JPH03234970A - Flange installing method of ultra-high vacuum container - Google Patents
Flange installing method of ultra-high vacuum containerInfo
- Publication number
- JPH03234970A JPH03234970A JP2645790A JP2645790A JPH03234970A JP H03234970 A JPH03234970 A JP H03234970A JP 2645790 A JP2645790 A JP 2645790A JP 2645790 A JP2645790 A JP 2645790A JP H03234970 A JPH03234970 A JP H03234970A
- Authority
- JP
- Japan
- Prior art keywords
- flange
- aluminum alloy
- layer
- copper
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 20
- 229910000838 Al alloy Inorganic materials 0.000 claims abstract description 46
- 229910052802 copper Inorganic materials 0.000 claims abstract description 37
- 239000010949 copper Substances 0.000 claims abstract description 37
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 36
- 239000000463 material Substances 0.000 claims abstract description 16
- 238000004880 explosion Methods 0.000 claims abstract description 10
- 239000007769 metal material Substances 0.000 claims abstract description 7
- 238000009434 installation Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 229910052782 aluminium Inorganic materials 0.000 abstract description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 5
- 238000003466 welding Methods 0.000 abstract description 5
- 238000010894 electron beam technology Methods 0.000 abstract description 2
- 239000000203 mixture Substances 0.000 abstract 1
- 230000007704 transition Effects 0.000 description 8
- 238000005253 cladding Methods 0.000 description 4
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 239000002360 explosive Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- SJKRCWUQJZIWQB-UHFFFAOYSA-N azane;chromium Chemical compound N.[Cr] SJKRCWUQJZIWQB-UHFFFAOYSA-N 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000003303 reheating Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Pressure Vessels And Lids Thereof (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は粒子加速器等のように超高真空を必要とする容
器において、容器本体に他の機器類との連結用のフラン
ジを取付けるためのフランジ取付方法に関するものであ
る。[Detailed Description of the Invention] [Field of Industrial Application] The present invention is a method for attaching a flange for connection to other equipment to the container body in a container that requires an ultra-high vacuum such as a particle accelerator. This relates to a flange mounting method.
従来、超高真空容器において、用途等に応じて、容器本
体とフランジとが異種の金属材料で形成される場合があ
る。BACKGROUND ART Conventionally, in an ultra-high vacuum container, the container body and the flange may be formed of different metal materials depending on the purpose and the like.
その一つの組合せとして、容器本体は熱伝導性、導電性
、耐熱性の良い銅（とくに無酸素銅）で形成し、他の機
器類との連結部分であるフランジは、相手方フランジと
気密状態で強固に連結できるように十分な強度および硬
度を有し、しかも放射化されに＜＜、放射化されても減
衰が早い硬質アルミニウム合金（通常はＡ２２１９また
はＡ３０８３）にて形成するという組合せが公知となっ
ている。As one combination, the container body is made of copper (especially oxygen-free copper), which has good thermal conductivity, electrical conductivity, and heat resistance, and the flange, which is the connection part with other equipment, is airtight with the other flange. A known combination is to have sufficient strength and hardness for a strong connection, and to be made of a hard aluminum alloy (usually A2219 or A3083) that decays quickly even when activated. It has become.
このような銅と硬質アルミニウム合金の組合せの場合、
これらを直接溶接すると、周知のように接合界面部に金
属間化合物が生成されるため安定した接合状態が得られ
ない。For such a combination of copper and hard aluminum alloy,
If these are directly welded, as is well known, intermetallic compounds are generated at the joint interface, making it impossible to obtain a stable joint state.
そこで従来、この銅製の容器本体に硬質アルミニウム合
金製のフランジを取付ける手段として、第４図に示すよ
うに、短管状の鋼部１と硬質アルミニウム合金部２とが
軸方向に接合された円筒状のトランジッションピース（
中間継手部材）３を製作し、このトランジッションピー
ス３の鋼部１を、容器本体４のポート部４ａに溶接結合
された短管状継手部５に、硬質アルミニウム合金部２を
、フランジ６に一体に設けられた短管状継手部７にそれ
ぞれ溶接結合する手段をとっている。Conventionally, as a means of attaching a hard aluminum alloy flange to this copper container body, as shown in FIG. transition piece (
An intermediate joint member) 3 is manufactured, and the steel part 1 of this transition piece 3 is integrated into the short tubular joint part 5 which is welded to the port part 4a of the container body 4, and the hard aluminum alloy part 2 is integrated into the flange 6. Means is taken to weld and connect each of the short tubular joints 7 provided therein.
