JPH03115660U - - Google Patents
Info
- Publication number
- JPH03115660U JPH03115660U JP2305190U JP2305190U JPH03115660U JP H03115660 U JPH03115660 U JP H03115660U JP 2305190 U JP2305190 U JP 2305190U JP 2305190 U JP2305190 U JP 2305190U JP H03115660 U JPH03115660 U JP H03115660U
- Authority
- JP
- Japan
- Prior art keywords
- target
- film
- sputtering
- magnet
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 230000004907 flux Effects 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2305190U JPH03115660U (cs) | 1990-03-07 | 1990-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2305190U JPH03115660U (cs) | 1990-03-07 | 1990-03-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03115660U true JPH03115660U (cs) | 1991-11-29 |
Family
ID=31526050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2305190U Pending JPH03115660U (cs) | 1990-03-07 | 1990-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03115660U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101531409B1 (ko) * | 2013-11-20 | 2015-06-24 | 함덕성 | 식품용 실리콘 종이 포장용기 |
-
1990
- 1990-03-07 JP JP2305190U patent/JPH03115660U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101531409B1 (ko) * | 2013-11-20 | 2015-06-24 | 함덕성 | 식품용 실리콘 종이 포장용기 |