JPH03107727A - Mass flowmeter - Google Patents
Mass flowmeterInfo
- Publication number
- JPH03107727A JPH03107727A JP24437089A JP24437089A JPH03107727A JP H03107727 A JPH03107727 A JP H03107727A JP 24437089 A JP24437089 A JP 24437089A JP 24437089 A JP24437089 A JP 24437089A JP H03107727 A JPH03107727 A JP H03107727A
- Authority
- JP
- Japan
- Prior art keywords
- output
- difference signal
- pickups
- sensor tube
- pickup
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 230000005284 excitation Effects 0.000 claims description 4
- 230000010363 phase shift Effects 0.000 claims description 3
- 230000009021 linear effect Effects 0.000 abstract description 8
- 238000005259 measurement Methods 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 6
- 239000012530 fluid Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 2
- 235000001270 Allium sibiricum Nutrition 0.000 description 1
- 235000006693 Cassia laevigata Nutrition 0.000 description 1
- 241000735631 Senna pendula Species 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003670 easy-to-clean Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229940124513 senna glycoside Drugs 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は質量１ ｆｆｉ ３１に係り、特に直線状のセ
ンサチューブを有する質量流量計に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to mass 1 ffi 31, and in particular to mass flow meters with a straight sensor tube.
従来の技術
従来、質ｆｆｉ流量計として、０字状のセンサチューブ
を並列に配した構成のもの（特開昭５９−９２３１４号
）及び、直線状のセンザチｌ−ブを並列に配した構成の
もの（特開昭６１−２２３６１６号）がある。Conventional technology Conventionally, quality FFI flowmeters have been used, including one with a configuration in which 0-shaped sensor tubes are arranged in parallel (Japanese Patent Laid-Open No. 59-92314), and one in which linear sensor tubes are arranged in parallel. There is one (Japanese Unexamined Patent Publication No. 61-223616).
発明が解決しようとする課題
ＩｙＪ名においては、０字状のセンザチｌ−ブを使用す
るため、以下の課題があった。Problems to be Solved by the Invention In the IyJ name, since a zero-shaped senzatibe is used, the following problems arise.
■圧力損失が大きい、 ■流体中の異物が曲り部に付着し易い。■Large pressure loss, ■Foreign objects in the fluid tend to adhere to curved parts.
付着物が多くなると、センサ′ｆ−１−ブの特性が変化
する。曲管であるため、付着物のＷＩ除がむずかしい。When the amount of deposits increases, the characteristics of the sensor 'f-1-b' change. Since it is a curved pipe, it is difficult to remove deposits from WI.
■液だまり、空気だまりが生ずることがある。■Liquid pools and air pockets may occur.
後者においては、上記■、■、■の課題は殆ど解決され
る。しかし、各センサチューブを流れる流体の流量が本
管を流れる流量の１／２となるため、発生する」リオリ
も１／２となり、質量流量に比例する信号のＳ／Ｎ比が
低い。In the latter case, most of the above-mentioned problems (1), (2), and (3) are solved. However, since the flow rate of the fluid flowing through each sensor tube is 1/2 of the flow rate flowing through the main pipe, the "reliability" that occurs is also 1/2, and the S/N ratio of the signal proportional to the mass flow rate is low.
そこで、本発明は上記課題を解決した質量流量計を提供
することを目的とする。Therefore, an object of the present invention is to provide a mass flowmeter that solves the above problems.