なお、上記トランジッションピース３の製作方法として
は、圧延ロールクラッド法、拡散溶接クラッド法、それ
に爆着法が知られている。しかし、爆着法以外の方法で
は、加工時に高熱を発するため、硬質アルミニウム合金
部２の熱処理がこの再加熱によって無駄になってしまっ
たり、あるいは溶融してしまったりするという問題があ
る。このため、従来、このトランジッションピース３の
製作方法としては、高熱発生のおそれのない爆着法がと
られている。Incidentally, known methods for manufacturing the transition piece 3 include a rolling roll cladding method, a diffusion welding cladding method, and an explosion bonding method. However, methods other than the explosion bonding method generate high heat during processing, so there is a problem that the heat treatment of the hard aluminum alloy part 2 is wasted due to this reheating, or it may melt. For this reason, conventionally, the method of manufacturing this transition piece 3 has been an explosion bonding method that does not pose the risk of generating high heat.
ところが、この爆着法をとる場合、銅と硬質アルミニウ
ム合金はともに硬くて衝撃値が低いこと、元々冶金的に
相性が悪いこと等から、これらを直接爆着した場合に、
所謂なじみが悪くて界面の接合状態が悪くなり、界面か
らのリークを規定値以下に抑えるのが困難となる。However, when using this explosion bonding method, copper and hard aluminum alloy are both hard and have low impact values, and are inherently incompatible metallurgically.
This so-called poor conformity deteriorates the bonding state at the interface, making it difficult to suppress leakage from the interface to below a specified value.
また、トランジッションピース３を短管状に形成し、こ
れを同じく短管状の本体側およびフランジ側双方の継手
部５，７に溶接する方法をとっているため、容器本体４
からのフランジ５の突出寸法りが長くなる。このため、
フランジ突出方向に寸法上の制約を受ける場合に不利と
なるだけでなく、この容器に排気ポンプが連結される場
合に吸込み抵抗が大きくなる等の問題が生じていた。In addition, since the transition piece 3 is formed into a short tube shape and is welded to the joint portions 5 and 7 on both the main body side and the flange side, which are also short tubes, the container body 4
The protrusion dimension of the flange 5 from the flange becomes longer. For this reason,
Not only is this disadvantageous when there are dimensional restrictions in the flange projecting direction, but also problems such as increased suction resistance occur when an exhaust pump is connected to this container.
そこで本発明は、容器本体とフランジとの接合状態が良
く、シかも本体からのフランジの突出寸法が短くてすむ
超高真空容器のフランジ形成方法を提供するものである
。SUMMARY OF THE INVENTION Therefore, the present invention provides a method for forming a flange for an ultra-high vacuum container, in which the state of bonding between the container body and the flange is good, and the length of the flange protruding from the body can be shortened.
本発明は、銅製の容器本体に、硬質のアルミニウム合金
からなるフランジを取付ける方法であって、フランジ素
材としてのアルミニウム合金板と、銅板と、上記アルミ
ニウム合金と同系統でかつアルミニウム合金および銅と
比較して硬度が低くて衝撃値が高い金属材料からなる中
間板とを、爆着法により、中間板を中間層として厚み方
向に一体に接合して三層クラッド材を形成し、このクラ
・ソド材を加工して、フランジとしてのアルミニウム合
金層と中間層と銅層とからなるリング状部材を製作した
後、このリング状部材の銅層を容器本体に溶接結合する
ものである。The present invention is a method for attaching a flange made of a hard aluminum alloy to a copper container body, and the method uses an aluminum alloy plate as a flange material, a copper plate, and a comparison between aluminum alloy and copper, which are of the same type as the above-mentioned aluminum alloy. An intermediate plate made of a metal material with low hardness and high impact value is bonded together in the thickness direction using the explosion bonding method to form a three-layer clad material. After processing the material to produce a ring-shaped member consisting of an aluminum alloy layer as a flange, an intermediate layer, and a copper layer, the copper layer of this ring-shaped member is welded to the container body.
このように、直接には爆着接合性が悪い銅層と硬質アル
ミニウム合金層との間に、アルミニウム合金と同系統で
かつ両者と比較して硬度が低くて衝撃値が高い中間層を
介在させることにより、両者をこの中間層に対して確実
に爆着接合することができる。従って、容器本体とフラ
ンジとの接合性が良いものとなる。In this way, an intermediate layer that is similar to the aluminum alloy and has lower hardness and higher impact value than both is interposed between the copper layer and the hard aluminum alloy layer, which have poor explosive bonding properties. By doing so, both can be reliably bonded to this intermediate layer by explosion bonding. Therefore, the bondability between the container body and the flange is good.
