JPH03106357U - - Google Patents

Info

Publication number
JPH03106357U
JPH03106357U JP1581690U JP1581690U JPH03106357U JP H03106357 U JPH03106357 U JP H03106357U JP 1581690 U JP1581690 U JP 1581690U JP 1581690 U JP1581690 U JP 1581690U JP H03106357 U JPH03106357 U JP H03106357U
Authority
JP
Japan
Prior art keywords
base
substrate
holder
sputtering
support rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1581690U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1581690U priority Critical patent/JPH03106357U/ja
Publication of JPH03106357U publication Critical patent/JPH03106357U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP1581690U 1990-02-19 1990-02-19 Pending JPH03106357U (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1581690U JPH03106357U (US20100056889A1-20100304-C00004.png) 1990-02-19 1990-02-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1581690U JPH03106357U (US20100056889A1-20100304-C00004.png) 1990-02-19 1990-02-19

Publications (1)

Publication Number Publication Date
JPH03106357U true JPH03106357U (US20100056889A1-20100304-C00004.png) 1991-11-01

Family

ID=31519106

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1581690U Pending JPH03106357U (US20100056889A1-20100304-C00004.png) 1990-02-19 1990-02-19

Country Status (1)

Country Link
JP (1) JPH03106357U (US20100056889A1-20100304-C00004.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007140809A (ja) * 2005-11-17 2007-06-07 Matsushita Electric Ind Co Ltd 携帯用防犯ブザー
JP2016541117A (ja) * 2013-11-25 2016-12-28 アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated 熱エネルギー伝達低減のための基板キャリア

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007140809A (ja) * 2005-11-17 2007-06-07 Matsushita Electric Ind Co Ltd 携帯用防犯ブザー
JP2016541117A (ja) * 2013-11-25 2016-12-28 アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated 熱エネルギー伝達低減のための基板キャリア

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