JPH03111804U - - Google Patents

Info

Publication number

JPH03111804U

JPH03111804U JP1844890U JP1844890U JPH03111804U JP H03111804 U JPH03111804 U JP H03111804U JP 1844890 U JP1844890 U JP 1844890U JP 1844890 U JP1844890 U JP 1844890U JP H03111804 U JPH03111804 U JP H03111804U

Authority

JP

Japan

Prior art keywords

heater

storage chamber

ceramic

rod

mixture

Prior art date

1990-02-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000000919 ceramic Substances 0.000 claims description 10
• 238000010438 heat treatment Methods 0.000 claims description 3
• 238000005192 partition Methods 0.000 claims description 2
• 239000000203 mixture Substances 0.000 claims 2
• 150000001639 boron compounds Chemical class 0.000 claims 1
• 238000005485 electric heating Methods 0.000 claims 1
• CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 claims 1
• 229910052982 molybdenum disulfide Inorganic materials 0.000 claims 1
• HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
• 229910010271 silicon carbide Inorganic materials 0.000 claims 1
• 150000003609 titanium compounds Chemical class 0.000 claims 1