課題を解決するための手段
本発明は、実ｎ上同−長さを有し、両端を支持されて一
直線に整列された直線状の第１．第２のセンサナ１−フ
部と、
該第１．第２のセンケチｌ−１部を、１８０度位相をｆ
らして励振させる手段と、
該第１．第２のセンサチューブ部の流入側の対応する部
位の変位を検出する一対の流入側ピックアップと、
該第１．第２のセンサチューブ部の流出側の対応する部
位の変位を検出する一対の流出側ピックアップと、
該一対の流入側ピックアップの出力差信号を得る第１の
出力差信号形成回路と、
法一対の流出側ピックアップの出力差信号を（する第２
の出力差信号形成回路と、
該第１．第２の出力差信号形成回路の出力差信号の位相
を比較して質量流量に比例した位相差信号を出力する位
相比較回路とより構成してなる。Means for Solving the Problems The present invention provides linear first . a second sensor antenna 1-f part; The second Senkechi l-1 part, the 180 degree phase is f
means for exciting the first. a pair of inflow side pickups for detecting displacement of corresponding portions on the inflow side of the second sensor tube section; a pair of outflow side pickups that detect displacement of corresponding parts on the outflow side of the second sensor tube section; a first output difference signal forming circuit that obtains an output difference signal of the pair of inflow side pickups; The output difference signal of the outflow side pickup (second
an output difference signal forming circuit of the first. It is constituted by a phase comparison circuit that compares the phases of the output difference signals of the second output difference signal forming circuit and outputs a phase difference signal proportional to the mass flow rate.
作用
共に直線状の第１．第２のセンサナ１−フ部が一直線に
整列しているため、従来の・一対の曲線状のもの、直線
状の分岐型のものに比べて、各セン％１チｌ−ブ部に流
れる質量流量が人となり、これにより、発生するコリオ
リカが人となって、流子＋ｉ１測のＳ／Ｎ比が向上する
。The first one has a linear action. Since the second sensa na 1-fu section is aligned in a straight line, the mass flowing through each cen % 1 chive section is greater than the conventional one with a pair of curved lines or the linear branch type. The flow rate becomes human, thereby the generated Coriolis becomes human, and the S/N ratio of the flow +i1 measurement improves.
また、圧力損失も低減し、異物の付着も少なくなり、液
だまり、空気だまりも生じない。In addition, pressure loss is reduced, there is less adhesion of foreign matter, and no liquid or air pockets occur.
また流入側のピックアップの出力同士の差信号、流出側
のピックアップの出力同士の差信号を形成しているため
、流量計測値には外部振動の影響が表われない。Furthermore, since a difference signal between the outputs of the pickups on the inflow side and a difference signal between the outputs of the pickups on the outflow side are formed, the influence of external vibration does not appear on the flow rate measurement value.
実施例
第１図は、本発明の一実施例になる質量流量計１を示す
。Embodiment FIG. 1 shows a mass flowmeter 1 according to an embodiment of the present invention.
同図中、２は−のセンケチ１−ブであり、第２図にＯｆ
せて示すようにベース３上の固定部３ａ。In the same figure, 2 is the -senkechi 1-bu, and in Figure 2 Of
As shown in the figure, the fixed part 3a on the base 3.
３ｂ、３ｃに固定されて直線状に且つ水平に支持されて
いる。It is fixed to 3b and 3c and supported linearly and horizontally.
これにより、質量流量ｈ１本体１ａは、両端を固定部３
ａと３ｂとにより固定された直線状の第１のセンサチュ
ーブ部４と、両端を固定部３ｂと３Ｃとにより固定され
た直線状の第２のセンサチューブ部５とよりなる。As a result, the mass flow rate h1 main body 1a has both ends connected to the fixed portion 3.
It consists of a linear first sensor tube part 4 fixed by fixing parts 3b and 3b, and a linear second sensor tube part 5 fixed at both ends by fixing parts 3b and 3C.
第１．第２のセンサチューブ４．５は等しい長さＬであ
り、−直線に整ダ１している。1st. The second sensor tube 4.5 is of equal length L and is aligned in a straight line.
６は流入側、７は流出側である。6 is the inflow side, and 7 is the outflow side.
１０．１１は電磁ソレノイドと同様な構成の加ｆｊｌｆ
ｆｉであり、各センケチｌ−１部４．５の中央に設けで
ある。10.11 is an addition fjlf with the same configuration as an electromagnetic solenoid.
fi, and is provided at the center of each center part 4.5.
１２．１３．１４．１５は夫々マグネット片とコイル部
とよりなるピックアップであり、第１゜′；ｊｉ２のセ
ンケチｌ−１部４，５の流入側の対応する部位と、流出
側の対応する部位とに設けである。12.13.14.15 are pickups each consisting of a magnet piece and a coil part. It is provided in each part.
