JPH03100093U - - Google Patents

Info

Publication number
JPH03100093U
JPH03100093U JP741390U JP741390U JPH03100093U JP H03100093 U JPH03100093 U JP H03100093U JP 741390 U JP741390 U JP 741390U JP 741390 U JP741390 U JP 741390U JP H03100093 U JPH03100093 U JP H03100093U
Authority
JP
Japan
Prior art keywords
chucking
chucked
base material
raised
lowered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP741390U
Other languages
English (en)
Japanese (ja)
Other versions
JPH077110Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990007413U priority Critical patent/JPH077110Y2/ja
Publication of JPH03100093U publication Critical patent/JPH03100093U/ja
Application granted granted Critical
Publication of JPH077110Y2 publication Critical patent/JPH077110Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1990007413U 1990-01-29 1990-01-29 チャッキング装置 Expired - Lifetime JPH077110Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990007413U JPH077110Y2 (ja) 1990-01-29 1990-01-29 チャッキング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990007413U JPH077110Y2 (ja) 1990-01-29 1990-01-29 チャッキング装置

Publications (2)

Publication Number Publication Date
JPH03100093U true JPH03100093U (US20020051482A1-20020502-M00012.png) 1991-10-18
JPH077110Y2 JPH077110Y2 (ja) 1995-02-22

Family

ID=31511070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990007413U Expired - Lifetime JPH077110Y2 (ja) 1990-01-29 1990-01-29 チャッキング装置

Country Status (1)

Country Link
JP (1) JPH077110Y2 (US20020051482A1-20020502-M00012.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62165887U (US20020051482A1-20020502-M00012.png) * 1986-04-08 1987-10-21

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62165887U (US20020051482A1-20020502-M00012.png) * 1986-04-08 1987-10-21

Also Published As

Publication number Publication date
JPH077110Y2 (ja) 1995-02-22

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