JPH03104291A - Removal of carbon attached to electrode surfaces of co laser apparatus - Google Patents
Removal of carbon attached to electrode surfaces of co laser apparatusInfo
- Publication number
- JPH03104291A JPH03104291A JP24305489A JP24305489A JPH03104291A JP H03104291 A JPH03104291 A JP H03104291A JP 24305489 A JP24305489 A JP 24305489A JP 24305489 A JP24305489 A JP 24305489A JP H03104291 A JPH03104291 A JP H03104291A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- laser
- discharge
- carbon
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052799 carbon Inorganic materials 0.000 title claims abstract description 29
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 28
- 239000007789 gas Substances 0.000 claims abstract description 78
- 238000004140 cleaning Methods 0.000 claims abstract description 18
- 230000010355 oscillation Effects 0.000 claims abstract description 10
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000001301 oxygen Substances 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 6
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 4
- 239000007788 liquid Substances 0.000 abstract description 3
- 239000003507 refrigerant Substances 0.000 abstract description 3
- 238000011109 contamination Methods 0.000 abstract description 2
- 239000000428 dust Substances 0.000 abstract 1
- 238000007599 discharging Methods 0.000 description 2
- 150000001721 carbon Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、ガス循環・放電励起型ＣＯレーザ装置の電極
に付着した炭素を除去する方法に関するものである．
［従来の技術］
３軸直交型の大出力放電励起型ＣＯレーザ装置は、ＣＯ
ガスの流れ方向と放電方向とレーザ光進行方向とが互い
に直交しており、ＣＯを含むレーザガスは、放電部が形
成されたガス循環路内をガス循環機にて循環され、その
放電部に設けた電極間での放電で励起されてレーザ光を
発振する．このＣＯレーザ装置では、ＣＯ ＋ Ｏ ｔ
＋ Ｈ ｅ ，Ｎ．，Ｘｅなどの組或で構成されてい
るレーザガスを用い、このレーザガスをガス循環路にて
放電部を繰り返し循環させると共に放電で加熱されたガ
スを冷却してレーザの連続発振運転を行っている．
この連続発振運転中、放電部ではＣＯガスが、放電によ
り（ＣＯ→Ｃ＋０）の反応にて発生した炭素が電極及び
出力ミラーなど装置内部に付着し、レーザ出力の低下や
放電の不安定、電極寿命の低下を招く．
このため従来は、炭素がある程度付着したならば、一旦
発振運転を中断して装置内の温度などの状態が運転前の
レベルに落ち着いてから、装置内のレーザガスを排気・
リークし、装置を開けて付着した炭素を拭きとって炭素
を除去し、再度、循環路内を真空にしたのち新しいレー
ザガスを供給すると共に温度などの状態が運転時のレベ
ルに達してから発振運転を再開していた．
［発明が解決しようとする課題］
しかしながら、この従来の方法では、レーザ発振運転の
中断から再開までにはかなりの時間と手間を要し効率が
悪い問題がある．また、時間と手間がかかるため、炭素
の除去をマメに行うことが避けられがちであり、電極等
の装置の寿命を短くする結果につながっていた．
本発明は上記事情を考慮してなされたもので、電極など
に付着した炭素の除去を簡単にできるＣｏレーザ装置の
電極表面付着炭素除去方法を提供することを目的とする
．
［課題を解決するための手段］
本発明は、上記の目的を達成するために、ガス循環路に
ＣＯを含むレーザガスを封入すると共にこれを循環しな
がらガス循環路の放電部の電極間で放電を行ってレーザ
を出力し、そのレーザ発振中上記電極に炭素が付着した
際、上記放ｔ部での放電を中断し、ガス循環路中のレー
ザガスを排気したのち、そのガス循環路内に酸素を含む
クリーニングガスを充填すると共に上記放電部で放電を
行って付着酸素を除去するようにしたものである．［作
用］
上記の構成によれば、放電部の電極に付着した炭素は、
クリーニングガス中の酸素と反応してＣＯガスとなり電
極から除去される．
［実施例］
以下、本発明の好適実施例を添付図面に基づいて説明す
る．
第１図において、１は、閉ループに形成されたレーザガ
スの循環路で、その循環路ｌに、放！電極２．２が配置
された放電部３が設けられると共にレーザガスを図示の
矢印方向に循環すべくガス循環６１４が設けられる．こ
の放電部２の入口側には、放電部３で昇温されたレーザ
ガスを、液体窒素などの低温冷媒により冷却する熱交換
器５が設けられる．
ガス循環路１にはＣＯを含むレーザガス（組成比Ｃ Ｏ
／ Ｎ ２／ ０ ２／ Ｈ ｅ ＝ ４ ／ １
６ ／ Ｏ − ２ ／７９．８％）の供給装置６が接
続される。この供給装置６は、レーザガスの供給ボンベ
７と、そのボンベ７に接続されると共にガス循環路１に
接続された供給管８とからなり、その供給管８に、開閉
弁９が接続される．この供給管８に、クリーニングガス
供給装［１０が接続される．このクリーニングガス供給
装置１０は、クリーニングガス供給ボンベ１１と、接続
管１２と、その接続管１２に接続された開閉弁１３とか
らなる．このクリーニングガスは、Ｈｅ，Ｎｚなど放電
部２での放電を維持し、かつ炭素を発生しないガスに０
２を加えたガスからなる．
以上において先ず循環路１内に、ＣＯ，Ｏ．，Ｎ２ ，
Ｈｅなどの組成のレーザガスが封入される。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method for removing carbon attached to the electrodes of a gas circulation/discharge-excited CO laser device. [Prior art] A three-axis orthogonal high-output discharge-excited CO laser device
The gas flow direction, the discharge direction, and the laser beam traveling direction are perpendicular to each other, and the laser gas containing CO is circulated by a gas circulation machine in a gas circulation path in which a discharge part is formed. It is excited by the discharge between the electrodes and oscillates laser light. In this CO laser device, CO + O t
