JPH03128942U - - Google Patents

Info

Publication number
JPH03128942U
JPH03128942U JP3734490U JP3734490U JPH03128942U JP H03128942 U JPH03128942 U JP H03128942U JP 3734490 U JP3734490 U JP 3734490U JP 3734490 U JP3734490 U JP 3734490U JP H03128942 U JPH03128942 U JP H03128942U
Authority
JP
Japan
Prior art keywords
vacuum tweezers
connecting part
joint
wafer suction
bent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3734490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3734490U priority Critical patent/JPH03128942U/ja
Publication of JPH03128942U publication Critical patent/JPH03128942U/ja
Pending legal-status Critical Current

Links

JP3734490U 1990-04-09 1990-04-09 Pending JPH03128942U (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3734490U JPH03128942U (US06826419-20041130-M00005.png) 1990-04-09 1990-04-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3734490U JPH03128942U (US06826419-20041130-M00005.png) 1990-04-09 1990-04-09

Publications (1)

Publication Number Publication Date
JPH03128942U true JPH03128942U (US06826419-20041130-M00005.png) 1991-12-25

Family

ID=31544368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3734490U Pending JPH03128942U (US06826419-20041130-M00005.png) 1990-04-09 1990-04-09

Country Status (1)

Country Link
JP (1) JPH03128942U (US06826419-20041130-M00005.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100308784B1 (ko) * 1998-10-30 2001-12-17 곽정소 웨이퍼의 진공 흡착기

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100308784B1 (ko) * 1998-10-30 2001-12-17 곽정소 웨이퍼의 진공 흡착기

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