JPH0297903A - Production of color filter - Google Patents
Production of color filterInfo
- Publication number
- JPH0297903A JPH0297903A JP63251075A JP25107588A JPH0297903A JP H0297903 A JPH0297903 A JP H0297903A JP 63251075 A JP63251075 A JP 63251075A JP 25107588 A JP25107588 A JP 25107588A JP H0297903 A JPH0297903 A JP H0297903A
- Authority
- JP
- Japan
- Prior art keywords
- filters
- color
- dyed
- filter
- films
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title description 12
- 239000000758 substrate Substances 0.000 claims abstract description 7
- 238000000926 separation method Methods 0.000 claims description 16
- 230000002265 prevention Effects 0.000 claims description 9
- 238000011109 contamination Methods 0.000 claims description 7
- 238000004043 dyeing Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 12
- 239000002861 polymer material Substances 0.000 abstract description 8
- 238000004528 spin coating Methods 0.000 abstract description 6
- 239000003086 colorant Substances 0.000 abstract description 4
- 230000001681 protective effect Effects 0.000 abstract description 4
- 239000010408 film Substances 0.000 description 24
- 239000000975 dye Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- 230000000295 complement effect Effects 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 230000008961 swelling Effects 0.000 description 2
- 108010010803 Gelatin Proteins 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 239000005018 casein Substances 0.000 description 1
- BECPQYXYKAMYBN-UHFFFAOYSA-N casein, tech. Chemical compound NCCCCC(C(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(CC(C)C)N=C(O)C(CCC(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(C(C)O)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(COP(O)(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(N)CC1=CC=CC=C1 BECPQYXYKAMYBN-UHFFFAOYSA-N 0.000 description 1
- 235000021240 caseins Nutrition 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 239000008273 gelatin Substances 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- AJDUTMFFZHIJEM-UHFFFAOYSA-N n-(9,10-dioxoanthracen-1-yl)-4-[4-[[4-[4-[(9,10-dioxoanthracen-1-yl)carbamoyl]phenyl]phenyl]diazenyl]phenyl]benzamide Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2NC(=O)C(C=C1)=CC=C1C(C=C1)=CC=C1N=NC(C=C1)=CC=C1C(C=C1)=CC=C1C(=O)NC1=CC=CC2=C1C(=O)C1=CC=CC=C1C2=O AJDUTMFFZHIJEM-UHFFFAOYSA-N 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007447 staining method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000001043 yellow dye Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
この発明は、カラーフィルタの製造方法に関し、特に、
固体撮像装置の撮］象素子や、液晶デイスプレィ装置の
表示素子に用いられる微細なカラーフィルタの製造方法
に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a method for manufacturing a color filter, and in particular,
The present invention relates to a method of manufacturing fine color filters used in image elements of solid-state imaging devices and display elements of liquid crystal display devices.
［従来の技術］
第２図はたとえば特公昭５２−１７３７５号公報に示さ
れた従来のカラーフィルタ製造り法を用いて形成された
カラーフィルタの断面構造を示す図である。第２図にお
いて、カラーフィルタは受光素子アレイなどが配置され
た半導体やガラスなどの基板１と、たとえばシアン色の
第１のカラフィルタ２と、透明高分子材料で形成された
汚染防＋ＬＩＩ＋３．５と、たとえばイエロー色の第２
のカラーフィルタ４と、たとえばグリーン色の第３のカ
ラーフィルタ６と、透明高分子＋」料で形成された保護
膜７とから構成される。[Prior Art] FIG. 2 is a diagram showing a cross-sectional structure of a color filter formed using the conventional color filter manufacturing method disclosed in, for example, Japanese Patent Publication No. 52-17375. In FIG. 2, the color filter includes a substrate 1 made of semiconductor or glass on which a light-receiving element array etc. are arranged, a first color filter 2 of cyan color, for example, and a pollution prevention +LII+3.5 made of a transparent polymer material. and, for example, the second color of yellow.
, a third color filter 6 of green color, for example, and a protective film 7 made of a transparent polymer material.