+ He, N. , Xe, etc., this laser gas is repeatedly circulated through the discharge section in a gas circulation path, and the gas heated by the discharge is cooled to perform continuous oscillation operation of the laser. During this continuous oscillation operation, CO gas in the discharge section and carbon generated by the reaction (CO→C+0) due to discharge adhere to the inside of the device, such as the electrode and output mirror, resulting in a decrease in laser output, instability of the discharge, and This results in a decrease in lifespan. For this reason, conventionally, once a certain amount of carbon has adhered, oscillation operation is temporarily interrupted, the temperature and other conditions inside the device have settled down to the level before operation, and then the laser gas inside the device is evacuated.
If a leak occurs, open the device, wipe off the adhering carbon, remove the carbon, evacuate the circulation path again, supply new laser gas, and wait until the temperature and other conditions reach the operating level before starting oscillation operation. was restarting. [Problems to be Solved by the Invention] However, this conventional method has the problem of being inefficient because it takes a considerable amount of time and effort to restart the laser oscillation operation from interruption to restart. Additionally, since it is time-consuming and labor-intensive, carbon removal tends to be avoided frequently, leading to a shortened lifespan of devices such as electrodes. The present invention has been made in consideration of the above circumstances, and it is an object of the present invention to provide a method for removing carbon adhering to the electrode surface of a Co laser device, which allows easy removal of carbon adhering to electrodes, etc. [Means for Solving the Problems] In order to achieve the above object, the present invention includes a gas circulation path filled with a laser gas containing CO, and while circulating the laser gas, a discharge is generated between the electrodes of the discharge section of the gas circulation path. When carbon adheres to the electrode during laser oscillation, the discharge in the radiation part is interrupted, the laser gas in the gas circulation path is exhausted, and oxygen is added to the gas circulation path. The device is filled with a cleaning gas containing oxygen and generates an electric discharge in the discharge section to remove attached oxygen. [Function] According to the above configuration, carbon attached to the electrode of the discharge section,
It reacts with oxygen in the cleaning gas to form CO gas and is removed from the electrode. [Examples] Preferred embodiments of the present invention will be described below with reference to the accompanying drawings. In FIG. 1, reference numeral 1 indicates a laser gas circulation path formed in a closed loop. A discharge section 3 in which an electrode 2.2 is arranged is provided, and a gas circulation 614 is provided to circulate the laser gas in the direction of the arrow shown. A heat exchanger 5 is provided on the inlet side of the discharge section 2 to cool the laser gas heated in the discharge section 3 with a low-temperature refrigerant such as liquid nitrogen. The gas circulation path 1 contains a laser gas containing CO (composition ratio CO
/ N 2/ 0 2/ H e = 4/1
6/O-2/79.8%) is connected. This supply device 6 consists of a laser gas supply cylinder 7 and a supply pipe 8 connected to the cylinder 7 and to the gas circulation path 1, and an on-off valve 9 is connected to the supply pipe 8. A cleaning gas supply device [10] is connected to this supply pipe 8. This cleaning gas supply device 10 includes a cleaning gas supply cylinder 11, a connecting pipe 12, and an on-off valve 13 connected to the connecting pipe 12. This cleaning gas is a gas such as He or Nz that maintains the discharge in the discharge section 2 and does not generate carbon.
