JPH0314144U - - Google Patents

Info

Publication number

JPH0314144U

JPH0314144U JP7480189U JP7480189U JPH0314144U JP H0314144 U JPH0314144 U JP H0314144U JP 7480189 U JP7480189 U JP 7480189U JP 7480189 U JP7480189 U JP 7480189U JP H0314144 U JPH0314144 U JP H0314144U

Authority

JP

Japan

Prior art keywords

chamber body

chamber

workpiece

compressed air

cooling passage

Prior art date

1989-06-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
• 229910052782 aluminium Inorganic materials 0.000 claims description 3
• 238000001816 cooling Methods 0.000 claims description 3
• 238000000034 method Methods 0.000 claims 1
• 238000013021 overheating Methods 0.000 claims 1

Cited By (1)