１６は励振回路、１７は位相反転回路であり、これらと
加振器１０，１１とが励振手段１８を構成する。16 is an excitation circuit, 17 is a phase inversion circuit, and these and the exciters 10 and 11 constitute excitation means 18.
２０は差動増幅器であり、共に流入側にあるピックアッ
プ１２及び１３の出力が接続しである。20 is a differential amplifier, to which the outputs of pickups 12 and 13, both on the inflow side, are connected.
これらが第１の出力差信号形成回路２１を構成し、ピッ
クアップ１２．１３の出力差信号を形成する。These constitute the first output difference signal forming circuit 21 and form the output difference signals of the pickups 12 and 13.
２２は差動増幅器であり、共に流出側にあるピックアッ
プ１４．１５の出力が接続しである。これらが、第２の
出力差信号形成回路２３を構成し、ピックアップ１４．
１５の出力差信号を形成する。22 is a differential amplifier, to which the outputs of pickups 14 and 15, both located on the outflow side, are connected. These constitute the second output difference signal forming circuit 23, and the pickup 14.
15 output difference signals are formed.
２４は位相比較回路であり、差動増Ｇ器２０゜２２の出
力信号の位相比較して、質３流邸に比例した位相差信号
を出力する。A phase comparison circuit 24 compares the phases of the output signals of the differential amplifiers 20 and 22 and outputs a phase difference signal proportional to the quality.
２５は処理回路であり、上記の位相差信号を整形、増幅
、時間積分し、質ｍ流ｍに応じたパルス信号を形成する
。これが端Ｆ２６より出力される。25 is a processing circuit which shapes, amplifies and time-integrates the above phase difference signal to form a pulse signal corresponding to quality m and flow m. This is output from end F26.
次に上記構成の質ｍ流量計１の動作について説明する。Next, the operation of the flowmeter 1 having the above configuration will be explained.
励振回路１６よりの出力が、加振器１０には直接、加振
器１１には位相反転回路１７を介して加えられ、第１．
第２のセンケチ１−１部４．５が第３図、第４図に二点
鎖線で示すように、１８０度位相がずれた状態で振動す
る。The output from the excitation circuit 16 is applied directly to the exciter 10 and to the exciter 11 via the phase inversion circuit 17.
The second sensor 1-1 section 4.5 vibrates with a phase shift of 180 degrees, as shown by two-dot chain lines in FIGS. 3 and 4.
流体が振動しているセンサチューブ２内を矢印２７で示
すように流れると、コリオリの力が発生する。第１．第
２のセンケチｌ−１部４，５においては、チｌ−ブの振
動が流入側では正の加速度であり、流出側では負の加速
度であるため、流体が流れたことにより発生するコリオ
リカは、第３図及び第４図に示すように、流出側が進み
、流入側が遅れるように働く。When fluid flows in the vibrating sensor tube 2 as shown by arrow 27, a Coriolis force is generated. 1st. In the second Senkechi l-1 parts 4 and 5, the vibration of the tube has a positive acceleration on the inflow side and a negative acceleration on the outflow side, so the Coriolis generated by the flow of fluid is , as shown in FIGS. 3 and 4, the outflow side advances and the inflow side lags behind.
第１のセンナナ１−１部４の流入側のピックアップ１２
の出力は、第５図中符１１２ａで示す如くになり、流出
側のピックアップ１４の出力は同図中符号１４ａで示す
如くになる。Pickup 12 on the inflow side of the first Senana 1-1 section 4
The output of the pickup 14 on the outflow side is as indicated by the reference numeral 112a in FIG. 5, and the output of the pickup 14 on the outflow side is indicated by the reference numeral 14a in the figure.
