JPH03111563U - - Google Patents

Info

Publication number
JPH03111563U
JPH03111563U JP1946890U JP1946890U JPH03111563U JP H03111563 U JPH03111563 U JP H03111563U JP 1946890 U JP1946890 U JP 1946890U JP 1946890 U JP1946890 U JP 1946890U JP H03111563 U JPH03111563 U JP H03111563U
Authority
JP
Japan
Prior art keywords
processing apparatus
sample stage
chamber
plasma processing
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1946890U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0640590Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1946890U priority Critical patent/JPH0640590Y2/ja
Publication of JPH03111563U publication Critical patent/JPH03111563U/ja
Application granted granted Critical
Publication of JPH0640590Y2 publication Critical patent/JPH0640590Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP1946890U 1990-03-01 1990-03-01 プラズマ処理装置 Expired - Lifetime JPH0640590Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1946890U JPH0640590Y2 (ja) 1990-03-01 1990-03-01 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1946890U JPH0640590Y2 (ja) 1990-03-01 1990-03-01 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPH03111563U true JPH03111563U (US07923587-20110412-C00022.png) 1991-11-14
JPH0640590Y2 JPH0640590Y2 (ja) 1994-10-26

Family

ID=31522584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1946890U Expired - Lifetime JPH0640590Y2 (ja) 1990-03-01 1990-03-01 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPH0640590Y2 (US07923587-20110412-C00022.png)

Also Published As

Publication number Publication date
JPH0640590Y2 (ja) 1994-10-26

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