また、三層構造のリング状部材のアルミニウム合金層を
そのままフランジとし、かつ、銅層を直接容器本体に取
付けるため、円筒状のトランジッションピースを容器本
体とフランジとに互いの短管状接手を介して結合する従
来方法と比較して、容器本体からのフランジの突出寸法
が短くてすむ。In addition, in order to use the aluminum alloy layer of the three-layered ring-shaped member as a flange and attach the copper layer directly to the container body, a cylindrical transition piece is attached to the container body and the flange through a short tubular joint. Compared to the conventional method of joining, the length of the flange protruding from the container body can be shortened.
本発明の実施例を第１図乃至第３図によって説明する。 Embodiments of the present invention will be described with reference to FIGS. 1 to 3.
第１図および第２図にフランジ取付状態を示している。Fig. 1 and Fig. 2 show the state in which the flange is attached.
両図において、１１は銅製の容器本体、１２はこの容器
本体１１のボート部１１ａに取付けられたリング状部材
である。In both figures, 11 is a copper container body, and 12 is a ring-shaped member attached to a boat portion 11a of this container body 11.
このリング状部材１２は、硬質アルミニウム合金（通常
はＡ２２１９等）からなるフランジとしての硬質アルミ
ニウム合金層１３と、容器本体１１と同材料からなる銅
層１４と、これら硬質アルミニウム合金層１３と銅層１
４と比較して硬度が低くて衝撃値が高い金属材料として
の純アルミニラムからなる中間層１５とを備えた三層構
造に構成され、銅層１４が、容器本体１１のボート部１
１ａに形成された取付座１１ｂに電子ビーム溶接によっ
て取付けられている。This ring-shaped member 12 includes a hard aluminum alloy layer 13 as a flange made of a hard aluminum alloy (usually A2219 etc.), a copper layer 14 made of the same material as the container body 11, and these hard aluminum alloy layers 13 and the copper layer. 1
The boat part 1 of the container body 11 has a three-layer structure including an intermediate layer 15 made of pure aluminum, which is a metal material having lower hardness and higher impact value than the boat part 1 of the container body 11.
It is attached to a mounting seat 11b formed in 1a by electron beam welding.
このように、リング状部材１２の銅層１４を直接容器本
体１１に取付け、硬質アルミニウム合金層１３をそのま
まフランジとしているため、円筒状のトランジッション
ピースを容器本体とフランジとに互いの短管状接手を介
して結合する従来方法と比較して、容器本体からのフラ
ンジの突出寸法ｌが遥かに短くてすむ。In this way, the copper layer 14 of the ring-shaped member 12 is attached directly to the container body 11, and the hard aluminum alloy layer 13 is used as the flange, so that the cylindrical transition piece is connected to the container body and the flange by connecting each other's short tubular joints. Compared to the conventional method in which the flange is connected through the container body, the protruding dimension l of the flange from the container body can be much shorter.
なお、第１／２図において、１６はリング状部材１２の
周方向複数個所に設けられたフランジ結合孔、１７はこ
のフランジ結合孔１６に対応して容器本体１１に設けら
れたねじ穴で、硬質アルミニウム合金層（フランジ）１
３と相手方フランジ１８とが、互いの間にメタルガスケ
ット（図示せず）を介在させた状態でこれらフランジ結
合孔１６およびねじ穴１７によりボルト結合される。In addition, in FIG. 1/2, reference numeral 16 indicates flange coupling holes provided at multiple locations in the circumferential direction of the ring-shaped member 12, and reference numeral 17 indicates screw holes provided in the container body 11 corresponding to the flange coupling holes 16. Hard aluminum alloy layer (flange) 1
3 and the other flange 18 are bolted together through the flange coupling hole 16 and the screw hole 17 with a metal gasket (not shown) interposed therebetween.
また、硬質アルミニウム合金層１３の表面１３ａには、
メタルガスケットに対する食込み強化のためのナイフェ
ツジ１３ｂが加工されるとともに、硬化・耐蝕処理とし
て窒化チタンまたは窒化クロム等のイオンブレーティン
グ処理が施されている。Moreover, on the surface 13a of the hard aluminum alloy layer 13,
A knife edge 13b is machined to strengthen the penetration into the metal gasket, and ion blating treatment with titanium nitride, chromium nitride, or the like is applied as a hardening/corrosion-resistant treatment.
このリング状部材１２の製作工程を第３図に示している
。The manufacturing process of this ring-shaped member 12 is shown in FIG.