次に、上述のカラーフィルタの製造方法について簡単に
説明する。Next, a method for manufacturing the above color filter will be briefly described.
基板１上に被染色性の高分子祠料（たとえばゼラチン、
カゼインなど）の薄膜をスピン塗布法等により所望の膜
厚に形成し、次にフォトリソグラフィ技術を用いて所望
のパターンを得る。続いて、染色法をＩＴＩ Ｌ＼て、
たとえばシアン色の（イｆ〜１で上述のパターンを染色
し、第１のカラーフィルタ２を形成する。次に、汚染防
止のための透明高分子材料３で第１のカラーフィルタ２
を被覆した後、上述と同様にして、たとえばイエロー色
の染料を用いて第２のカラーフィルタ４を形成する。次
に、汚染防止性能を白−する高分子材料を介してたとえ
ばグリーン色の第３のカラーフィルタ６を形成し、最後
に透明な保護膜７で被覆する。以上のようにして、シア
ンフィルタ２．イエローフィルタ４゜グリーンフィルタ
６およびホワイトフィルタ８の４色からなるカラーフィ
ルタが形成される。A dyeable polymer abrasive material (e.g. gelatin,
A thin film of casein, etc.) is formed to a desired thickness by spin coating or the like, and then a desired pattern is obtained using photolithography. Next, the staining method was ITI L\
For example, the above-mentioned pattern is dyed with cyan color (If~1) to form the first color filter 2. Next, the first color filter 2 is dyed with a transparent polymer material 3 for preventing contamination.
After coating, the second color filter 4 is formed using, for example, a yellow dye in the same manner as described above. Next, a third color filter 6 of green color, for example, is formed through a polymeric material with white stain prevention performance, and finally covered with a transparent protective film 7. As described above, cyan filter 2. A color filter consisting of four colors: yellow filter 4, green filter 6, and white filter 8 is formed.
［発明が解決しようとする課題］
上述した被染色性の高分子材料は染料により染色される
と膨潤し、かつその膨潤度は染料によって異なっている
。このため、膨潤度の異なるそれぞれのカラーフィルタ
間および被染色性のパターンの存（にしないホワイトフ
ィルタ部分との間に段差が生じ、レンズ効果やフィルタ
間の段差などのために混色を起こすので、精度の良いカ
ラーフィルタが形成できない等の問題点があった。[Problems to be Solved by the Invention] The above-described dyeable polymer material swells when dyed with a dye, and the degree of swelling differs depending on the dye. For this reason, there are differences in level between the color filters with different degrees of swelling and between the white filter parts that do not have patterns that can be dyed, and color mixing occurs due to lens effects and differences in level between the filters. There were problems such as the inability to form highly accurate color filters.
それゆえに、この発明は上述のような問題点を解消する
ためになされたもので、各フィルタを同一面上に形成す
ることにより、各フィルタ間の段差を抑え、レンズ効果
等による混色のない高精度なカラーフィルタを製造する
カラーフィルタの製造方法を提供することを目的とする
。Therefore, this invention was made to solve the above-mentioned problems. By forming each filter on the same surface, the height difference between the filters can be suppressed, and color mixing due to lens effects etc. can be avoided. It is an object of the present invention to provide a color filter manufacturing method for manufacturing accurate color filters.
［課題を解決するための手段］
この発明に係るカラーフィルタの製造方法は、基板上の
カラーフィルタとなる複数領域を互いに分離するための
分離壁を基数上に形成する第１のステップと、分離壁間
の予め定める領域にカラーフィルタとなる被染色膜を形
成し、該被染色膜を染色して染色膜を得る第２のステッ
プと、染色膜上に（ＩＡＩ別に独立して汚染防止膜を形
成する第３のステップとを備える。[Means for Solving the Problems] A method for manufacturing a color filter according to the present invention includes a first step of forming a separation wall on a radix for separating a plurality of regions to be color filters on a substrate from each other; A second step is to form a dyed film to serve as a color filter in a predetermined area between the walls and dye the dyed film to obtain a dyed film. and a third step of forming.
