JPH03106185U - - Google Patents

Info

Publication number
JPH03106185U
JPH03106185U JP1431490U JP1431490U JPH03106185U JP H03106185 U JPH03106185 U JP H03106185U JP 1431490 U JP1431490 U JP 1431490U JP 1431490 U JP1431490 U JP 1431490U JP H03106185 U JPH03106185 U JP H03106185U
Authority
JP
Japan
Prior art keywords
stage cryopanel
fins
refrigerator
compressor
cryopump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1431490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1431490U priority Critical patent/JPH03106185U/ja
Publication of JPH03106185U publication Critical patent/JPH03106185U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1431490U 1990-02-16 1990-02-16 Pending JPH03106185U (US20100012521A1-20100121-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1431490U JPH03106185U (US20100012521A1-20100121-C00001.png) 1990-02-16 1990-02-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1431490U JPH03106185U (US20100012521A1-20100121-C00001.png) 1990-02-16 1990-02-16

Publications (1)

Publication Number Publication Date
JPH03106185U true JPH03106185U (US20100012521A1-20100121-C00001.png) 1991-11-01

Family

ID=31517683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1431490U Pending JPH03106185U (US20100012521A1-20100121-C00001.png) 1990-02-16 1990-02-16

Country Status (1)

Country Link
JP (1) JPH03106185U (US20100012521A1-20100121-C00001.png)

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