第２のセンケチ１−１部５の流入側のピックアップ１３
の出力は、第６図中符号１３ａで示す如くになり、流出
側のピックアップ１５の出力は同図中符号１５ａで示す
如くになる。Pickup 13 on the inflow side of second sensor 1-1 section 5
The output of the pickup 15 on the outflow side is as shown by the reference numeral 13a in FIG. 6, and the output of the pickup 15 on the outflow side is shown by the reference numeral 15a in the same figure.
共に流入側の出力の位相が流出側の出力よりφだけ遅れ
ている。In both cases, the phase of the output on the inflow side lags the output on the outflow side by φ.
第１．第２のセンサチューブ部４．５の流入側のピック
アップ１２．１３のうち、−のピックアップ１２の出力
１２ａは差動増幅器２０の非反転入力端ｆに加えられ、
別のピックアップ１３の出力１３ａは差動増幅器２０の
反転入力端子に加えられる。1st. Among the pickups 12.13 on the inflow side of the second sensor tube section 4.5, the output 12a of the negative pickup 12 is applied to the non-inverting input terminal f of the differential amplifier 20,
The output 13a of another pickup 13 is applied to the inverting input terminal of a differential amplifier 20.
差動増幅″ｆＳ２０は、第７図中、符号３０で示す波形
の出力差信号を出力する。The differential amplifier "fS20" outputs an output difference signal having a waveform indicated by reference numeral 30 in FIG.
第１．第２のセンサチューブ部４．５の流出側のピック
アップ１４．１５のうち、−のピックアップ１４の出力
１４ａは差動増幅器２２の非反転入力端Ｔに加えられ、
別のピックアップ１５の出力１５ａｕ差動増幅器２２の
反転入力端Ｉに加えられる。1st. Among the pickups 14.15 on the outflow side of the second sensor tube section 4.5, the output 14a of the negative pickup 14 is applied to the non-inverting input terminal T of the differential amplifier 22,
The output 15au of another pickup 15 is applied to the inverting input terminal I of the differential amplifier 22.
差動増幅器２２は、第７図中、符号３１で示す波形の出
力差信号を出力する。The differential amplifier 22 outputs an output difference signal having a waveform indicated by reference numeral 31 in FIG.
ここで、出力差信号３０．３１をピックアップ１２．１
４の出力１２ａ、１４ａと比較するに、（Ｑ相差φは同
じであるが、レベルが２倍となっている。Here, the output difference signal 30.31 is picked up 12.1
Compared with the outputs 12a and 14a of No. 4, the Q phase difference φ is the same, but the level is twice as high.
この出力差信号３０．３１の位相が、次段の位相比較回
路２４で比較され、位相差φに対応する位相差信号が出
力される。The phases of the output difference signals 30 and 31 are compared in the next stage phase comparison circuit 24, and a phase difference signal corresponding to the phase difference φ is output.
この位相差信号が処理回路２５に加えられ、ここで、整
形、増幅、時開積分され、端子２６より質量流量に比例
したパルス信号が出力される。This phase difference signal is applied to a processing circuit 25, where it is shaped, amplified, and integrated over time, and is output from a terminal 26 as a pulse signal proportional to the mass flow rate.
外部から振動がベース３に加わった場合、この振動の影
ｇは、第１．第２のセンサチューブ部４゜５に略等しく
及び、流入側のピックアップ１２と１３の出力は等しり
ｆＬｖＪシ、流出側のピックアップ１４と１５の出力も
等しく変動する。上記の差動増幅器２０．２２では夫々
一方のピックアップの出力１２ａ、１４ａより他方のピ
ックアップの出力１３ａ、、１５ａを減算しているため
、ここで外部振動の影響は′ｆ４′１ｉされ、出力差信
号３０゜３１には外部振動の影響は生じない。従って、
位相比較回路２４からは、外部振動の影響の無い位相差
信号が出力され、端子２６よりのパルス信号は外部振動
の影響が無いものとなり、上記実燕例の質ｉ！ｌ’ｌ流
Ｍ計１は、質量流ｍを外部振動の影響を受けずに開側出
来る。When vibration is applied to the base 3 from the outside, the shadow g of this vibration is the first. The output of the pickups 12 and 13 on the inflow side is equal to fLvJ, and the outputs of the pickups 14 and 15 on the outflow side also vary equally. In the above differential amplifiers 20 and 22, the outputs 13a, 15a of one pickup are subtracted from the outputs 12a, 14a of one pickup, respectively, so the influence of external vibration is ``f4''1i, and the output difference Signals 30°31 are not influenced by external vibrations. Therefore,
The phase comparison circuit 24 outputs a phase difference signal that is not affected by external vibrations, and the pulse signal from the terminal 26 is not affected by external vibrations, and the quality i! The l'l flow M meter 1 can open the mass flow m without being affected by external vibrations.