［作用］
この発明では、カラーフィルタとなる複数領域を互いに
分離するための分離壁を形成し、分離壁間の予め定めら
れた領域に各カラーフィルタを形成するようにしたので
、カラーフィルタを同一面上に形成することかできる。[Function] In this invention, a separation wall is formed to separate a plurality of areas that become color filters from each other, and each color filter is formed in a predetermined area between the separation walls, so that color filters can be used in the same manner. It can be formed on a surface.
［発明の実施例］ 以下、この発明の実施例を図について説明する。[Embodiments of the invention] Embodiments of the present invention will be described below with reference to the drawings.
第１Ａ図ないし第１Ｅ図はこの発明の一実施例のカラー
フィルタの製造方法を示す工程図である。1A to 1E are process diagrams showing a method of manufacturing a color filter according to an embodiment of the present invention.
次に、この発明の一実施例のカラーフィルタの製造方法
について説明する。Next, a method for manufacturing a color filter according to an embodiment of the present invention will be described.
まず、第１Ａ図に示すように、基板１上に透明高分子材
料（たとえばＦＶＲ等のネガレジストまたはＣＦＧＲ−
２０１０等のポジレジスト）をスピン塗布法等によって
所ｇノの厚さに塗布し、リングラフィ技術を用いて所望
の位置に分離Ｌ！：１０を形成する。次に、第１Ｂ図に
示すように、波乗色性の高分子材料（たとえばゼラチン
、カゼインなど）の薄膜をスピン塗布法により塗（＋ｉ
Ｌ、、リソグラフィ技術等によって所望の分離壁１０
間に所望の膜厚の被染色膜１１を形成する。被染色膜１
１は染色後の膜厚が分離壁１０と同じ高さになる膜厚に
する。続いて、被染色膜１１をたとえばシアン色に染色
する。これにより、第１Ｃ図に示すように、分離壁１０
と同じ高さのシアン色のフィルタ１２ａか得られる。次
に、スピン塗布法により透明高分子飼料を塗布し、リソ
グラフィ技術等によってシアン色のフィルタ１２ａ上に
所望の厚さの汚染防止膜１３ａを形成する。First, as shown in FIG. 1A, a transparent polymer material (for example, a negative resist such as FVR or CFGR-
A positive resist such as 2010) is applied to a desired thickness using a spin coating method or the like, and separated at a desired position using phosphorography technology. : form 10. Next, as shown in FIG.
L, a desired separation wall 10 is formed using lithography technology or the like.
A dyed film 11 having a desired thickness is formed in between. Film to be dyed 1
1 is a film thickness that makes the film thickness after dyeing the same height as the separation wall 10. Subsequently, the film to be dyed 11 is dyed, for example, in cyan color. As a result, as shown in FIG. 1C, the separation wall 10
A cyan filter 12a having the same height as the above is obtained. Next, a transparent polymer feed is applied by a spin coating method, and a contamination prevention film 13a having a desired thickness is formed on the cyan filter 12a by a lithography technique or the like.
以下、同様の手順で、所望の分離壁１０間に被染色膜を
形成し、たとえばグリーン色に染色して、第１Ｄ図に示
すグリーン色のフィルタ１２ｂを得る。続いて、グリー
ン色のフィルタ１２ｂ上に所望の厚さの汚染防止膜１３
ｂを形成し、さらに、所望の分離壁１ｏ ｔａｒ）に被
染色膜を形成し、たとえばイエロー色に染色してイエロ
ー色のフィルタ１２ｃを得る。続いて、イエロー色のフ
ィルタ１２Ｃ上に所望の厚さの１９染防止膜１３ｃを形
成する。Thereafter, in the same manner, a dyed film is formed between desired separation walls 10 and dyed, for example, in green to obtain a green filter 12b shown in FIG. 1D. Next, a contamination prevention film 13 of a desired thickness is formed on the green filter 12b.
