JPH03115260U - - Google Patents

Info

Publication number
JPH03115260U
JPH03115260U JP2374790U JP2374790U JPH03115260U JP H03115260 U JPH03115260 U JP H03115260U JP 2374790 U JP2374790 U JP 2374790U JP 2374790 U JP2374790 U JP 2374790U JP H03115260 U JPH03115260 U JP H03115260U
Authority
JP
Japan
Prior art keywords
vacuum processing
valve
variable conductance
conductance valve
butterfly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2374790U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2374790U priority Critical patent/JPH03115260U/ja
Publication of JPH03115260U publication Critical patent/JPH03115260U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Lift Valve (AREA)
JP2374790U 1990-03-12 1990-03-12 Pending JPH03115260U (US06252093-20010626-C00008.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2374790U JPH03115260U (US06252093-20010626-C00008.png) 1990-03-12 1990-03-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2374790U JPH03115260U (US06252093-20010626-C00008.png) 1990-03-12 1990-03-12

Publications (1)

Publication Number Publication Date
JPH03115260U true JPH03115260U (US06252093-20010626-C00008.png) 1991-11-28

Family

ID=31526730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2374790U Pending JPH03115260U (US06252093-20010626-C00008.png) 1990-03-12 1990-03-12

Country Status (1)

Country Link
JP (1) JPH03115260U (US06252093-20010626-C00008.png)

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