JPH03100411A - Abnormality deciding device of position detector - Google Patents

Abnormality deciding device of position detector

Info

Publication number
JPH03100411A
JPH03100411A JP23888389A JP23888389A JPH03100411A JP H03100411 A JPH03100411 A JP H03100411A JP 23888389 A JP23888389 A JP 23888389A JP 23888389 A JP23888389 A JP 23888389A JP H03100411 A JPH03100411 A JP H03100411A
Authority
JP
Japan
Prior art keywords
absolute
signal
allowable
abnormality
moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23888389A
Other languages
Japanese (ja)
Inventor
Katsunori Tsutsui
克典 筒井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brother Industries Ltd
Original Assignee
Brother Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brother Industries Ltd filed Critical Brother Industries Ltd
Priority to JP23888389A priority Critical patent/JPH03100411A/en
Publication of JPH03100411A publication Critical patent/JPH03100411A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To execute the abnormality decision corresponding to positioning with high accuracy, and also, to prevent the abnormality decision from being executed oversensitively by changing an allowable error in accordance with a moving state of a position detecting object. CONSTITUTION:An allowable error changing means M5 changes an allowable error in accordance with a moving state such as whether a position detecting object M1 is stopping or moving, etc., an abnormality deciding means M4 executes an abnormality decision basing on the allowable error corresponding to this moving state. Also, at the time of executing the abnormality decision, it is allowable to convert the present position of the object M1 from a detection value of a relative position variation quantity detecting means M3 and to compare it with a detection value of an absolute position detecting means M3, and it is also allowable to convert the detection value of the means M3 to the absolute value variation quantity and to compare it with the detection value of the means 2. Moreover, if only both the detection values can be compared, use of any method for conversion and comparison is allowable.

Description

【発明の詳細な説明】 預m的 [産業上の利用分野] 本発明(上 位置検出器の異常判定装置に係り、二つの
検出手段から求まる位置或は位置変化量の差が許容誤差
を越える場合に異常と判定する装置に関する。
[Detailed description of the invention] Precise [Industrial application field] The present invention (part 1) relates to an abnormality determination device for a position detector, in which the difference in position or position change amount determined by two detection means exceeds a permissible error. The present invention relates to a device that determines an abnormality when a case occurs.

[従来の技術] 従棗 位置検出器の異常を判定する装置として、例えば
特開昭54−40374号が知られている。
[Prior Art] For example, Japanese Patent Laid-Open No. 54-40374 is known as a device for determining abnormality in a position detector.

この公報記載の装置(友 工作機械の移動テーブルの変
位を検出するインクリメンタル式位置検出器と、移動テ
ーブルの絶対位置を検出するアブソノニート式位置検出
器とを並設し、インクリメンタル式位置検出器の検出値
を積算した値とアブソリュート式位置検出器の検出値と
の差が許容誤差以上になった場合(上 インクリメンタ
ル式位置検出器を異常と判定し、モータを停止するもの
であった この許容誤差(友 工作機械の制御上必要な精度±αを
基準として、テーブル移動中の各検出器の検出タイミン
グのずれや位相のずれ等に起因する計測上の誤差Δαを
加えて、値上(α+Δα)とすることにより、過敏な異
常判定をしない様に設定されていた [発明が解決しようとする課題] しかし、精度±αを維持したいのは移動テーブルを停止
した場合であって、従来の技術で(友 移動中の過敏な
判定を防止するために(友 どうしてもこの精度±αを
犠牲にしなければならなかっLこのため、工作機械にお
いて1上 以上判定の早期発見を図ることができなかつ
翫 本発明の位置検出器の異常判定装置(よ かかる課題を
解決し、高精度な位置決めに対応した異常判定ができ、
かつ過敏に異常判定を行わないことを目的としている。
The device described in this publication (tomo) has an incremental position detector that detects the displacement of a moving table of a machine tool and an absolute position detector that detects the absolute position of the moving table that are installed side by side. If the difference between the integrated value and the detected value of the absolute type position detector exceeds the allowable error (top). Tomo: Based on the accuracy ±α necessary for machine tool control, add the measurement error Δα caused by the detection timing shift and phase shift of each detector while the table is moving, and calculate the value increase (α + Δα). [Problem to be solved by the invention] However, it is necessary to maintain accuracy ±α when the moving table is stopped, and the conventional technology ( Friend: In order to prevent sensitive judgments during movement (Friend: it is necessary to sacrifice this accuracy ±α), it is therefore impossible to detect judgments of 1 or higher in machine tools at an early stage. Anomaly determination device for position detector
The purpose is not to overly judge abnormalities.