Further, a dyed film is formed on a desired separation wall 1o tar) and dyed, for example, yellow to obtain a yellow filter 12c. Subsequently, a 19-color anti-dyeing film 13c having a desired thickness is formed on the yellow filter 12C.
次に、第１Ｅ図に示すように、透明高分子材料をスピン
塗布法により塗布し、リソグラフィ技術によって所望の
分離壁１０間に所望の膜厚のホワイト色のフィルタ１２
ｄを形成する。このホワイト色のフィルタ１２ｄの膜厚
は、好ましくは分離壁の膜厚に汚染防止膜の膜厚を加え
た膜厚とする。Next, as shown in FIG. 1E, a transparent polymer material is applied by spin coating, and a white filter 12 with a desired thickness is applied between the desired separation walls 10 by lithography.
form d. The thickness of the white filter 12d is preferably the sum of the thickness of the separation wall and the thickness of the pollution prevention film.
最後に、透明高分子材料をスピン塗布用により所望の膜
厚に塗布し、保護膜１４を形成する。Finally, a transparent polymer material is applied to a desired thickness by spin coating to form a protective film 14.
なお、上記実施例では、ホワイト色のフィルタ１２ｄを
独立したプロセスで形成したが、他のフィルタの各汚染
防止膜１３ａ〜１３ｃを形成するときに同時に形成して
もよい。また、上記実施例ではシアン色、グリーン色、
イエロー色、ホワイト色の順番にフィルタを形成してい
るが、形成の順はとのような順序でもよく、上記実施例
と同様の効果を奏する。さらに、上記実施例では最後に
形成したカラーフィルタ上にも〆η染防止股を形成して
いるが、特に形成する必要はなく、その場合には、当該
フィルタの膜厚を汚染防止膜と分離壁の膜厚の和とすれ
ばよい。上記実施例では、分離壁は透明となっているが
、フィルタが黒色または補色系の場合には、グリーン色
でもよい。In the above embodiment, the white filter 12d is formed in an independent process, but it may be formed at the same time as the pollution prevention films 13a to 13c of other filters. In addition, in the above embodiment, cyan color, green color,
Although the filters are formed in the order of yellow and white, the filters may be formed in the following order and the same effect as in the above embodiment can be obtained. Furthermore, in the above example, a dye prevention film is also formed on the color filter formed last, but there is no need to form it, and in that case, the film thickness of the filter can be separated from the pollution prevention film. It may be the sum of the wall thicknesses. In the above embodiment, the separation wall is transparent, but if the filter is black or a complementary color, it may be green.
また、上記実施例では、ホワイト色のフィルタを含む４
色の補色系カラーフィルタについて説明したが、カラー
フィルタの配列はとのようなものでもよく、たとえばレ
ッド、グリーン、ブルーの３色の場合には、上記実施例
のホワイト色のカラーフィルタは必要でなくなり、また
、ンアン１ グリーン、イエロー、マゼンダの４色の場
合には、上記実施例のホワイト色のフィルタの代わりに
、他の色のフィルタと同様のプロセスをマゼンダ色につ
いて行なえばよい。In addition, in the above embodiment, four filters including a white filter are used.
Although we have described complementary color filters, the arrangement of color filters may be as shown below. For example, in the case of three colors, red, green, and blue, the white color filter of the above example is not necessary. In addition, in the case of the four colors green, yellow, and magenta, the same process as for the other color filters may be performed for the magenta color instead of the white color filter in the above embodiment.
［発明の効果］
以上のように、この発明によれば、基板上に各フィルタ
を分離する分離壁を設け、所望の分離壁間に各色フィル
タを形成するようにしたので、同一平面上にフィルタを
形成することかてき、フィルタ間の段刀をなくすことが
できる。また、各色フィルタ上に個別に独立して汚染防
止膜を形成するようにしたので、染色膜の汚染が防止さ
れる。[Effects of the Invention] As described above, according to the present invention, separation walls for separating each filter are provided on the substrate, and each color filter is formed between desired separation walls, so that the filters are arranged on the same plane. It is possible to eliminate the steps between the filters. Further, since the anti-contamination film is formed individually on each color filter, contamination of the dyed film can be prevented.
