JPH0316655U - - Google Patents

Info

Publication number

JPH0316655U

JPH0316655U JP7842089U JP7842089U JPH0316655U JP H0316655 U JPH0316655 U JP H0316655U JP 7842089 U JP7842089 U JP 7842089U JP 7842089 U JP7842089 U JP 7842089U JP H0316655 U JPH0316655 U JP H0316655U

Authority

JP

Japan

Prior art keywords

sample

ion beam

ion

partition plate

hole

Prior art date

1989-07-03

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005192 partition Methods 0.000 claims description 4
• 238000000992 sputter etching Methods 0.000 claims description 4
• 239000000428 dust Substances 0.000 claims description 3
• 238000010884 ion-beam technique Methods 0.000 claims 4
• 238000005530 etching Methods 0.000 claims 1