及匪立璽滅 [課題を解決するための手段] 本発明の位置検出器の異常判定装置(上 第1図に例示
する様に 移動する位置検出対象物M1の相対位置の変
化量を検出する相対位置変化量検出手段M2と、該相対
位置変化量検出手段M2よりも粗い分解能で前記位置検
出対象物M]の絶対位置を検出する絶対位置検出手段M
3と、前記各検出手段M2.M3で検出される相対位置
の変化量及び絶対位置を換算・比較し、該換算・比較し
た結果が所定の許容誤差を越える場合は異常であると判
定する異常判定手段M4とを備える位置検出器の異常判
定装置において、前記位置検出対象物M]の移動速度或
は停止中であるか移動中であるか等の移動状態に応じて
前記許容誤差を変更する許容誤差変更手段M5を備える
ことを特徴とする。
[Means for Solving the Problems] An abnormality determination device for a position detector according to the present invention (as illustrated in FIG. relative position change amount detection means M2; and absolute position detection means M for detecting the absolute position of the position detection object M with a resolution coarser than that of the relative position change amount detection means M2.
3, and each of the detection means M2. A position detector comprising an abnormality determination means M4 that converts and compares the amount of change in relative position and absolute position detected by M3, and determines that there is an abnormality if the result of the conversion and comparison exceeds a predetermined tolerance. The abnormality determination device may include a tolerance changing means M5 for changing the tolerance according to the moving speed of the position detection target object M or a moving state such as whether it is stopped or moving. Features.

[作用] 本発明の位置検出器の異常判定装置において(表許容誤
差変更手段M5が、位置検出対象物M1の移動速度或は
位置検出対象物M1が停止中であるか移動中であるか等
の移動状態に応じて許容誤差を変更し、この移動状態に
対応した許容誤差に基づいて、異常判定手段M4が異常
判定を実行する。
[Operation] In the abnormality determination device for a position detector of the present invention (table tolerance changing means M5 changes the moving speed of the position detection object M1, whether the position detection object M1 is stopped or moving, etc.) The allowable error is changed according to the moving state of the motor, and the abnormality determining means M4 executes abnormality determination based on the allowable error corresponding to the moving state.

異常判定において]よ 相対位置変化量検出手段M2の
検出値から位置検出対象物M1の現在位置を換算して絶
対位置検出手段M3の検出値と比較してもよく、また、
絶対位置検出手段M3の検出値を絶対値の変化量に換算
して相対位置変化量検出手段M2の検出値と比較しても
よい。その地雨検出値を比較できれば如何なる換算・比
較の仕方でも構わない。
In abnormality determination], the current position of the position detection object M1 may be converted from the detection value of the relative position change amount detection means M2 and compared with the detection value of the absolute position detection means M3;
The detected value of the absolute position detecting means M3 may be converted into an absolute value change amount and compared with the detected value of the relative position change amount detecting means M2. Any method of conversion and comparison may be used as long as the ground rain detection values can be compared.

[実施例] 次1′−本発明を具体化した実施例を図面に基づき詳細
に説明する。
[Examples] Next 1'-Examples embodying the present invention will be described in detail based on the drawings.

第2図に数値制御工作機械のワークテーブル1の移動機
構に本発明を適用した実施例の概略構成を示す。なお、
簡単のため、ワークテーブル1は一軸に沿って移動する
場合を示している。
FIG. 2 shows a schematic configuration of an embodiment in which the present invention is applied to a moving mechanism for a work table 1 of a numerically controlled machine tool. In addition,
For simplicity, a case is shown in which the work table 1 moves along one axis.

