体の製造方
法。 ２、前記研磨手段がふっ素系潤滑剤を塗布した研磨テー
プであることを特徴とする請求項１記載の磁気ディスク
媒体の製造方法。 ３、前記研磨手段がふっ素系潤滑剤を含浸させた研磨テ
ープであることを特徴とする請求項１記載の磁気ディス
ク媒体の製造方法。[Claims] 1. A magnetic disk medium characterized in that after a protective film made of SiO_2 is formed on the surface of a magnetic film on a substrate, the protrusions on the surface of the protective film are finished using a polishing means. Production method. 2. The method of manufacturing a magnetic disk medium according to claim 1, wherein the polishing means is a polishing tape coated with a fluorine-based lubricant. 3. The method of manufacturing a magnetic disk medium according to claim 1, wherein the polishing means is a polishing tape impregnated with a fluorine-based lubricant.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3414390A JPH03237619A (en) | 1990-02-14 | 1990-02-14 | Production of magnetic disk medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3414390A JPH03237619A (en) | 1990-02-14 | 1990-02-14 | Production of magnetic disk medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03237619A true JPH03237619A (en) | 1991-10-23 |
Family
ID=12405986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3414390A Pending JPH03237619A (en) | 1990-02-14 | 1990-02-14 | Production of magnetic disk medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03237619A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0738186U (en) * | 1992-11-16 | 1995-07-14 | 千代田株式会社 | Hard disk texturing material |
| JP2010012531A (en) * | 2008-07-01 | 2010-01-21 | Showa Denko Kk | Polishing tape, its manufacturing method and burnishing method of magnetic disk |
| JP2010012530A (en) * | 2008-07-01 | 2010-01-21 | Showa Denko Kk | Polishing tape, its manufacturing method and burnishing method |
| US8607425B2 (en) | 2011-03-04 | 2013-12-17 | HGST Netherlands B.V. | Method for lubed tape burnish for producing thin lube media |
-
1990
- 1990-02-14 JP JP3414390A patent/JPH03237619A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0738186U (en) * | 1992-11-16 | 1995-07-14 | 千代田株式会社 | Hard disk texturing material |
| JP2010012531A (en) * | 2008-07-01 | 2010-01-21 | Showa Denko Kk | Polishing tape, its manufacturing method and burnishing method of magnetic disk |
| JP2010012530A (en) * | 2008-07-01 | 2010-01-21 | Showa Denko Kk | Polishing tape, its manufacturing method and burnishing method |
| US8512100B2 (en) | 2008-07-01 | 2013-08-20 | Showa Denko K.K. | Abrasive tape, method for producing abrasive tape, and varnishing process |
| US8607425B2 (en) | 2011-03-04 | 2013-12-17 | HGST Netherlands B.V. | Method for lubed tape burnish for producing thin lube media |
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