JPH0310226B2 - - Google Patents

Info

Publication number
JPH0310226B2
JPH0310226B2 JP57219880A JP21988082A JPH0310226B2 JP H0310226 B2 JPH0310226 B2 JP H0310226B2 JP 57219880 A JP57219880 A JP 57219880A JP 21988082 A JP21988082 A JP 21988082A JP H0310226 B2 JPH0310226 B2 JP H0310226B2
Authority
JP
Japan
Prior art keywords
alumina film
titanium layer
film
etching
alumina
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57219880A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59109900A (ja
Inventor
Hiroyuki Fujisada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP57219880A priority Critical patent/JPS59109900A/ja
Publication of JPS59109900A publication Critical patent/JPS59109900A/ja
Publication of JPH0310226B2 publication Critical patent/JPH0310226B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
JP57219880A 1982-12-15 1982-12-15 アルミナ膜の加工方法 Granted JPS59109900A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57219880A JPS59109900A (ja) 1982-12-15 1982-12-15 アルミナ膜の加工方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57219880A JPS59109900A (ja) 1982-12-15 1982-12-15 アルミナ膜の加工方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP29358389A Division JPH02177346A (ja) 1989-11-10 1989-11-10 アルミナ絶縁膜

Publications (2)

Publication Number Publication Date
JPS59109900A JPS59109900A (ja) 1984-06-25
JPH0310226B2 true JPH0310226B2 (enrdf_load_stackoverflow) 1991-02-13

Family

ID=16742498

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57219880A Granted JPS59109900A (ja) 1982-12-15 1982-12-15 アルミナ膜の加工方法

Country Status (1)

Country Link
JP (1) JPS59109900A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS59109900A (ja) 1984-06-25

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