この工作機械で(よ ワークテーブル1と、このワーク
テーブル1に螺合された送りネジ3と、送りネジ3を正
逆回転駆動するモータ5と、モータ5の回転軸6に直結
されたエンコーダ7と、エンコーダ7からの検出信号が
入力されると共に駆動装置9を介してモータ5に駆動信
号を出力する数値制御装置11とを中心に移動機構が構
成される。
This machine tool includes a work table 1, a feed screw 3 screwed onto the work table 1, a motor 5 that drives the feed screw 3 in forward and reverse rotation, and an encoder 7 directly connected to the rotating shaft 6 of the motor 5. A moving mechanism is constructed centering on a numerical control device 11 which receives a detection signal from an encoder 7 and outputs a drive signal to the motor 5 via a drive device 9.

エンコーダ7(上 第3図に示す様に、円板13の外周
部分に等間隔で配設したスリットからなるインクリメン
タル信号発生部15と、このインクツメンタル信号発生
部15より内周側に所定パターンで配設したスリットの
組合せにより11ビツトのアブソリュート信号を発生す
るアブソリュート信号発生部]7とを備え、所定位置に
配設された光源とフォトセンサ(いずれも図示略)によ
り検出信号を出力する。なお、インクリメンタル信号発
生部15の分解能1表 アブソリュート信号発生部17
の分解能よりも高く設定してあり、アブソリュート信号
発生部]7よりも8倍細かく位置を検出できる。
Encoder 7 (as shown in Fig. 3 above, includes an incremental signal generating section 15 consisting of slits arranged at equal intervals on the outer circumference of a disk 13, and a predetermined pattern on the inner circumferential side of the incremental signal generating section 15). An absolute signal generating section which generates an 11-bit absolute signal by a combination of the slits arranged in [7] is provided, and a detection signal is output by a light source and a photosensor (both not shown) arranged at a predetermined position. Incidentally, Table 1 shows the resolution of the incremental signal generator 15. Absolute signal generator 17
The resolution is set higher than that of the absolute signal generator]7, and the position can be detected eight times more precisely than the absolute signal generator]7.

数値制御装置1](よ 駆動制御回路19と、比較・判
定回路21と色備える。駆動制御回路]9へはインクリ
メンタル信号発生部15で検出される信号(以下、イン
フレ信号という)Slが入力さね 比較・判定回路21
べは絶対位置検出装置23を介してアブソリュート信号
発生部17で検出される信号(以下、アブソ信号という
)SAが入力される。
Numerical control device 1] (includes a drive control circuit 19, a comparison/judgment circuit 21, and a drive control circuit 9. A signal Sl detected by an incremental signal generator 15 (hereinafter referred to as an inflation signal) is input to the drive control circuit 9. Comparison/judgment circuit 21
A signal SA (hereinafter referred to as an absolute signal) detected by the absolute signal generating section 17 is inputted via the absolute position detection device 23.

駆動制御回路19(よ 入力されるインフレ信号S1を
積算してワークテーブル1の現在位置P1を求め、この
現在位置P1に基づいて駆動装置9へ制御信号を出力し
ている。また、この算出された現在位置P1は比較・判
定回路21へ送出される。一方、絶対位置検出装置23
1表 入力されるアブソ信号SAとエンコーダ7の回転
回数とから、ワークテーブル1の現在位置P1に対して
178の精度となる絶対位置PAを求めている。なお、
絶対位置検出装置23(友 電源遮断後も絶対位置PA
の情報を記憶保持する様にバックアップされている。こ
うして求められた現在位置P1と絶対位置PAとが比較
・判定回路21に入力さ札 第4図に示す様に、位置検
出に対する異常判定が実行される。
The drive control circuit 19 integrates the input inflation signal S1 to obtain the current position P1 of the work table 1, and outputs a control signal to the drive device 9 based on this current position P1. The current position P1 is sent to the comparison/judgment circuit 21. On the other hand, the absolute position detection device 23
Table 1 An absolute position PA having an accuracy of 178 with respect to the current position P1 of the work table 1 is determined from the input absolute signal SA and the number of rotations of the encoder 7. In addition,
Absolute position detection device 23 (friend) Absolute position PA even after power is cut off
The information is backed up to be retained. The current position P1 and the absolute position PA thus determined are input to the comparison/judgment circuit 21. As shown in FIG. 4, an abnormality determination for the position detection is executed.