したがって、混色などのない高精度なカラーフィルタを
製造することかできる。Therefore, a highly accurate color filter without color mixture can be manufactured.
第１Ａ図ないし第１Ｅ図はこの発明の一実施例のカラー
フィルタの製造方法を示す工程図である。
第２図は従来のカラーフィルタの製造方法によるカラー
フィルタの断面図である。
図において、ｌは基数、１０は分離壁、１１は被染色膜
、１２ａはシアン色のフ、イルタ、１２ｂはグリーン色
のフィルタ、１２Ｃはイエロー色のフィルタ、］２ｄは
ホワイト色のフィルタ、１３８〜１３ｃは汚染時Ｉに膜
、１４は保護ｊ１ぐを示す。
なお、図中、同一符号は同一または（口当部分を示す。
第１Ａｚ
第１Ｂ口1A to 1E are process diagrams showing a method of manufacturing a color filter according to an embodiment of the present invention. FIG. 2 is a sectional view of a color filter produced by a conventional color filter manufacturing method. In the figure, l is a base number, 10 is a separation wall, 11 is a dyed film, 12a is a cyan filter, 12b is a green filter, 12C is a yellow filter, ] 2d is a white filter, 138 ~13c shows the membrane at the time of contamination I, and 14 shows the protection j1g. In addition, in the drawings, the same reference numerals indicate the same or (mouthpiece parts. 1Az 1B mouth
Claims (1)
るための分離壁を基板上に形成する第１のステップと、 前記分離壁間の予め定める領域にカラーフィルタとなる
波染色膜を形成し、該被染色膜を染色して染色膜を得る
第２のステップと、 前記染色膜上に個別に独立して汚染防止膜を形成する第
３のステップとを備え、 前記第２および第３ステップを必要に応じて繰返すこと
により、所望の色フィルタを形成するようにした、カラ
ーフィルタの製造方法。[Claims] A first step of forming separation walls on the substrate to separate a plurality of regions that will become color filters on the substrate, and wave dyeing that will become color filters in predetermined regions between the separation walls. a second step of forming a film and dyeing the film to be dyed to obtain a dyed film; and a third step of individually and independently forming a contamination prevention film on the dyed film, the second step and the third step as necessary to form a desired color filter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63251075A JPH0297903A (en) | 1988-10-04 | 1988-10-04 | Production of color filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63251075A JPH0297903A (en) | 1988-10-04 | 1988-10-04 | Production of color filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0297903A true JPH0297903A (en) | 1990-04-10 |
Family
ID=17217262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63251075A Pending JPH0297903A (en) | 1988-10-04 | 1988-10-04 | Production of color filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0297903A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USRE43574E1 (en) | 2002-11-20 | 2012-08-14 | Samsung Electronics Co., Ltd. | Four color liquid crystal display and panel therefor |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57185005A (en) * | 1981-05-08 | 1982-11-15 | Nec Corp | Color filter for solid-state image pickup element |
| JPS59226305A (en) * | 1983-06-07 | 1984-12-19 | Matsushita Electric Ind Co Ltd | Production of optical filter |
| JPS6366502A (en) * | 1986-09-09 | 1988-03-25 | Matsushita Electric Ind Co Ltd | Production of color filter for liquid crystal display body |
-
1988
- 1988-10-04 JP JP63251075A patent/JPH0297903A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57185005A (en) * | 1981-05-08 | 1982-11-15 | Nec Corp | Color filter for solid-state image pickup element |
| JPS59226305A (en) * | 1983-06-07 | 1984-12-19 | Matsushita Electric Ind Co Ltd | Production of optical filter |
| JPS6366502A (en) * | 1986-09-09 | 1988-03-25 | Matsushita Electric Ind Co Ltd | Production of color filter for liquid crystal display body |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USRE43574E1 (en) | 2002-11-20 | 2012-08-14 | Samsung Electronics Co., Ltd. | Four color liquid crystal display and panel therefor |
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