まず、四角形の銅板１４′と中間板１５′とを互いの片
面で爆着接合した後、中間板１５′の反対側の面に同形
の硬質アルミニウム合金板１３′を同じく爆着接合する
ことにより、リング状部材１２の素材である三層クラッ
ド材１２′を形成する。First, a rectangular copper plate 14' and an intermediate plate 15' are bonded by explosion bonding on one side of each other, and then a hard aluminum alloy plate 13' of the same shape is bonded by explosion bonding to the opposite surface of the intermediate plate 15'. , a three-layer cladding material 12', which is the material of the ring-shaped member 12, is formed.
この爆着接合時において、硬い銅板１４′およびアルミ
ニウム合金板１３′が、柔かくて衝撃値の高い中間板１
５′に対して無理なく接合し、とくに高硬度のアルミニ
ウム合金板１３′の場合、中間板１５′が同系統の純ア
ルミニウムからなるため所謂冶金的な相性も良いことが
加わって良好な接合状態が得られる。このため、王者が
強固にかつ真空漏れのおそれのない高気密状態で接合さ
れる。During this explosive bonding, the hard copper plate 14' and the aluminum alloy plate 13' are connected to the soft intermediate plate 1 with a high impact value.
Particularly in the case of the high-hardness aluminum alloy plate 13', the intermediate plate 15' is made of pure aluminum of the same type, so the so-called metallurgical compatibility is good, resulting in a good bonding condition. is obtained. For this reason, the king is firmly joined in a highly airtight state with no fear of vacuum leakage.
すなわち、直接には爆着接合性が悪い銅板１４と硬質ア
ルミニウム合金板１３′とを、中間板１５′を介して間
接的に爆着接合することにょってこれらを確実に一体化
することができるものである。That is, it is possible to reliably integrate the copper plate 14 and the hard aluminum alloy plate 13', which have poor explosive bonding properties directly, by indirectly bonding them through the intermediate plate 15'. It is possible.
次に、このクラッド材１２′をリング状に加工し、フラ
ンジ結合孔１６を設け、硬質アルミニウム合金側のイオ
ンブレーティング処理等を施して、銅層１４と中間層１
５と硬質アルミニウム合金層１３からなるリング状部材
１２を製作するものである。Next, this clad material 12' is processed into a ring shape, a flange coupling hole 16 is provided, and the hard aluminum alloy side is subjected to ion-blating treatment, etc., and the copper layer 14 and the intermediate layer 1 are
5 and a hard aluminum alloy layer 13.
ところで、リング状部材１２の中間層１５は、上記実施
例であげた純アルミニウムのほか、これと同等の特性、
すなわち、フランジ材料である硬質アルミニウム合金と
同系統で、かつ、同アルミニウム合金および容器本体材
料である銅と比較して硬度が低く衝撃値が高い他の金属
材料（たとえば軟質アルミニウム合金）にて形成しても
よい。By the way, the intermediate layer 15 of the ring-shaped member 12 is not only made of pure aluminum mentioned in the above embodiment, but also made of materials having the same characteristics as that of pure aluminum.
In other words, it is made of another metal material (for example, a soft aluminum alloy) that is similar to the hard aluminum alloy that is the flange material and has lower hardness and higher impact value than the same aluminum alloy and the container body material copper. You may.
また、上記実施例では相手方フランジとメタルガスケッ
トを介して結合する所謂ガスケット方式をとるフランジ
を例示したが、本発明は、相手方フランジとの間にメタ
ルＯリングを介在させるＯリング方式をとるフランジの
場合にも適用しうることはいうまでもない。Further, in the above embodiment, a flange that uses a so-called gasket method that is connected to the other flange through a metal gasket is illustrated, but the present invention provides a flange that uses an O-ring method that interposes a metal O-ring between it and the other flange. Needless to say, it can be applied to any case.
