JPH0312442U - - Google Patents

Info

Publication number

JPH0312442U

JPH0312442U JP7394689U JP7394689U JPH0312442U JP H0312442 U JPH0312442 U JP H0312442U JP 7394689 U JP7394689 U JP 7394689U JP 7394689 U JP7394689 U JP 7394689U JP H0312442 U JPH0312442 U JP H0312442U

Authority

JP

Japan

Prior art keywords

boron

bpsg film

film

semiconductor device

aluminum wiring

Prior art date

1989-06-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 9
• 229910052796 boron Inorganic materials 0.000 claims description 9
• 239000005380 borophosphosilicate glass Substances 0.000 claims description 9
• 239000004065 semiconductor Substances 0.000 claims description 4
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
• 229910052782 aluminium Inorganic materials 0.000 claims description 3
• 239000011229 interlayer Substances 0.000 claims description 2
• 238000010586 diagram Methods 0.000 description 3
• 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
• 229920005591 polysilicon Polymers 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1

Cited By (1)