JPH03100494U - - Google Patents

Info

Publication number
JPH03100494U
JPH03100494U JP724590U JP724590U JPH03100494U JP H03100494 U JPH03100494 U JP H03100494U JP 724590 U JP724590 U JP 724590U JP 724590 U JP724590 U JP 724590U JP H03100494 U JPH03100494 U JP H03100494U
Authority
JP
Japan
Prior art keywords
vacuum
space
mounting plate
vacuum chamber
detection sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP724590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP724590U priority Critical patent/JPH03100494U/ja
Publication of JPH03100494U publication Critical patent/JPH03100494U/ja
Pending legal-status Critical Current

Links

JP724590U 1990-01-29 1990-01-29 Pending JPH03100494U (US20110009641A1-20110113-C00185.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP724590U JPH03100494U (US20110009641A1-20110113-C00185.png) 1990-01-29 1990-01-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP724590U JPH03100494U (US20110009641A1-20110113-C00185.png) 1990-01-29 1990-01-29

Publications (1)

Publication Number Publication Date
JPH03100494U true JPH03100494U (US20110009641A1-20110113-C00185.png) 1991-10-21

Family

ID=31510907

Family Applications (1)

Application Number Title Priority Date Filing Date
JP724590U Pending JPH03100494U (US20110009641A1-20110113-C00185.png) 1990-01-29 1990-01-29

Country Status (1)

Country Link
JP (1) JPH03100494U (US20110009641A1-20110113-C00185.png)

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