また、第１．第２のヒンサチ１−ブ部４．５が一列に整
列しているため、同一流速とした場合センサチューブＥ
７の径ｄは従来の分岐型の各セン（ｔチｌ−プの径の二
倍となる。Also, 1st. Since the second hinge part 4.5 is aligned in one line, if the flow rate is the same, the sensor tube E
The diameter d of 7 is twice the diameter of each conventional branched tip.
このため、各センサチューブ部４．５の内部を流れる質
！！ｌ流屋は、従来の分岐型の場合の各センサチューブ
を流れる質量流量の二倍となる。これにより、発生する
」リオリカが従来の二倍となり、ピックアップ１２〜１
５の出力信号のＳ／Ｎ比が従来の二倍となり、質伍流場
を従来に比べて安定に検出することが出来、広い流量範
囲に亘って計測することが出来る。For this reason, the quality of the flow inside each sensor tube section 4.5! ! 1 flow rate is twice the mass flow rate flowing through each sensor tube in the conventional branch type case. As a result, the amount of "Riorica" generated is twice as much as before, and pickups 12 to 1
The S/N ratio of the output signal of No. 5 is twice that of the conventional method, making it possible to detect poor-quality flow fields more stably than before, and making it possible to measure over a wide flow rate range.
また、圧力損失は従来の場合より小さくすることができ
る。Moreover, pressure loss can be made smaller than in the conventional case.
またセンサチューブ２内への異物の付着の稈度も極力小
となる。付着した異物の掃除も容易である。Furthermore, the degree of adhesion of foreign matter into the sensor tube 2 is also minimized. It is also easy to clean adhered foreign matter.
勿論、センサチューブ２内には液だまり、空気だまりは
生じない。Of course, no liquid or air pockets are generated within the sensor tube 2.
また、センサナ１−ブ２は必ずしも水平でなくてもよい
。Moreover, the sensor antenna 1-2 does not necessarily have to be horizontal.
発明の効果
上述の如く、本発明になる質量流ｆｉｌは、直線状の第
１．第２のセンケチｌ−１部が一直線に整列してなるた
め、並列に二木設けた構成に比べてセン（ｔチ１−１の
径を太くでき、各センサチューブ部を流れる質恒流伍を
大とし臀、これにより発生するコリオリカを大きくし得
、流１測のＳ／Ｎ比を改善することが出来る。また、圧
力ｎ失を低減し１！すると共に、センナチュー１部内へ
の異物の付着を少なくし得、センサチューブ２内の液だ
まり、空気だまりの発生を防止し得る。Effects of the Invention As described above, the mass flow fil according to the present invention has a linear first . Since the second sensor tubes 1-1 are arranged in a straight line, the diameter of the second sensor tubes 1-1 can be increased compared to a configuration in which two sensor tubes are provided in parallel, and the quality of the flow through each sensor tube can be increased. This increases the amount of Coriolis generated and improves the S/N ratio of flow measurements.Also, it reduces pressure loss and prevents foreign matter from entering the 1st part of the senna tube. Adhesion can be reduced, and generation of liquid pools and air pockets within the sensor tube 2 can be prevented.
