JPH03103249U - - Google Patents

Info

Publication number
JPH03103249U
JPH03103249U JP1037190U JP1037190U JPH03103249U JP H03103249 U JPH03103249 U JP H03103249U JP 1037190 U JP1037190 U JP 1037190U JP 1037190 U JP1037190 U JP 1037190U JP H03103249 U JPH03103249 U JP H03103249U
Authority
JP
Japan
Prior art keywords
bonding surface
sputtering
periphery
utility
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1037190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1037190U priority Critical patent/JPH03103249U/ja
Publication of JPH03103249U publication Critical patent/JPH03103249U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1037190U 1990-02-05 1990-02-05 Pending JPH03103249U (US20100012521A1-20100121-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1037190U JPH03103249U (US20100012521A1-20100121-C00001.png) 1990-02-05 1990-02-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1037190U JPH03103249U (US20100012521A1-20100121-C00001.png) 1990-02-05 1990-02-05

Publications (1)

Publication Number Publication Date
JPH03103249U true JPH03103249U (US20100012521A1-20100121-C00001.png) 1991-10-28

Family

ID=31513943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1037190U Pending JPH03103249U (US20100012521A1-20100121-C00001.png) 1990-02-05 1990-02-05

Country Status (1)

Country Link
JP (1) JPH03103249U (US20100012521A1-20100121-C00001.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS623387U (US20100012521A1-20100121-C00001.png) * 1985-06-24 1987-01-10
JPS6277461A (ja) * 1985-09-30 1987-04-09 Shinku Kikai Kogyo Kk 高周波スパツタ電極のバツキングプレ−ト

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS623387U (US20100012521A1-20100121-C00001.png) * 1985-06-24 1987-01-10
JPS6277461A (ja) * 1985-09-30 1987-04-09 Shinku Kikai Kogyo Kk 高周波スパツタ電極のバツキングプレ−ト

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