JPH0316323U - - Google Patents

Info

Publication number
JPH0316323U
JPH0316323U JP7490489U JP7490489U JPH0316323U JP H0316323 U JPH0316323 U JP H0316323U JP 7490489 U JP7490489 U JP 7490489U JP 7490489 U JP7490489 U JP 7490489U JP H0316323 U JPH0316323 U JP H0316323U
Authority
JP
Japan
Prior art keywords
reticle
retake
conveying device
case
storage stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7490489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7490489U priority Critical patent/JPH0316323U/ja
Publication of JPH0316323U publication Critical patent/JPH0316323U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
JP7490489U 1989-06-28 1989-06-28 Pending JPH0316323U (US07655688-20100202-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7490489U JPH0316323U (US07655688-20100202-C00086.png) 1989-06-28 1989-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7490489U JPH0316323U (US07655688-20100202-C00086.png) 1989-06-28 1989-06-28

Publications (1)

Publication Number Publication Date
JPH0316323U true JPH0316323U (US07655688-20100202-C00086.png) 1991-02-19

Family

ID=31615011

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7490489U Pending JPH0316323U (US07655688-20100202-C00086.png) 1989-06-28 1989-06-28

Country Status (1)

Country Link
JP (1) JPH0316323U (US07655688-20100202-C00086.png)

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