異常判定処理1山 所定時間毎に割り込み実行される。One abnormality determination process: Executed by interruption every predetermined time.

処理が開始されると、前述の様に求められたワークテー
ブル1の現在位置P1及び絶対位置PAを読み込む(ス
テップSl、  S2; 以下、ステップのことを単に
Sl、32等という)。
When the process is started, the current position P1 and absolute position PA of the work table 1 determined as described above are read (steps Sl, S2; hereinafter, the steps are simply referred to as Sl, 32, etc.).

次1:、モータ5が駆動中であるか否かを判定する(S
3)。モータ5が駆動中であれ(戴 以下の異常判定に
おける許容誤差Qとして、工作機械による加工上必要と
される制御位置の精度及び各信号発生部15.17から
の検出タイミングのずれや位置算出タイミングのずれ等
を考慮した値Qlを設定する(S4)。一方、モータ5
が駆動していない場合に(友 許容誤差Qとして、工作
11!械の制御位置の精度に基づいて定められた値Q2
が設定される(S5)。なお、値Q1は値Q2より大き
い数値である。
Next 1: Determine whether the motor 5 is being driven (S
3). Even if the motor 5 is driving (Dai), the tolerance Q in the following abnormality determination is the precision of the control position required for processing by the machine tool, the deviation of the detection timing from each signal generator 15, 17, and the position calculation timing. A value Ql is set in consideration of the deviation, etc. of the motor 5 (S4).
When the machine is not driven, the allowable error Q is a value Q2 determined based on the accuracy of the control position of the machine.
is set (S5). Note that the value Q1 is a larger numerical value than the value Q2.

続いて、インクリメンタル信号発生部15による検出値
とアブソリュート信号発生部17による検出値との誤差
Rとして、現在位置P1と絶対位置PAとの差の絶対値
IPI−FAIを求め(S6)、この誤差Rが許容誤差
Qを越えるが否かを判定する(S7)。誤差Rが許容誤
差Qを越える場合(上 インクリメンタル信号発生部1
5の検出値を異常であると判断してエラー信号SEPを
発生する(S8)。
Next, the absolute value IPI-FAI of the difference between the current position P1 and the absolute position PA is determined as the error R between the detected value by the incremental signal generating section 15 and the detected value by the absolute signal generating section 17 (S6), and this error is It is determined whether R exceeds the allowable error Q (S7). When the error R exceeds the allowable error Q (upper incremental signal generator 1
The detected value No. 5 is determined to be abnormal and an error signal SEP is generated (S8).

エラー信号5ER1&  比較・判定回路21に接続さ
れた警報器25へ送られてブザー音や点滅信号等の警報
として現れる。また、エラー信号5ERf&駆動制御回
路19へも送出される。これに応じて駆動制御回路19
はモータ5の駆動を停止させる。
The error signal 5ER1 is sent to the alarm device 25 connected to the comparison/judgment circuit 21 and appears as an alarm such as a buzzer sound or a flashing signal. The error signal 5ERf is also sent to the drive control circuit 19. In response to this, the drive control circuit 19
stops the drive of the motor 5.

以上の様1:、本実施例で(戴 分解能の高いインクリ
メンタル信号発生部15にて検出されるワークテーブル
1の相対的な移動量に基づいてモータ5の駆動制御を実
行し、高精度の位置制御を行っている。しかし、インク
リメンタル信号発生部15の検出信号がノイズの影響や
検出信号の欠落等の何等かの原因により乱される場合が
あり、この信号の乱れに起因する実際の位置(絶対位置
PAに対応する)と制御位置(現在位置P1に対応する
)との誤差Rが許容誤差Qを越える場合を異常と判定し
、直ちにモータ5を停止させると共にブザー音や点滅信
号等により作業者に知らせる。
As described above, 1: In this embodiment, the drive control of the motor 5 is executed based on the relative movement amount of the work table 1 detected by the high-resolution incremental signal generator 15, and the high-precision positioning is performed. However, the detection signal of the incremental signal generator 15 may be disturbed due to some reason such as the influence of noise or the loss of the detection signal, and the actual position ( If the error R between the absolute position PA (corresponding to the absolute position PA) and the control position (corresponding to the current position P1) exceeds the allowable error Q, it is determined to be an abnormality, and the motor 5 is immediately stopped and work is performed by a buzzer sound, flashing signal, etc. inform the person.

