JPH0310443U - - Google Patents

Info

Publication number
JPH0310443U
JPH0310443U JP7152489U JP7152489U JPH0310443U JP H0310443 U JPH0310443 U JP H0310443U JP 7152489 U JP7152489 U JP 7152489U JP 7152489 U JP7152489 U JP 7152489U JP H0310443 U JPH0310443 U JP H0310443U
Authority
JP
Japan
Prior art keywords
elongated hole
operating knob
switch
switch case
indenter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7152489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7152489U priority Critical patent/JPH0310443U/ja
Publication of JPH0310443U publication Critical patent/JPH0310443U/ja
Pending legal-status Critical Current

Links

JP7152489U 1989-06-19 1989-06-19 Pending JPH0310443U (US07902200-20110308-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7152489U JPH0310443U (US07902200-20110308-C00004.png) 1989-06-19 1989-06-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7152489U JPH0310443U (US07902200-20110308-C00004.png) 1989-06-19 1989-06-19

Publications (1)

Publication Number Publication Date
JPH0310443U true JPH0310443U (US07902200-20110308-C00004.png) 1991-01-31

Family

ID=31608631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7152489U Pending JPH0310443U (US07902200-20110308-C00004.png) 1989-06-19 1989-06-19

Country Status (1)

Country Link
JP (1) JPH0310443U (US07902200-20110308-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8963052B2 (en) 2001-04-30 2015-02-24 Lam Research Corporation Method for controlling spatial temperature distribution across a semiconductor wafer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63110514A (ja) * 1986-10-28 1988-05-16 オムロン株式会社 スイツチの感触機構

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63110514A (ja) * 1986-10-28 1988-05-16 オムロン株式会社 スイツチの感触機構

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8963052B2 (en) 2001-04-30 2015-02-24 Lam Research Corporation Method for controlling spatial temperature distribution across a semiconductor wafer
US9824904B2 (en) 2001-04-30 2017-11-21 Lam Research Corporation Method and apparatus for controlling spatial temperature distribution

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