更には、第１．第２のセンリチ１−ブ部を１８０度位相
をずらして励振させ、各センサチューブ部の流入側のピ
ックアップの出力同士の差（ｉｉ号及び流出側のピック
アップの出力同士の差信号を形成しているため、外部振
動の影響が相殺され、外部振動を受けても、流量計測を
粘度良く行うことが出来る等の特長を有する。Furthermore, the first. The second sensor tube section is excited with a phase shift of 180 degrees, and a difference signal between the outputs of the pickups on the inflow side (No. ii and the difference signals between the outputs of the pickups on the outflow side) of each sensor tube section is formed. Because of this, the influence of external vibrations is canceled out, and the flow rate can be measured with good viscosity even when external vibrations are applied.
第１図は本発明の質璽流量削の一実施例を示す図、第２
図は第１図中の質量流量計本体の平面図、第３図はセン
ケチｌ−１部の−の変形状態を示す図、第４図はセンサ
ナ１−１部の別の変形状態を示す図、第５図は第１のセ
ンサチューブ部の流入側、流出側のピックアップの出力
波形を示す図、第６図は第２のセンサチューブ部の流入
側、流出側のピックアップの出力波形を示す図、第７図
は二つの出力差信号の波形図である。Fig. 1 is a diagram showing an embodiment of the reduction of the seal amount of the present invention;
The figure is a plan view of the mass flow meter main body in Figure 1, Figure 3 is a diagram showing a deformed state of the Senkechi 1-1 part, and Figure 4 is a diagram showing another deformed state of the Senkechi 1-1 part. , FIG. 5 is a diagram showing the output waveforms of the pickups on the inflow side and outflow side of the first sensor tube section, and FIG. 6 is a diagram showing the output waveforms of the pickups on the inflow side and outflow side of the second sensor tube section. , FIG. 7 is a waveform diagram of two output difference signals.
Claims (1)
された直線状の第１、第２のセンサチューブ部と、 該第１、第２のセンサチューブ部を、１８０度位相をず
らして励振させる手段と、 該第１、第２のセンサチューブ部の流入側の対応する部
位の変位を検出する一対の流入側ピックアップと、 該第１、第２のセンサチューブ部の流出側の対応する部
位の変位を検出する一対の流出側ピックアップと、 該一対の流入側ピックアップの出力差信号を得る第１の
出力差信号形成回路と、 該一対の流出側ピックアップの出力差信号を得る第２の
出力差信号形成回路と、 該第１、第２の出力差信号形成回路の出力差信号の位相
を比較して質量流量に比例した位相差信号を出力する位
相比較回路とよりなることを特徴とする質量流量計。[Scope of Claims] Straight first and second sensor tube parts having substantially the same length, supported at both ends and aligned in a straight line; the first and second sensor tube parts; , a means for excitation with a phase shift of 180 degrees, a pair of inflow side pickups for detecting displacement of corresponding portions on the inflow sides of the first and second sensor tube sections, and the first and second sensor tubes. a pair of outflow side pickups that detect displacement of corresponding parts on the outflow side of the section; a first output difference signal forming circuit that obtains an output difference signal of the pair of inflow side pickups; and an output of the pair of outflow side pickups. a second output difference signal forming circuit that obtains a difference signal; and a phase comparison circuit that compares the phases of the output difference signals of the first and second output difference signal forming circuits and outputs a phase difference signal proportional to the mass flow rate. A mass flowmeter characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24437089A JP2723306B2 (en) | 1989-09-20 | 1989-09-20 | Mass flow meter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24437089A JP2723306B2 (en) | 1989-09-20 | 1989-09-20 | Mass flow meter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03107727A true JPH03107727A (en) | 1991-05-08 |
| JP2723306B2 JP2723306B2 (en) | 1998-03-09 |
Family
ID=17117685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24437089A Expired - Lifetime JP2723306B2 (en) | 1989-09-20 | 1989-09-20 | Mass flow meter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2723306B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5307689A (en) * | 1991-01-18 | 1994-05-03 | Tokico Ltd. | Mass flowmeter |
-
1989
- 1989-09-20 JP JP24437089A patent/JP2723306B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5307689A (en) * | 1991-01-18 | 1994-05-03 | Tokico Ltd. | Mass flowmeter |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2723306B2 (en) | 1998-03-09 |
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