この結果、本実施例によれ(f−信頼性の高いアブソリ
ュート信号発生部17からの検出信号を利用することに
より、インクリメンタル信号発生部15の有する信頼性
の問題を解決し、高精度の位置制御を実行可能としてい
る。しかも、モータ5の駆動中は大きな値Q1を許容誤
差として設定し、インフレ信号S1とアブソ信号SAと
の検出タイミングのずれや、現在位置P1及び絶対位置
PAの算出タイミングのずれに基づいて過敏にエラー信
号SEPが発生するのを防止している。その土モータ5
が停止している場合(上 許容誤差Qを小さな値Q2と
して、真に制御上必要な精度に対応させている。
As a result, according to the present embodiment (f), by using the detection signal from the highly reliable absolute signal generating section 17, the reliability problem of the incremental signal generating section 15 can be solved and the position control can be performed with high precision. In addition, a large value Q1 is set as an allowable error while the motor 5 is being driven, and the difference in the detection timing between the inflation signal S1 and the absolute signal SA and the calculation timing of the current position P1 and absolute position PA can be avoided. This prevents the error signal SEP from being generated too sensitively based on the misalignment.
is stopped (above) The allowable error Q is set to a small value Q2 to correspond to the accuracy truly required for control.

このことから、モータ5の停止状態での制御位置の精度
を犠牲にすることなく、エラー信号SEPの過敏な発生
を防止することができ、位置検出器に対する最適な異常
判定を実行することができ、動作不良を早期に発見する
ことが可能である。
From this, it is possible to prevent the error signal SEP from being generated too sensitively without sacrificing the accuracy of the control position when the motor 5 is stopped, and it is possible to perform optimal abnormality determination for the position detector. , it is possible to detect malfunctions at an early stage.

また、本実施例においては、インフレ信号S1とアブソ
信号SAの両方を、−枚の円板13に設けたスリットか
ら得ることができるから、インクツメンタル式位置検出
器とアブソリュート式位置検出器とを別々に備える場合
とは異なり、これらの取付位置関係に基づく誤差を考慮
する必要がない、従って、極めて信頼性の高い異常判定
を行うことができる。
Furthermore, in this embodiment, since both the inflation signal S1 and the absolute signal SA can be obtained from the slits provided in the - discs 13, the incremental position detector and the absolute position detector can be used. Unlike the case where these are provided separately, there is no need to take into account errors based on the relationship between the mounting positions, and therefore extremely reliable abnormality determination can be performed.

なお、実施例では便宜的に一軸線方向に移動するものに
ついて説明したが、X軌 Y軸方向に移動するワークテ
ーブルにもそのまま適用することができ、さらに回転角
度を対象に制御するものに対しても同様の構成で同様の
効果を得ることができる。
In addition, although the example has been explained for convenience in a work table that moves in one axis direction, it can also be applied to a work table that moves in the X-orbit or Y-axis direction, and furthermore, it can be applied to a work table that moves in the X-orbit or Y-axis direction. Similar effects can be obtained with a similar configuration.

また、実施例ではモータ5が駆動中か否かにより許容誤
差を大小いずれかに設定することとしたが、モータ5の
駆動速度に応じてさらに細かく設定することとしても構
わない。加えて、モータ駆動中(よ 異常判定を行わな
いこととしてもよく、この場合(友 許容誤差Qを無限
大として設定する構成と等価である。
Further, in the embodiment, the allowable error is set to be large or small depending on whether or not the motor 5 is being driven, but it may be set more finely depending on the driving speed of the motor 5. In addition, the abnormality determination may not be performed while the motor is being driven; in this case, this is equivalent to a configuration in which the allowable error Q is set to infinity.

さら1:、実施例では現在位置P1と絶対位置P^とを
比較・判定することとしたが、アブソ信号SAから絶対
位置の変化量を算出してインフレ信号S1と直接比較・
判定する構成としてもよい。
Further 1: In the embodiment, the current position P1 and the absolute position P^ are compared and determined, but the amount of change in the absolute position is calculated from the absolute signal SA and directly compared with the inflation signal S1.
It is also possible to have a configuration in which the determination is made.

