JPH03162561A - Film formation to plastic substrate - Google Patents

Film formation to plastic substrate

Info

Publication number
JPH03162561A
JPH03162561A JP30058389A JP30058389A JPH03162561A JP H03162561 A JPH03162561 A JP H03162561A JP 30058389 A JP30058389 A JP 30058389A JP 30058389 A JP30058389 A JP 30058389A JP H03162561 A JPH03162561 A JP H03162561A
Authority
JP
Japan
Prior art keywords
vapor deposition
substrates
surfaces
before
above
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30058389A
Inventor
Nobuaki Mitamura
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP30058389A priority Critical patent/JPH03162561A/en
Publication of JPH03162561A publication Critical patent/JPH03162561A/en
Application status is Pending legal-status Critical

Links

Abstract

PURPOSE: To form thin films having an adhesive property and durability and good performance by executing vacuum vapor deposition on plastic substrates and irradiating the surfaces of the above-mentioned substrates with UV rays before the vapor deposition or before and during the vapor deposition.
CONSTITUTION: A material 2 for vapor deposition disposed in the lower part in a vacuum vapor deposition chamber 1 is evaporated by an electron gun 3. The generated vapor is deposited on the plastic substrates 5 which are made of acrylic resin, etc., and are mounted on a rotary dome 4 disposed in the upper part to form the thin film. The surfaces of the above-mentioned substrates 5 are irradiated with the UV rays from a UV ray source 6 before the vapor deposition or before and during the vapor deposition, then the vapor deposition is executed in the method for forming the films on the plastic substrates 5 by the above-mentioned vacuum vapor deposition method. A low-pressure mercury lamp, microwave discharge lamp, xenon short arc lamp, etc., are adequate as the above-mentioned light source 6. The irradiation with the UV rays may be executed while gaseous oxygen is introduced into the vacuum chamber 1 under ≤1×10-6Torr partial pressure. The contaminating impurities on the surfaces of the substrates 5 are removed in this way and the surfaces are activated. The film formation with good quality is thus executed.
COPYRIGHT: (C)1991,JPO&Japio
JP30058389A 1989-11-17 1989-11-17 Film formation to plastic substrate Pending JPH03162561A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30058389A JPH03162561A (en) 1989-11-17 1989-11-17 Film formation to plastic substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30058389A JPH03162561A (en) 1989-11-17 1989-11-17 Film formation to plastic substrate

Publications (1)

Publication Number Publication Date
JPH03162561A true JPH03162561A (en) 1991-07-12

Family

ID=17886590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30058389A Pending JPH03162561A (en) 1989-11-17 1989-11-17 Film formation to plastic substrate

Country Status (1)

Country Link
JP (1) JPH03162561A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100895876B1 (en) * 2001-02-08 2009-05-04 가부시키가이샤 한도오따이 에네루기 켄큐쇼 Film formation apparatus for manufacturing a light emitting element
JP2017011010A (en) * 2015-06-18 2017-01-12 ウシオ電機株式会社 Method for manufacturing wiring board, wiring board, and wiring board manufacturing apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100895876B1 (en) * 2001-02-08 2009-05-04 가부시키가이샤 한도오따이 에네루기 켄큐쇼 Film formation apparatus for manufacturing a light emitting element
US7629025B2 (en) 2001-02-08 2009-12-08 Semiconductor Energy Laboratory Co., Ltd. Film formation apparatus and film formation method
JP2017011010A (en) * 2015-06-18 2017-01-12 ウシオ電機株式会社 Method for manufacturing wiring board, wiring board, and wiring board manufacturing apparatus

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