It consists of a gas with the addition of 2. In the above, first, CO, O. ,N2,
A laser gas having a composition such as He is sealed.
このレーザガスの組成は、例えば、ＣＯ＝４％，０２＝
０．２％．Ｎ１＝１６％．Ｈｅ＝＝約８０％である．こ
のレーザガスは、発振運転中、循環機４にて図示の矢印
方向に循環され、放電部３での放電により昇温されるた
め、熱交換器５で、液体窒素等の低温冷媒と間接熱交換
により冷却される．この放電部３の＠＠２．２間で放電
が行われレーザが出力されている時、上述のようにレー
ザガス中のＣＯガスは、一部炭素が発生し、これが電極
２．２に付着する．この炭素の付着が生じたならば、放
電部３での放電を一旦中断し、循環路１内のレーザガス
を排気し、クリーニングガス供給装置１０よりクリーニ
ングガスを循環路１内に供給する．その後、放電部３で
放電を行うことで、クリーニングガスは、Ｃ＋０２→Ｃ
Ｏ＋０ （またＣＯ２ガスを用いれば、ｃ＋ｃｏｔ→２
ＣＯ）の反応によって電極２．２に付着した炭素が除去
される．＃４極２，２に付着した炭素が除去されたなら
ば、放電を止めて、循環路１内のクリーニングガスを排
気し、再度供給装ｖＩｌ６よりレーザガスをガス循環路
１に封入して運転を再開する．次により具体的な実験例
を説明する．
封じ切り運転中に０２濃度が０．１％以下の状態で、数
十分間放電を行ったところ、陽極表面に炭素が付着し、
その部分に輝点（無数に存在）が見られた．このとき、
ガス圧力４ ０ ｔｏｒｒ，温度１８０Ｋ．ガス組戒Ｃ
Ｏ ／ Ｎ ２ ／ ０ ２ ／ Ｈ ｅ ＝４／１
６／０．２／７９．８ （モル％〉の条件では、放Ｈ流
が６Ａを越える範囲では断続的な放電不安定が生じ、こ
れによりレーザ出力は、１．２ＫＷ以下に制限された．
そのため、レーザガスを一度真空排気したのち、０ ２
／ Ｈ ｅ ＝５／９５（モル％）のクリーニングガ
スを４０１Ｏ『『封入し、８Ａで約２０分間放電するこ
とにより、陽極表面の輝点は無くなった．その後再度レ
ーザガスを封入し、先ほどと同じガス条件で発振したと
ころ、電流が８Ａの場合も放電は安定であり、最大レー
サ出力は１．６ＫＷまで回復した．［発明の効果］
以上説明したことから明らかなように本発明によれば次
のごとき優れた効果を発揮する．（１）循環路内にクリ
ーニングガスを封入し、放電を行いながら電極に付着し
た炭素を除去することで、装置を開閉することなく炭素
の除去ができ、このため除去が手軽にできるだけでなく
大気中のゴミ・油・水分などによる装置内の汚染も避け
ることができる．
（２）炭素は放電部を中心に付着しており、放電による
反応でその炭素を除去するため、放電不安定を引き起こ
す炭素の集中付着部を良好に除去することができる．The composition of this laser gas is, for example, CO=4%, 02=
0.2%. N1=16%. He==about 80%. During the oscillation operation, this laser gas is circulated in the direction of the arrow shown in the figure in the circulator 4, and its temperature is raised by the discharge in the discharge section 3, so that the heat exchanger 5 indirectly exchanges heat with a low-temperature refrigerant such as liquid nitrogen. It is cooled by When a discharge occurs between @@2.2 of this discharge section 3 and a laser is output, some carbon is generated from the CO gas in the laser gas as described above, and this adheres to the electrode 2.2. ．． If this carbon adhesion occurs, the discharge in the discharge section 3 is temporarily interrupted, the laser gas in the circulation path 1 is exhausted, and cleaning gas is supplied into the circulation path 1 from the cleaning gas supply device 10. After that, by discharging in the discharge section 3, the cleaning gas changes from C+02 to C
O+0 (Also, if CO2 gas is used, c+cot→2
The carbon attached to the electrode 2.2 is removed by the reaction of CO). Once the carbon attached to the #4 poles 2 and 2 has been removed, the discharge is stopped, the cleaning gas in the circulation path 1 is exhausted, and the laser gas is filled into the gas circulation path 1 from the supply device vIl6 again and the operation is started. resume. Next, we will explain a more specific experimental example. When discharge was carried out for several tens of minutes with the 02 concentration below 0.1% during shut-off operation, carbon adhered to the anode surface.
