JPH0311050U - - Google Patents

Info

Publication number

JPH0311050U

JPH0311050U JP7212789U JP7212789U JPH0311050U JP H0311050 U JPH0311050 U JP H0311050U JP 7212789 U JP7212789 U JP 7212789U JP 7212789 U JP7212789 U JP 7212789U JP H0311050 U JPH0311050 U JP H0311050U

Authority

JP

Japan

Prior art keywords

spacers

heating furnace

spacer

support shaft

fixed

Prior art date

1989-06-20

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 125000006850 spacer group Chemical group 0.000 claims description 8
• 238000010438 heat treatment Methods 0.000 claims description 6
• 229910052581 Si3N4 Inorganic materials 0.000 claims 2
• 238000009413 insulation Methods 0.000 claims 2
• HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 2
• HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
• 229910010271 silicon carbide Inorganic materials 0.000 claims 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
• 229910000831 Steel Inorganic materials 0.000 description 1
• 239000010959 steel Substances 0.000 description 1

Cited By (2)