加えて、本実施例では現在位置P1と絶対位置PAとの
差の絶対値l PI −PA  を用いて異常判定を行
う構成としたが、許容誤差を範囲指定して、例えばモー
タ停止中は一〇a〜+obとし、モータ駆動中は−Qc
−Qdとする等ずれ方向に応じて許容誤差を設定するこ
ととしてもよい。
In addition, in this embodiment, the abnormality determination is performed using the absolute value l PI −PA of the difference between the current position P1 and the absolute position PA. 〇a~+ob, -Qc while motor is driving
The allowable error may be set according to the direction of deviation, such as −Qd.

以上本発明の詳細な説明したが、本発明は何らこれに限
定されず、例えl′L  インクリメンタル式位置検出
器としてはレゾルバを用いる構成とする等、その要旨を
逸脱しない範囲の種々なる態様を採用できる。
Although the present invention has been described in detail above, the present invention is not limited thereto and may be modified in various ways without departing from the gist thereof, such as a configuration in which a resolver is used as the l'L incremental position detector. Can be adopted.

l孔塁四1 以上説明した様1:、本発明によれ(款 位置検出対象
物の移動状態に応じて許容誤差を変更する構成を採用し
たから、本来高精度に保ちたい停止状態での制御位置の
精度を犠牲にすることがないにも係わらず、過敏な異常
判定を実行することがない。この結果、位置検出器の異
常判定を最適に実行することができ、動作不良を早期に
発見することが可能である。
l Hole base 41 As explained above 1: According to the present invention (subsection) Since the configuration is adopted in which the tolerance is changed according to the moving state of the object to be detected, it is possible to perform control in a stopped state where high accuracy is originally desired. Despite not sacrificing positional accuracy, oversensitive abnormality judgment is not performed.As a result, abnormality judgment of the position detector can be performed optimally, and malfunctions can be detected early. It is possible to do so.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の構成を例示するブロック医第2図は実
施例の概略構成を示すブロック医 第3図は実施例に用
いるエンコーダの構成を示す正面医 第4図は異常判定
処理の一例を示すフローチャートである。 21・・・比較・判定回路 23・・・絶対位置検出装置 25・・・警報器
FIG. 1 is a block doctor illustrating the configuration of the present invention. FIG. 2 is a block doctor showing a schematic configuration of an embodiment. FIG. 3 is a front doctor showing the configuration of an encoder used in the embodiment. FIG. 4 is an example of abnormality determination processing. It is a flowchart which shows. 21...Comparison/judgment circuit 23...Absolute position detection device 25...Alarm device

Claims (1)

【特許請求の範囲】 1、移動する位置検出対象物の相対位置の変化量を検出
する相対位置変化量検出手段と、 該相対位置変化量検出手段よりも粗い分解能で前記位置
検出対象物の絶対位置を検出する絶対位置検出手段と、 前記各検出手段で検出される相対位置の変化量及び絶対
位置を換算・比較し、該換算・比較した結果が所定の許
容誤差を越える場合は異常であると判定する異常判定手
段と を備える位置検出器の異常判定装置において、前記位置
検出対象物の移動速度或は停止中であるか移動中である
か等の移動状態に応じて前記許容誤差を変更する許容誤
差変更手段 を備えることを特徴とする位置検出器の異常判定装置。
[Claims] 1. Relative position change amount detection means for detecting the amount of change in the relative position of a moving object to be detected; The absolute position detection means for detecting the position is converted and compared with the amount of change in relative position and the absolute position detected by each of the detection means, and if the result of the conversion and comparison exceeds a predetermined tolerance, it is abnormal. An abnormality determination device for a position detector, comprising: an abnormality determination means for determining that the permissible error is changed according to a moving speed of the position detection target or a moving state such as whether it is stopped or moving. 1. An abnormality determination device for a position detector, comprising a tolerance changing means.
JP23888389A 1989-09-14 1989-09-14 Abnormality deciding device of position detector Pending JPH03100411A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23888389A JPH03100411A (en) 1989-09-14 1989-09-14 Abnormality deciding device of position detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23888389A JPH03100411A (en) 1989-09-14 1989-09-14 Abnormality deciding device of position detector