Bright spots (innumerable) were seen in that area. At this time,
Gas pressure 40 torr, temperature 180K. Gas group command C
O/N2/02/H e =4/1
Under the conditions of 6/0.2/79.8 (mol%), intermittent discharge instability occurred in the range where the H discharge flow exceeded 6A, and the laser output was thereby limited to 1.2KW or less.
Therefore, after the laser gas is evacuated once, 0 2
/ H e =5/95 (mol %) cleaning gas was sealed in 401O and discharged at 8A for about 20 minutes, the bright spot on the anode surface disappeared. After that, the laser gas was filled again and oscillation was performed under the same gas conditions as before, and the discharge was stable even when the current was 8A, and the maximum laser output recovered to 1.6KW. [Effects of the Invention] As is clear from the above explanation, the present invention provides the following excellent effects. (1) By sealing cleaning gas in the circulation path and removing carbon attached to the electrodes while discharging, carbon can be removed without opening or closing the device. Contamination inside the device due to dirt, oil, moisture, etc. can also be avoided. (2) Carbon adheres mainly to the discharge area, and the carbon is removed by a reaction caused by the discharge, so it is possible to effectively remove areas where carbon is concentrated and adhered, which causes instability of the discharge.
第１図は本発明の一実施例を示す図である．図中、１は
ガス循環路、３は放電部、４はガス循環機、６はレーザ
ガス供給装置、１０はクリーニングガス供給装置である
．FIG. 1 is a diagram showing an embodiment of the present invention. In the figure, 1 is a gas circulation path, 3 is a discharge section, 4 is a gas circulation machine, 6 is a laser gas supply device, and 10 is a cleaning gas supply device.
Claims (1)
にこれを循環しながらガス循環路の放電部の電極間で放
電を行ってレーザを出力し、そのレーザ発振中上記電極
に炭素が付着した際、上記放電部での放電を中断し、ガ
ス循環路中のレーザガスを排気したのち、そのガス循環
路内に酸素を含むクリーニングガスを充填すると共に上
記放電部で放電を行つて付着酸素を除去することを特徴
とするＣＯレーザ装置の電極表面付着炭素除去方法。1. When a laser gas containing CO is filled in a gas circulation path and is circulated, a discharge is generated between the electrodes of the discharge section of the gas circulation path to output a laser, and when carbon adheres to the electrodes during laser oscillation. After interrupting the discharge in the discharge section and evacuating the laser gas in the gas circulation path, the gas circulation path is filled with a cleaning gas containing oxygen and discharge is performed in the discharge section to remove attached oxygen. A method for removing carbon deposited on an electrode surface of a CO laser device, characterized in that:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24305489A JPH0714085B2 (en) | 1989-09-19 | 1989-09-19 | Method for removing carbon adhering to electrode surface of CO laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24305489A JPH0714085B2 (en) | 1989-09-19 | 1989-09-19 | Method for removing carbon adhering to electrode surface of CO laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03104291A true JPH03104291A (en) | 1991-05-01 |
| JPH0714085B2 JPH0714085B2 (en) | 1995-02-15 |
Family
ID=17098123
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24305489A Expired - Lifetime JPH0714085B2 (en) | 1989-09-19 | 1989-09-19 | Method for removing carbon adhering to electrode surface of CO laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0714085B2 (en) |
-
1989
- 1989-09-19 JP JP24305489A patent/JPH0714085B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0714085B2 (en) | 1995-02-15 |
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