JPH03110442U - - Google Patents

Info

Publication number
JPH03110442U
JPH03110442U JP10092889U JP10092889U JPH03110442U JP H03110442 U JPH03110442 U JP H03110442U JP 10092889 U JP10092889 U JP 10092889U JP 10092889 U JP10092889 U JP 10092889U JP H03110442 U JPH03110442 U JP H03110442U
Authority
JP
Japan
Prior art keywords
reticle cassette
lid
cleaning basket
cleaning
cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10092889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10092889U priority Critical patent/JPH03110442U/ja
Publication of JPH03110442U publication Critical patent/JPH03110442U/ja
Pending legal-status Critical Current

Links

JP10092889U 1989-08-29 1989-08-29 Pending JPH03110442U (US06521211-20030218-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10092889U JPH03110442U (US06521211-20030218-C00004.png) 1989-08-29 1989-08-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10092889U JPH03110442U (US06521211-20030218-C00004.png) 1989-08-29 1989-08-29

Publications (1)

Publication Number Publication Date
JPH03110442U true JPH03110442U (US06521211-20030218-C00004.png) 1991-11-13

Family

ID=31649905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10092889U Pending JPH03110442U (US06521211-20030218-C00004.png) 1989-08-29 1989-08-29

Country Status (1)

Country Link
JP (1) JPH03110442U (US06521211-20030218-C00004.png)

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