JPH03114600U - - Google Patents

Info

Publication number

JPH03114600U

JPH03114600U JP2288490U JP2288490U JPH03114600U JP H03114600 U JPH03114600 U JP H03114600U JP 2288490 U JP2288490 U JP 2288490U JP 2288490 U JP2288490 U JP 2288490U JP H03114600 U JPH03114600 U JP H03114600U

Authority

JP

Japan

Prior art keywords

air

diffusion pump

input pipe

introduces

cooling body

Prior art date

1990-03-06

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000009792 diffusion process Methods 0.000 claims description 4
• 238000001816 cooling Methods 0.000 claims description 3
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
• 238000010926 purge Methods 0.000 claims 2
• 239000000498 cooling water Substances 0.000 claims 1
• 230000005856 abnormality Effects 0.000 description 1
• 238000001514 detection method Methods 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1