上記のように本発明によるときは、容器本体が銅、フラ
ンジが硬質アルミニウム合金にてそれぞれ形成される超
高真空容器において、フランジとしての硬質アルミニウ
ム合金層と、銅層と、硬質アルミニウム合金と同系統で
かつ硬質アルミニウム合金および銅と比較して硬度が低
くて衝撃値が高い金属材料からなる中間層とからなる三
層構造のリング状部材を製作し、このリング状部材の銅
層を容器本体に溶接結合することにより、容器本体にフ
ランジを取付けるようにしたから、直接には爆着接合性
が悪い銅層と硬質アルミニウム合金層とを、互いの間に
介在させた中間層によって、真空漏れのない高気密状態
で確実に接合することができる。As described above, according to the present invention, in an ultra-high vacuum container in which the container body is made of copper and the flange is made of hard aluminum alloy, the hard aluminum alloy layer as the flange, the copper layer, and the hard aluminum alloy are the same. A ring-shaped member with a three-layer structure consisting of a hard aluminum alloy and an intermediate layer made of a metal material with lower hardness and higher impact value than copper is manufactured, and the copper layer of this ring-shaped member is attached to the container body. Since the flange is attached to the container body by welding the copper layer and the hard aluminum alloy layer, which have poor explosive bonding properties, the intermediate layer interposed between them prevents vacuum leakage. It is possible to reliably join in a highly airtight state without any
０
また、三層構造のリング状部材の硬質アルミニウム合金
層をそのままフランジとし、かつ、銅層を直接容器本体
に取付けるため、円筒状のトランジッションピースを容
器本体とフランジとの間に介在させる従来方法と比較し
て、容器本体からのフランジの突出寸法が短くてすむ。0 In addition, in order to use the hard aluminum alloy layer of the three-layered ring-shaped member as the flange and attach the copper layer directly to the container body, the conventional method involves interposing a cylindrical transition piece between the container body and the flange. Compared to this, the length of the flange protruding from the container body is short.
このため、フランジ突出方向に寸法上の制約を受ける場
合に有利となるだけでなく、容器に排気ポンプが連結さ
れる場合に吸込み抵抗を小さくすることができる。Therefore, this is not only advantageous when there are dimensional restrictions in the flange protrusion direction, but also makes it possible to reduce suction resistance when an exhaust pump is connected to the container.
第１図は本発明の実施例を示すフランジ取付状態の一部
断面側面図、第２図は同一部拡大断面図、第３図は同実
施例におけるリング状部材の製作工程を示す図、第４図
は従来例を示す断面図である。
１１・・・容器本体、１２・・・リング状部材、１３・
・・リング状部材の硬質アルミニウム合金層（フランジ
）、１４・・・同銅層、１５・・・同中間層、１２′・
・・リング状部材の素材としてのクラッド材、１３′・
・・同クラッド材を構成する硬質アルミニウム合金板、
１４′・・・同銅板、１５′・・・同中間板。
１
「°°ゞ臼
第
３
抄
第
しFig. 1 is a partially cross-sectional side view showing an embodiment of the present invention with a flange attached, Fig. 2 is an enlarged sectional view of the same part, and Fig. 3 is a diagram showing the manufacturing process of a ring-shaped member in the same embodiment. FIG. 4 is a sectional view showing a conventional example. 11... Container body, 12... Ring-shaped member, 13.
...Hard aluminum alloy layer (flange) of ring-shaped member, 14... Same copper layer, 15... Same intermediate layer, 12'...
...Clad material as a material for ring-shaped member, 13'.
・Hard aluminum alloy plate that makes up the cladding material,
14'... Same copper plate, 15'... Same intermediate plate. 1 “°°ゞゞ 3rd selection
Claims (1)
るフランジを取付ける方法であって、フランジ素材とし
てのアルミニウム合金板と、銅板と、上記アルミニウム
合金と同系統でかつアルミニウム合金および銅と比較し
て硬度が低くて衝撃値が高い金属材料からなる中間板と
を、爆着法により、中間板を中間層として厚み方向に一
体に接合して三層クラッド材を形成し、このクラッド材
を加工して、フランジとしてのアルミニウム合金層と中
間層と銅層とからなるリング状部材を製作した後、この
リング状部材の銅層を容器本体に溶接結合することを特
徴とする超高真空容器のフランジ取付方法。1. A method of attaching a flange made of a hard aluminum alloy to a copper container body, using an aluminum alloy plate as the flange material, a copper plate, the same type as the above aluminum alloy, and compared with aluminum alloy and copper. An intermediate plate made of a metal material with low hardness and high impact value is integrally joined in the thickness direction with the intermediate plate as an intermediate layer using an explosion bonding method, and this clad material is processed. A flange for an ultra-high vacuum container, characterized in that a ring-shaped member consisting of an aluminum alloy layer, an intermediate layer, and a copper layer is manufactured as a flange, and then the copper layer of this ring-shaped member is welded to the container body. Installation method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2645790A JPH03234970A (en) | 1990-02-05 | 1990-02-05 | Flange installing method of ultra-high vacuum container |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2645790A JPH03234970A (en) | 1990-02-05 | 1990-02-05 | Flange installing method of ultra-high vacuum container |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03234970A true JPH03234970A (en) | 1991-10-18 |
Family
ID=12194038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2645790A Pending JPH03234970A (en) | 1990-02-05 | 1990-02-05 | Flange installing method of ultra-high vacuum container |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03234970A (en) |
-
1990
- 1990-02-05 JP JP2645790A patent/JPH03234970A/en active Pending
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