JPH03103264U - - Google Patents
Info
- Publication number
- JPH03103264U JPH03103264U JP1124690U JP1124690U JPH03103264U JP H03103264 U JPH03103264 U JP H03103264U JP 1124690 U JP1124690 U JP 1124690U JP 1124690 U JP1124690 U JP 1124690U JP H03103264 U JPH03103264 U JP H03103264U
- Authority
- JP
- Japan
- Prior art keywords
- quartz ampoule
- single crystal
- semiconductor single
- manufacturing apparatus
- raw material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 239000003708 ampul Substances 0.000 claims description 5
- 239000013078 crystal Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 230000002265 prevention Effects 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims 2
- 230000003014 reinforcing effect Effects 0.000 claims 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1124690U JPH03103264U (cs) | 1990-02-07 | 1990-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1124690U JPH03103264U (cs) | 1990-02-07 | 1990-02-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03103264U true JPH03103264U (cs) | 1991-10-28 |
Family
ID=31514780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1124690U Pending JPH03103264U (cs) | 1990-02-07 | 1990-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03103264U (cs) |
-
1990
- 1990-02-07 JP JP1124690U patent/JPH03103264U/ja active Pending