JPH0320158U - - Google Patents

Info

Publication number

JPH0320158U

JPH0320158U JP7952689U JP7952689U JPH0320158U JP H0320158 U JPH0320158 U JP H0320158U JP 7952689 U JP7952689 U JP 7952689U JP 7952689 U JP7952689 U JP 7952689U JP H0320158 U JPH0320158 U JP H0320158U

Authority

JP

Japan

Prior art keywords

insulating film

protrusions

thermal head

substrate

polycrystalline silicon

Prior art date

1989-07-07

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010438 heat treatment Methods 0.000 claims description 4
• 239000000758 substrate Substances 0.000 claims description 3
• 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 2
• 238000007740 vapor deposition Methods 0.000 claims 1
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1

Cited By (1)