Publications (1)

Publication Number Publication Date
JPH03100411A true JPH03100411A (en) 1991-04-25

Family

ID=17036684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23888389A Pending JPH03100411A (en) 1989-09-14 1989-09-14 Abnormality deciding device of position detector

Country Status (1)

Country Link
JP (1) JPH03100411A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001215117A (en) * 1999-12-22 2001-08-10 Robert Bosch Gmbh Method and apparatus for determining angle position of rotating structural member
JP2002340619A (en) * 2001-05-16 2002-11-27 Matsushita Electric Ind Co Ltd Turning angle detecting device
JP2006242599A (en) * 2005-02-28 2006-09-14 Okuma Corp Linear encoder
JP2014119284A (en) * 2012-12-13 2014-06-30 Minebea Co Ltd Rotation angle detection device
EP2833544A2 (en) 2013-07-31 2015-02-04 Kabushiki Kaisha Yaskawa Denki Rotating electrical machine control apparatus and rotating electrical machine system
US9157770B2 (en) 2011-07-29 2015-10-13 Mitsubishi Electric Corporation Encoder
JP2018200262A (en) * 2017-05-29 2018-12-20 ファナック株式会社 Encoder system with abnormality detection function and abnormality detection method
JP2019209466A (en) * 2018-06-08 2019-12-12 Dmg森精機株式会社 Measurement system, method and program
JP2020139911A (en) * 2019-03-01 2020-09-03 株式会社安川電機 Encoder, servo motor, and servo system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5440374A (en) * 1977-09-05 1979-03-29 Komatsu Ltd Prevention of wrong operation of numerical-controlled machine tool
JPS54141971A (en) * 1978-04-27 1979-11-05 Toshiba Corp Numerical control device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5440374A (en) * 1977-09-05 1979-03-29 Komatsu Ltd Prevention of wrong operation of numerical-controlled machine tool
JPS54141971A (en) * 1978-04-27 1979-11-05 Toshiba Corp Numerical control device

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001215117A (en) * 1999-12-22 2001-08-10 Robert Bosch Gmbh Method and apparatus for determining angle position of rotating structural member
JP2002340619A (en) * 2001-05-16 2002-11-27 Matsushita Electric Ind Co Ltd Turning angle detecting device
JP2006242599A (en) * 2005-02-28 2006-09-14 Okuma Corp Linear encoder
US9157770B2 (en) 2011-07-29 2015-10-13 Mitsubishi Electric Corporation Encoder
DE112011105479B4 (en) * 2011-07-29 2020-06-04 Mitsubishi Electric Corporation Encoder
US10184806B2 (en) 2012-12-13 2019-01-22 Minebea Co., Ltd. Rotation angle detection device
JP2014119284A (en) * 2012-12-13 2014-06-30 Minebea Co Ltd Rotation angle detection device
EP2833544A3 (en) * 2013-07-31 2015-12-30 Kabushiki Kaisha Yaskawa Denki Rotating electrical machine control apparatus and rotating electrical machine system
US9287756B2 (en) 2013-07-31 2016-03-15 Kabushiki Kaisha Yaskawa Denki Rotating electrical machine control apparatus and rotating electrical machine system
EP2833544A2 (en) 2013-07-31 2015-02-04 Kabushiki Kaisha Yaskawa Denki Rotating electrical machine control apparatus and rotating electrical machine system
JP2018200262A (en) * 2017-05-29 2018-12-20 ファナック株式会社 Encoder system with abnormality detection function and abnormality detection method
US10360784B2 (en) 2017-05-29 2019-07-23 Fanuc Corporation Encoder system having function of detecting abnormality, and method for detecting abnormality of the same
JP2019209466A (en) * 2018-06-08 2019-12-12 Dmg森精機株式会社 Measurement system, method and program
WO2019234994A1 (en) * 2018-06-08 2019-12-12 Dmg森精機株式会社 Measurement system, measurement method, and measurement program
JP2020139911A (en) * 2019-03-01 2020-09-03 株式会社安川電機 Encoder, servo motor, and servo system

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